Specific Process Knowledge/Characterization/Thickness Measurer: Difference between revisions
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Revision as of 15:18, 21 October 2013
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This is a micrometer-screw.
It measures with an accurracy within a few µm. The range is from a few µm up to 5mm. Measure the wafer in the box next to the meter. If this is ok, then other wafers can be measured. There is a calibration device by the DEKTAK. It is calibrated at 750µm.