Specific Process Knowledge/Etch/Etching of Aluminium

Etching of Aluminium

Etching of aluminium is done wet at Danchip. We have two different solutions:

(1) H$_{2}$O:H$_{3}$PO$_{4}$ 1:2 at 50 ^oC (2) Pre-mixed etch solution: PES 77-19-04 at 20 ^oC