Specific Process Knowledge/Thin film deposition/Deposition of Tungsten/Sputtering of W in Sputter Coater 3: Revision history

18 February 2023

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2 January 2023

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21 December 2022

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14 December 2022

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• curprev 19:5219:52, 14 December 2022‎ Eves talk contribs‎ 14,087 bytes +65‎ →‎X-ray Reflectivity
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• curprev 19:3019:30, 14 December 2022‎ Eves talk contribs‎ 13,764 bytes 0‎ →‎SEM Inspection

• curprev 19:2819:28, 14 December 2022‎ Eves talk contribs‎ 13,764 bytes +13,764‎ Created page with "Sputter Coater 3 is mainly used for sample preparation before SEM inspection. Usually, Au is sputtered on dielectric surfaces to compensate for charge build-up. Alternatively, many other materials can be sputtered if the setup allows (you need to have a turbo pump and Ar gas). Gold can be deposited even in pure oxygen plasma and only with roughing pumps. Fortunately, Sputter Coater 3 located in the basement of building 346, has both a turbo pump and an Ar working gas sou..."