Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride/Deposition of silicon nitride using Lesker sputter system: Revision history

11 May 2023

• curprev 11:1211:12, 11 May 2023‎ Paphol talk contribs‎ 2,007 bytes +85‎ No edit summary

30 August 2022

• curprev 10:3710:37, 30 August 2022‎ Paphol talk contribs‎ 1,922 bytes +28‎ →‎Recipes
• curprev 10:3310:33, 30 August 2022‎ Paphol talk contribs‎ 1,894 bytes +33‎ →‎Recipes

23 April 2020

• curprev 12:1612:16, 23 April 2020‎ Reet talk contribs‎ 1,861 bytes +721‎ added more info on new cluster sputter system chambers with links
• curprev 12:1212:12, 23 April 2020‎ Reet talk contribs‎ m 1,140 bytes +14‎ altered name of sputter system to match LabManager now that we have a new Lesker sputter system...

27 July 2018

• curprev 14:3614:36, 27 July 2018‎ Paphol talk contribs‎ 1,126 bytes +2‎ →‎Recipes
• curprev 14:3614:36, 27 July 2018‎ Paphol talk contribs‎ 1,124 bytes −1‎ →‎Recipes
• curprev 14:3614:36, 27 July 2018‎ Paphol talk contribs‎ 1,125 bytes −13‎ →‎Recipes
• curprev 14:3514:35, 27 July 2018‎ Paphol talk contribs‎ 1,138 bytes +90‎ →‎Recipes

29 June 2016

• curprev 10:4510:45, 29 June 2016‎ Paphol talk contribs‎ 1,048 bytes +14‎ →‎Recipes
• curprev 10:4410:44, 29 June 2016‎ Paphol talk contribs‎ 1,034 bytes +6‎ →‎Recipes

10 March 2014

• curprev 11:5411:54, 10 March 2014‎ Jehan talk contribs‎ 1,028 bytes +1,028‎ Created page with "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thi..."