Specific Process Knowledge/Etch/III-V ICP/InP-InGaAsP-InGaAs/InP etch with Cl2-H2-Ar: Revision history

24 March 2023

• curprev 11:1811:18, 24 March 2023‎ Bghe talk contribs‎ 9,967 bytes +1‎ No edit summary
• curprev 11:1811:18, 24 March 2023‎ Bghe talk contribs‎ 9,966 bytes +15‎ No edit summary

7 September 2022

• curprev 10:2310:23, 7 September 2022‎ Bghe talk contribs‎ 9,951 bytes +23‎ No edit summary

6 September 2022

• curprev 13:1413:14, 6 September 2022‎ Bghe talk contribs‎ 9,928 bytes −192‎ →‎InP etching with Cl2 and H2 including some Ar

25 November 2019

• curprev 17:3117:31, 25 November 2019‎ Bghe talk contribs‎ 10,120 bytes −48‎ No edit summary
• curprev 17:3017:30, 25 November 2019‎ Bghe talk contribs‎ 10,168 bytes +10‎ →‎Variation of coil power only
• curprev 15:2115:21, 25 November 2019‎ Bghe talk contribs‎ 10,158 bytes +3‎ No edit summary
• curprev 15:2115:21, 25 November 2019‎ Bghe talk contribs‎ 10,155 bytes +45‎ No edit summary
• curprev 14:4314:43, 25 November 2019‎ Bghe talk contribs‎ 10,110 bytes +9,866‎ No edit summary

• curprev 14:4314:43, 25 November 2019‎ Bghe talk contribs‎ 244 bytes +244‎ Created page with "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etc..."