Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using AOE/Standard recipe with resist mask/Etch of Al2O3: Revision history

31 January 2023

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18 August 2021

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25 January 2019

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24 November 2015

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• curprev 11:2911:29, 24 November 2015‎ Bghe talk contribs‎ 4,073 bytes +4,073‎ Created page with "==Etching of micro structures in Aluminum oxide== ''by Fredrik Stöhr'' Aluminum oxide (Al₂O₃, Alumina) can be etched with the standard recipe for silic..."