Specific Process Knowledge/Etch/Etching of Silicon Nitride/Etch of Silicon Nitride using RIE: Revision history

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curprev 12:0512:05, 24 March 2023‎ Bghe talk contribs‎ 2,672 bytes +15‎ No edit summary

curprev 13:0413:04, 6 September 2022‎ Bghe talk contribs‎ 2,657 bytes +127‎ →‎Both RIE's (RIE1 and RIE2) for silicon based etching have been decommissioned

curprev 14:2014:20, 25 November 2019‎ Jmli talk contribs‎ 2,530 bytes 0‎ No edit summary
curprev 14:2014:20, 25 November 2019‎ Jmli talk contribs‎ 2,530 bytes +5‎ →‎Both RIE's (RIE1 and RIE2) for silicon based etching has been decommissioned

curprev 14:5814:58, 7 May 2018‎ Bghe talk contribs‎ 2,525 bytes +117‎ No edit summary

curprev 07:4607:46, 30 June 2016‎ Bghe talk contribs‎ 2,408 bytes +50‎ →‎Expected result using the above RIE recipes for etching of silicon nitride:

curprev 15:3315:33, 22 April 2014‎ Bghe talk contribs‎ 2,358 bytes +71‎ →‎Expected result using the above RIE recipes for etching of silicon nitride:

curprev 13:5613:56, 23 September 2013‎ Bghe talk contribs‎ 2,287 bytes +257‎ No edit summary

curprev 15:3415:34, 22 January 2010‎ BGE talk contribs‎ 2,030 bytes +24‎ →‎Expected result using the above RIE recipes for etching of silicon nitride:

curprev 11:5111:51, 21 September 2009‎ Pvl talk contribs‎ 2,006 bytes 0‎ No edit summary
curprev 11:5011:50, 21 September 2009‎ Pvl talk contribs‎ 2,006 bytes +432‎ No edit summary

curprev 11:2511:25, 5 March 2009‎ BGE talk contribs‎ 1,574 bytes 0‎ →‎Some RIE recipes for etching of silicon nitride:

curprev 09:5909:59, 23 April 2008‎ BGE talk contribs‎ 1,574 bytes +1‎ →‎Expected result using the above RIE recipes for etching of silicon nitride:
curprev 09:5809:58, 23 April 2008‎ BGE talk contribs‎ 1,573 bytes +3‎ →‎Some RIE recipes for etching of silicon nitride:

curprev 15:0615:06, 5 November 2007‎ BGE talk contribs‎ 1,407 bytes +40‎ →‎Expected result using the above RIE recipes for etching of silicon nitride:
curprev 15:0115:01, 5 November 2007‎ 192.38.87.76 talk‎ 1,367 bytes +622‎ No edit summary
curprev 14:3414:34, 5 November 2007‎ 192.38.87.76 talk‎ 745 bytes +266‎ No edit summary

curprev 09:3809:38, 30 October 2007‎ 192.38.87.76 talk‎ 479 bytes +56‎ No edit summary

curprev 16:0516:05, 29 October 2007‎ BGE talk contribs‎ 423 bytes +423‎ New page: For a general introduction to RIE at Danchip see RIE (Reactive Ion Etch) Etching of silicon nitride using RIE can be done with several recipes. It can be etched by our standard silic...

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