Specific Process Knowledge/Etch/Etching of Silicon/Si etch using RIE1 or RIE2/Specific Process Knowledge/Etch/Etching of Silicon/Si etch using RIE1 or RIE2/RIE1 Travka results: Revision history

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curprev 15:2415:24, 6 February 2023‎ Bghe talk contribs‎ 5,721 bytes +12‎ No edit summary
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curprev 10:2010:20, 28 January 2019‎ Bghe talk contribs‎ 5,638 bytes −222‎ →‎Results

curprev 11:0611:06, 4 April 2016‎ Bghe talk contribs‎ 5,860 bytes +3‎ →‎RIE1 HAS BEEN DECOMMISSIONED
curprev 11:0411:04, 4 April 2016‎ Bghe talk contribs‎ 5,857 bytes +35‎ →‎RIE1 HAS BEEN DECOMMISSIONED

curprev 09:5509:55, 12 August 2015‎ Pevo talk contribs‎ 5,822 bytes +312‎ Undo revision 19753 by Pevo (talk)
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curprev 09:5309:53, 12 August 2015‎ Pevo talk contribs‎ 4,730 bytes −780‎ →‎Results
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curprev 15:2015:20, 22 April 2014‎ Bghe talk contribs‎ 5,822 bytes −112‎ →‎THIS PAGE IS UNDER CONSTRUCTION200px
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curprev 08:3508:35, 4 April 2013‎ Pvl talk contribs‎ 5,902 bytes +1‎ →‎RIE1 Travka results - Silicon etch rate and profile as function of etch load

curprev 16:4616:46, 31 January 2013‎ Pvl talk contribs‎ 5,664 bytes +78‎ →‎This page is under construction

curprev 14:0414:04, 30 January 2013‎ BGE talk contribs‎ 5,586 bytes +1‎ →‎This page is under construction

curprev 13:4513:45, 14 January 2013‎ Jml talk contribs‎ 5,585 bytes +3‎ →‎Results

curprev 11:5911:59, 9 October 2012‎ Pvl talk contribs‎ 5,582 bytes +5,582‎ New page: =This page is under construction= ===RIE1 Travka results - Etch rate and profile as function of etch load=== Seven silicon wafers have been etched in RIE1 using the "OH_polyA" recipe. A...

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