Specific Process Knowledge/Etch/AOE (Advanced Oxide Etch)/Silicon Nitride Etch using AOE/Nitride etch with DUV mask: Revision history

View logs for this page

Jump to navigation Jump to search

Diff selection: Mark the radio buttons of the revisions to compare and hit enter or the button at the bottom.
Legend: (cur) = difference with latest revision, (prev) = difference with preceding revision, m = minor edit.

curprev 12:0112:01, 3 February 2023‎ Bghe talk contribs‎ 1,349 bytes +5‎ No edit summary
curprev 11:5911:59, 3 February 2023‎ Bghe talk contribs‎ 1,344 bytes +12‎ No edit summary

curprev 17:4417:44, 20 December 2022‎ Bghe talk contribs‎ 1,332 bytes −18‎ →‎Silicon nitride etch with STS recommended silicon nitride recipe

curprev 15:0115:01, 18 August 2021‎ Bghe talk contribs‎ 1,350 bytes +1‎ No edit summary

curprev 10:2210:22, 28 January 2019‎ Bghe talk contribs‎ 1,349 bytes +8‎ →‎Silicon nitride etch with the standard silicon oxide etch
curprev 10:2210:22, 28 January 2019‎ Bghe talk contribs‎ 1,341 bytes +9‎ →‎Silicon nitride etch with STS recommended silicon nitride recipe

curprev 09:4909:49, 11 April 2016‎ Bghe talk contribs‎ 1,332 bytes +4‎ →‎Silicon nitride etch with STS recommended silicon nitride recipe

curprev 17:0417:04, 16 March 2016‎ Bghe talk contribs‎ 1,328 bytes +92‎ →‎Silicon nitride etch with STS recommended silicon nitride recipe
curprev 16:5316:53, 16 March 2016‎ Bghe talk contribs‎ 1,236 bytes +455‎ No edit summary

curprev 16:0516:05, 15 March 2016‎ Bghe talk contribs‎ 781 bytes +71‎ No edit summary
curprev 16:0416:04, 15 March 2016‎ Bghe talk contribs‎ 710 bytes −2‎ No edit summary
curprev 16:0416:04, 15 March 2016‎ Bghe talk contribs‎ 712 bytes +63‎ No edit summary

curprev 13:4113:41, 16 October 2015‎ Bghe talk contribs‎ 588 bytes +588‎ Created page with "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etc..."

Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/AOE_(Advanced_Oxide_Etch)/Silicon_Nitride_Etch_using_AOE/Nitride_etch_with_DUV_mask"