LabAdviser/Technology Research/Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition/AZO gratings: Revision history

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curprev 14:3214:32, 2 February 2023‎ Eves talk contribs‎ 9,947 bytes −1‎ No edit summary

curprev 18:4918:49, 1 February 2023‎ Eves talk contribs‎ 9,948 bytes +11‎ No edit summary
curprev 18:4418:44, 1 February 2023‎ Eves talk contribs‎ 9,937 bytes +46‎ No edit summary
curprev 18:4418:44, 1 February 2023‎ Eves talk contribs‎ 9,891 bytes +563‎ No edit summary

curprev 13:5513:55, 3 October 2021‎ Eves talk contribs‎ 9,328 bytes +1‎ →‎Atomic Layer Deposition

curprev 13:4813:48, 15 March 2017‎ Eves talk contribs‎ 861 bytes +861‎ Created page with "====Procces flow description==== All samples were prepared and characterized in a class 100 cleanroom. Si (100) wafers of 150 mm were used as a substrate. The main steps in t..."

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