Specific Process Knowledge/Lithography/EBeamLithography/JEOLRequest: Revision history

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8 September 2023

  • curprev 08:4808:48, 8 September 2023‎ Thope talk contribs‎ 557 bytes +557‎ Created page with "=Request for user exposure slot= As of October 1st 2023 all exposure slots on the JEOL 9500 system are managed and delegated by the Nanolab EBL staff. In order to get an exposure slot users must request a slot by submitting a request form AND prepared job files for the exposure. The request form can be found here. Please send the request to JEOL-request@nanolab.dtu.dk. ==Request form guide== =Request for exposure by Nanolab= At a later point in time we will open u..."
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