Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation: Revision history

17 April 2023

• curprev 15:5815:58, 17 April 2023‎ Thope talk contribs‎ 27,057 bytes +2,997‎ →‎Alignment exposure - direct exposure mode
• curprev 15:5215:52, 17 April 2023‎ Thope talk contribs‎ 24,060 bytes +569‎ →‎Global alignment exposure - direct exposure mode
• curprev 15:4815:48, 17 April 2023‎ Thope talk contribs‎ 23,491 bytes +32‎ →‎Alignment exposure - direct exposure mode
• curprev 15:3315:33, 17 April 2023‎ Thope talk contribs‎ 23,459 bytes 0‎ →‎First print / mask exposure mode
• curprev 15:3215:32, 17 April 2023‎ Thope talk contribs‎ 23,459 bytes −2‎ →‎Job Deck File
• curprev 15:3215:32, 17 April 2023‎ Thope talk contribs‎ 23,461 bytes +22‎ →‎Alignment exposure
• curprev 15:3115:31, 17 April 2023‎ Thope talk contribs‎ 23,439 bytes +60‎ No edit summary

16 April 2023

• curprev 16:3116:31, 16 April 2023‎ Thope talk contribs‎ 23,379 bytes +78‎ →‎JDF common block
• curprev 16:2516:25, 16 April 2023‎ Thope talk contribs‎ 23,301 bytes −124‎ →‎JDF common block
• curprev 16:2416:24, 16 April 2023‎ Thope talk contribs‎ 23,425 bytes +11‎ →‎JDF common block
• curprev 16:2416:24, 16 April 2023‎ Thope talk contribs‎ 23,414 bytes +253‎ →‎JDF common block
• curprev 16:1816:18, 16 April 2023‎ Thope talk contribs‎ 23,161 bytes +16‎ →‎Job Deck File
• curprev 16:1616:16, 16 April 2023‎ Thope talk contribs‎ 23,145 bytes 0‎ →‎Schedule File
• curprev 14:4714:47, 16 April 2023‎ Thope talk contribs‎ 23,145 bytes +325‎ →‎Schedule File
• curprev 14:3314:33, 16 April 2023‎ Thope talk contribs‎ 22,820 bytes 0‎ →‎SDF header section
• curprev 08:5208:52, 16 April 2023‎ Thope talk contribs‎ 22,820 bytes +118‎ →‎SDF sequence section
• curprev 08:4608:46, 16 April 2023‎ Thope talk contribs‎ 22,702 bytes +27‎ →‎Job Deck File
• curprev 08:4308:43, 16 April 2023‎ Thope talk contribs‎ 22,675 bytes −2‎ →‎Beam pitch, beam current and exposure dose relationship
• curprev 08:4208:42, 16 April 2023‎ Thope talk contribs‎ 22,677 bytes −17‎ →‎Job Deck File – no alignment
• curprev 08:4108:41, 16 April 2023‎ Thope talk contribs‎ 22,694 bytes −38‎ No edit summary
• curprev 08:3908:39, 16 April 2023‎ Thope talk contribs‎ 22,732 bytes +24‎ No edit summary

13 March 2023

• curprev 10:4910:49, 13 March 2023‎ Thope talk contribs‎ 22,708 bytes 0‎ →‎JDF header block
• curprev 10:4910:49, 13 March 2023‎ Thope talk contribs‎ 22,708 bytes −94‎ →‎JDF header block
• curprev 10:4810:48, 13 March 2023‎ Thope talk contribs‎ 22,802 bytes +297‎ →‎Job Deck File – no alignment
• curprev 10:2710:27, 13 March 2023‎ Thope talk contribs‎ 22,505 bytes +468‎ →‎SDF footer section
• curprev 10:2210:22, 13 March 2023‎ Thope talk contribs‎ 22,037 bytes 0‎ →‎SDF footer section
• curprev 09:0309:03, 13 March 2023‎ Thope talk contribs‎ 22,037 bytes +40‎ →‎Schedule File - no alignment

11 March 2023

• curprev 15:0515:05, 11 March 2023‎ Thope talk contribs‎ 21,997 bytes +7‎ →‎Beam pitch, beam current and exposure dose relationship
• curprev 15:0415:04, 11 March 2023‎ Thope talk contribs‎ 21,990 bytes +484‎ →‎Beam pitch, beam current and exposure dose relationship
• curprev 15:0015:00, 11 March 2023‎ Thope talk contribs‎ 21,506 bytes +12‎ →‎Beam pitch, beam current and exposure dose relationship
• curprev 14:5914:59, 11 March 2023‎ Thope talk contribs‎ 21,494 bytes +773‎ →‎Beam pitch, beam current and exposure dose relationship
• curprev 14:3814:38, 11 March 2023‎ Thope talk contribs‎ 20,721 bytes +23‎ →‎Beam pitch and dose relationship
• curprev 14:3014:30, 11 March 2023‎ Thope talk contribs‎ 20,698 bytes +3‎ →‎Beam pitch and dose relationship
• curprev 14:2814:28, 11 March 2023‎ Thope talk contribs‎ 20,695 bytes +33‎ →‎Beam pitch and dose relationship
• curprev 13:4413:44, 11 March 2023‎ Thope talk contribs‎ 20,662 bytes +413‎ →‎Beam pitch and dose relationship
• curprev 13:4113:41, 11 March 2023‎ Thope talk contribs‎ 20,249 bytes +120‎ →‎Beam pitch and dose relationship
• curprev 10:3910:39, 11 March 2023‎ Thope talk contribs‎ 20,129 bytes +1,148‎ →‎Beam pitch and dose relationship
• curprev 09:5909:59, 11 March 2023‎ Thope talk contribs‎ 18,981 bytes −1‎ →‎Beam pitch and dose relationship
• curprev 09:5909:59, 11 March 2023‎ Thope talk contribs‎ 18,982 bytes +438‎ No edit summary

10 March 2023

• curprev 22:5522:55, 10 March 2023‎ Thope talk contribs‎ 18,544 bytes +18,516‎ No edit summary

23 February 2023

• curprev 11:3311:33, 23 February 2023‎ Thope talk contribs‎ 28 bytes −1‎ →‎JEOL 9500 Job Preparation =
• curprev 11:3211:32, 23 February 2023‎ Thope talk contribs‎ 29 bytes +29‎ Created page with "=JEOL 9500 Job Preparation =="