Specific Process Knowledge/Lithography/EBeamLithography: Revision history

5 September 2022

• curprev 12:1412:14, 5 September 2022‎ Thope talk contribs‎ 22,025 bytes −319‎ →‎E-beam resists
• curprev 12:1212:12, 5 September 2022‎ Thope talk contribs‎ 22,344 bytes −2,496‎ →‎E-beam resists
• curprev 12:1012:10, 5 September 2022‎ Thope talk contribs‎ 24,840 bytes +2,409‎ →‎E-beam resists
• curprev 11:4411:44, 5 September 2022‎ Thope talk contribs‎ 22,431 bytes +239‎ →‎Introduction to E-beam lithography at DTU Nanolab
• curprev 11:4011:40, 5 September 2022‎ Thope talk contribs‎ 22,192 bytes +1‎ →‎Introduction to E-beam lithography at DTU Nanolab
• curprev 10:4710:47, 5 September 2022‎ Thope talk contribs‎ 22,191 bytes +3‎ →‎Introduction to E-beam lithography at DTU Nanolab
• curprev 10:4710:47, 5 September 2022‎ Thope talk contribs‎ 22,188 bytes +1,519‎ →‎Comparison of the e-beam writers at DTU Nanolab

1 July 2022

• curprev 12:5512:55, 1 July 2022‎ Thope talk contribs‎ 20,669 bytes −6‎ →‎Comparison of the e-beam writers at DTU Nanolab
• curprev 07:5807:58, 1 July 2022‎ Thope talk contribs‎ 20,675 bytes −11‎ →‎Comparison of the e-beam writers at DTU Nanolab
• curprev 07:5707:57, 1 July 2022‎ Thope talk contribs‎ 20,686 bytes +2‎ →‎Comparison of the e-beam writers at DTU Nanolab
• curprev 07:5707:57, 1 July 2022‎ Thope talk contribs‎ 20,684 bytes −5‎ →‎Comparison of the e-beam writers at DTU Nanolab
• curprev 07:5607:56, 1 July 2022‎ Thope talk contribs‎ 20,689 bytes −3‎ →‎Comparison of the e-beam writers at DTU Nanolab
• curprev 07:5607:56, 1 July 2022‎ Thope talk contribs‎ 20,692 bytes 0‎ →‎Comparison of the e-beam writers at DTU Nanolab
• curprev 07:5307:53, 1 July 2022‎ Thope talk contribs‎ 20,692 bytes +3‎ →‎Comparison of the e-beam writers at DTU Nanolab
• curprev 07:5207:52, 1 July 2022‎ Thope talk contribs‎ 20,689 bytes 0‎ →‎Comparison of the e-beam writers at DTU Nanolab
• curprev 07:5207:52, 1 July 2022‎ Thope talk contribs‎ 20,689 bytes −194‎ →‎E-beam resists
• curprev 07:5107:51, 1 July 2022‎ Thope talk contribs‎ 20,883 bytes −19‎ →‎Comparison of the e-beam writers at DTU Nanolab
• curprev 07:5007:50, 1 July 2022‎ Thope talk contribs‎ 20,902 bytes −333‎ →‎Comparison of the e-beam writers at DTU Nanolab
• curprev 07:4807:48, 1 July 2022‎ Thope talk contribs‎ 21,235 bytes −1‎ →‎Performance of the e-beam writers at DTU Nanolab
• curprev 07:4707:47, 1 July 2022‎ Thope talk contribs‎ 21,236 bytes −91‎ →‎Performance of the e-beam writers at DTU Nanolab

24 February 2022

• curprev 20:5920:59, 24 February 2022‎ Thope talk contribs‎ 21,327 bytes +51‎ →‎E-beam resists and Process flow
• curprev 08:3008:30, 24 February 2022‎ Thope talk contribs‎ 21,276 bytes +266‎ No edit summary

22 December 2020

• curprev 09:2609:26, 22 December 2020‎ Taran talk contribs‎ 21,010 bytes +82‎ No edit summary

16 June 2020

• curprev 15:3115:31, 16 June 2020‎ Lgpe talk contribs‎ 20,928 bytes +17‎ →‎Performance of the e-beam writers at DTU Nanolab

26 March 2020

• curprev 10:4610:46, 26 March 2020‎ Taran talk contribs‎ 20,911 bytes −8‎ →‎E-beam resists
• curprev 10:4210:42, 26 March 2020‎ Taran talk contribs‎ 20,919 bytes −4‎ →‎Development
• curprev 10:3810:38, 26 March 2020‎ Taran talk contribs‎ 20,923 bytes +3‎ →‎Cold development

13 March 2020

• curprev 16:5416:54, 13 March 2020‎ Thope talk contribs‎ 20,920 bytes +412‎ No edit summary

24 February 2020

• curprev 14:1414:14, 24 February 2020‎ Lgpe talk contribs‎ 20,508 bytes 0‎ →‎E-beam resists in the cleanroom

26 November 2019

• curprev 09:5609:56, 26 November 2019‎ Taran talk contribs‎ 20,508 bytes 0‎ →‎E-beam resists in the cleanroom

25 November 2019

• curprev 19:0719:07, 25 November 2019‎ Jmli talk contribs‎ 20,508 bytes 0‎ →‎Aluminum coating
• curprev 19:0619:06, 25 November 2019‎ Jmli talk contribs‎ 20,508 bytes 0‎ →‎Trilayer resist stack
• curprev 19:0219:02, 25 November 2019‎ Jmli talk contribs‎ 20,508 bytes −1‎ →‎E-beam resists and Process flow
• curprev 19:0019:00, 25 November 2019‎ Jmli talk contribs‎ 20,509 bytes 0‎ →‎Performance of the e-beam writers at DTU Nanolab
• curprev 17:5417:54, 25 November 2019‎ Jmli talk contribs‎ 20,509 bytes −4‎ No edit summary

18 May 2018

• curprev 12:2312:23, 18 May 2018‎ Lgpe talk contribs‎ 20,513 bytes +77‎ →‎Development
• curprev 09:2909:29, 18 May 2018‎ Lgpe talk contribs‎ 20,436 bytes +1,452‎ →‎Development
• curprev 09:2809:28, 18 May 2018‎ Lgpe talk contribs‎ m 18,984 bytes +4‎ →‎Development
• curprev 09:2509:25, 18 May 2018‎ Lgpe talk contribs‎ 18,980 bytes +654‎ →‎Development
• curprev 09:1709:17, 18 May 2018‎ Lgpe talk contribs‎ 18,326 bytes +537‎ No edit summary
• curprev 08:5108:51, 18 May 2018‎ Lgpe talk contribs‎ m 17,789 bytes +174‎ No edit summary

15 May 2018

• curprev 09:4709:47, 15 May 2018‎ Lgpe talk contribs‎ m 17,615 bytes 0‎ →‎Performance of the e-beam writers at DTU Danchip
• curprev 09:4609:46, 15 May 2018‎ Lgpe talk contribs‎ m 17,615 bytes +13‎ →‎Performance of the e-beam writers at DTU Danchip

19 February 2018

• curprev 15:3815:38, 19 February 2018‎ Lgpe talk contribs‎ 17,602 bytes −21‎ →‎E-beam resists
• curprev 15:3815:38, 19 February 2018‎ Lgpe talk contribs‎ 17,623 bytes +21‎ →‎E-beam resists
• curprev 15:3715:37, 19 February 2018‎ Lgpe talk contribs‎ 17,602 bytes −21‎ →‎E-beam resists
• curprev 15:3615:36, 19 February 2018‎ Lgpe talk contribs‎ 17,623 bytes −2‎ →‎E-beam resists
• curprev 15:3615:36, 19 February 2018‎ Lgpe talk contribs‎ 17,625 bytes +23‎ →‎E-beam resists
• curprev 15:3615:36, 19 February 2018‎ Lgpe talk contribs‎ 17,602 bytes −30‎ →‎E-beam resists
• curprev 15:3515:35, 19 February 2018‎ Lgpe talk contribs‎ 17,632 bytes +154‎ →‎E-beam resists