Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/SiO2 Etch/SiO2 etch with resist mask: Revision history

28 April 2021

• curprev 12:3312:33, 28 April 2021‎ Bghe talk contribs‎ 26,500 bytes −2‎ →‎Aspect ratio dependent etch rate
• curprev 12:3212:32, 28 April 2021‎ Bghe talk contribs‎ 26,502 bytes +12‎ →‎Explanation of the responses that are included in the models
• curprev 12:3212:32, 28 April 2021‎ Bghe talk contribs‎ 26,490 bytes −2‎ →‎Change of critical dimensions (CD change)
• curprev 12:3112:31, 28 April 2021‎ Bghe talk contribs‎ 26,492 bytes −2‎ →‎Etch profile angle in 1:1 aspect ratio etching
• curprev 12:3112:31, 28 April 2021‎ Bghe talk contribs‎ 26,494 bytes −2‎ →‎Etch profile angle in low aspect ratio etching
• curprev 10:5810:58, 28 April 2021‎ Bghe talk contribs‎ 26,496 bytes +2‎ →‎Etch rate selectivity to the resist
• curprev 10:5810:58, 28 April 2021‎ Bghe talk contribs‎ 26,494 bytes 0‎ →‎Etch rate in low aspect ratio areas
• curprev 10:5710:57, 28 April 2021‎ Bghe talk contribs‎ 26,494 bytes +69‎ →‎Etch rate in low aspect ratio areas
• curprev 10:5610:56, 28 April 2021‎ Bghe talk contribs‎ 26,425 bytes −1,272‎ →‎Aspect ratio dependent etch rate
• curprev 10:5510:55, 28 April 2021‎ Bghe talk contribs‎ 27,697 bytes −1,269‎ →‎Change of critical dimensions (CD change)
• curprev 10:5410:54, 28 April 2021‎ Bghe talk contribs‎ 28,966 bytes −1,302‎ →‎Etch profile angle in 1:1 aspect ratio etching
• curprev 10:5310:53, 28 April 2021‎ Bghe talk contribs‎ 30,268 bytes −1,320‎ →‎Etch profile angle in low aspect ratio etching
• curprev 10:5210:52, 28 April 2021‎ Bghe talk contribs‎ 31,588 bytes −1,191‎ →‎Etch rate selectivity to the resist

27 April 2021

• curprev 16:3316:33, 27 April 2021‎ Bghe talk contribs‎ 32,779 bytes −839‎ →‎Design of experiment "DOE03" - with DUV resist pattern
• curprev 15:4315:43, 27 April 2021‎ Bghe talk contribs‎ 33,618 bytes +20‎ →‎Second run of DOE03 - with pattern
• curprev 15:4215:42, 27 April 2021‎ Bghe talk contribs‎ 33,598 bytes +111‎ No edit summary
• curprev 15:4215:42, 27 April 2021‎ Bghe talk contribs‎ 33,487 bytes −1‎ No edit summary
• curprev 15:4115:41, 27 April 2021‎ Bghe talk contribs‎ 33,488 bytes +1‎ No edit summary
• curprev 15:4115:41, 27 April 2021‎ Bghe talk contribs‎ 33,487 bytes +255‎ No edit summary

• curprev 15:4015:40, 27 April 2021‎ Bghe talk contribs‎ 33,232 bytes +33,232‎ Created page with "==Second run of DOE03 - with pattern== The design factors were: *Coil power: 2500-4000 W *Platen power: 200-300 W *Total flow: 100-500 sccm *He/C4F8 ratio: 5-30 *C4H8/H2 ratio..."