Specific Process Knowledge/Characterization/Profiler: Revision history

12 June 2020

• curprev 07:5607:56, 12 June 2020‎ Bghe talk contribs‎ 19,653 bytes +9‎ →‎Optical Profiler (Sensofar)
• curprev 07:5507:55, 12 June 2020‎ Bghe talk contribs‎ 19,644 bytes +142‎ →‎Optical Profiler (Sensofar)

8 June 2020

• curprev 11:1711:17, 8 June 2020‎ Reet talk contribs‎ 19,502 bytes +4‎ →‎Dektak 8 stylus profiler: edited height measurement section
• curprev 11:1311:13, 8 June 2020‎ Reet talk contribs‎ 19,498 bytes +275‎ →‎Equipment performance and process related parameters Dektak 8 stylus profiler: added height meas uncertainty values
• curprev 11:0011:00, 8 June 2020‎ Reet talk contribs‎ m 19,223 bytes +168‎ →‎Height accuracy: edit
• curprev 10:5810:58, 8 June 2020‎ Reet talk contribs‎ m 19,055 bytes +39‎ →‎Equipment performance and process related parameters Dektak XTA: small update
• curprev 10:4010:40, 8 June 2020‎ Reet talk contribs‎ 19,016 bytes +1,635‎ →‎Equipment performance and process related parameters Dektak XTA: New section on height accuracy
• curprev 09:3509:35, 8 June 2020‎ Reet talk contribs‎ 17,381 bytes −992‎ →‎Quality control of measurement accuracy: removed qc table
• curprev 09:3409:34, 8 June 2020‎ Reet talk contribs‎ 18,373 bytes −1,005‎ →‎Quality control of measurement accuracy: removed qc table

3 June 2020

• curprev 12:2012:20, 3 June 2020‎ Reet talk contribs‎ 19,378 bytes +197‎ →‎Quality control of measurement accuracy: edited info on calibration
• curprev 12:1912:19, 3 June 2020‎ Reet talk contribs‎ 19,181 bytes +171‎ →‎Quality control of measurement accuracy: edited info on calibration
• curprev 12:1312:13, 3 June 2020‎ Reet talk contribs‎ m 19,010 bytes +116‎ →‎Quality control of measurement accuracy: confidence interval added for step height
• curprev 12:1212:12, 3 June 2020‎ Reet talk contribs‎ m 18,894 bytes +116‎ →‎Quality control of measurement accuracy: added info on confidence interval

19 May 2020

• curprev 10:2110:21, 19 May 2020‎ Reet talk contribs‎ m 18,778 bytes −1‎ →‎Quality control of measurement accuracy
• curprev 10:2110:21, 19 May 2020‎ Reet talk contribs‎ 18,779 bytes +928‎ →‎Dektak 8 stylus profiler: added QC section
• curprev 10:1010:10, 19 May 2020‎ Reet talk contribs‎ 17,851 bytes +2‎ →‎Quality control of measurement accuracy
• curprev 10:0910:09, 19 May 2020‎ Reet talk contribs‎ 17,849 bytes +929‎ →‎Equipment performance and process related parameters Dektak XTA

14 May 2020

• curprev 10:3310:33, 14 May 2020‎ Bghe talk contribs‎ 16,920 bytes +12‎ →‎Process Information
• curprev 10:3110:31, 14 May 2020‎ Bghe talk contribs‎ 16,908 bytes +2‎ →‎Process Information
• curprev 10:3010:30, 14 May 2020‎ Bghe talk contribs‎ 16,906 bytes +131‎ →‎Process Information

20 April 2020

• curprev 08:0508:05, 20 April 2020‎ Taran talk contribs‎ 16,775 bytes +2‎ →‎Optical Profiler (Filmetrics)

15 April 2020

• curprev 20:3420:34, 15 April 2020‎ Reet talk contribs‎ m 16,773 bytes +71‎ →‎Overview of the Nanolab profilers: corrected link
• curprev 16:3816:38, 15 April 2020‎ Reet talk contribs‎ m 16,702 bytes +105‎ small information additions
• curprev 16:3516:35, 15 April 2020‎ Reet talk contribs‎ 16,597 bytes −190‎ Moved section with link to comparison table to the top
• curprev 10:5110:51, 15 April 2020‎ Reet talk contribs‎ m 16,787 bytes +1‎ →‎Stylus Profiler: Dektak150: spelling mistake

21 February 2020

• curprev 10:3410:34, 21 February 2020‎ Bghe talk contribs‎ 16,786 bytes −47‎ →‎Optical Profiler (Filmetrics) 70px

28 January 2020

• curprev 16:2616:26, 28 January 2020‎ Bghe talk contribs‎ 16,833 bytes +2‎ →‎Optical Profiler (Filmetrics) 70px
• curprev 16:2616:26, 28 January 2020‎ Bghe talk contribs‎ 16,831 bytes +1‎ →‎Optical Profiler (Filmetrics) 70px
• curprev 16:2516:25, 28 January 2020‎ Bghe talk contribs‎ 16,830 bytes +29‎ →‎Optical Profiler (Filmetrics) 70px
• curprev 16:2116:21, 28 January 2020‎ Bghe talk contribs‎ 16,801 bytes −23‎ →‎Equipment performance and process related parameters
• curprev 16:1716:17, 28 January 2020‎ Bghe talk contribs‎ 16,824 bytes −221‎ →‎Equipment performance and process related parameters
• curprev 16:1516:15, 28 January 2020‎ Bghe talk contribs‎ 17,045 bytes −587‎ →‎Optical Profiler (Filmetrics) 70px
• curprev 16:0716:07, 28 January 2020‎ Bghe talk contribs‎ 17,632 bytes +48‎ →‎Optical Profiler (Filmetrics)
• curprev 16:0716:07, 28 January 2020‎ Bghe talk contribs‎ 17,584 bytes +3,422‎ →‎Optical Profiler (Sensofar)

13 January 2020

• curprev 13:5413:54, 13 January 2020‎ Kabi talk contribs‎ 14,162 bytes +3‎ →‎Stylus Profiler: Dektak150
• curprev 13:5413:54, 13 January 2020‎ Kabi talk contribs‎ 14,159 bytes +2‎ →‎Stylus Profiler: Dektak150
• curprev 13:5313:53, 13 January 2020‎ Kabi talk contribs‎ 14,157 bytes 0‎ →‎Stylus Profiler: Dektak150
• curprev 13:0213:02, 13 January 2020‎ Kabi talk contribs‎ 14,157 bytes −3‎ No edit summary
• curprev 12:5512:55, 13 January 2020‎ Kabi talk contribs‎ 14,160 bytes +1‎ No edit summary
• curprev 12:2012:20, 13 January 2020‎ Kabi talk contribs‎ 14,159 bytes −1‎ No edit summary
• curprev 12:1812:18, 13 January 2020‎ Kabi talk contribs‎ 14,160 bytes +1‎ No edit summary
• curprev 12:1612:16, 13 January 2020‎ Kabi talk contribs‎ 14,159 bytes +1‎ No edit summary
• curprev 12:1312:13, 13 January 2020‎ Kabi talk contribs‎ 14,158 bytes +2,314‎ No edit summary

23 August 2019

• curprev 13:1413:14, 23 August 2019‎ Pevo talk contribs‎ 11,844 bytes +1‎ →‎Dektak 3ST
• curprev 13:1413:14, 23 August 2019‎ Pevo talk contribs‎ 11,843 bytes 0‎ →‎Dektak 3ST

1 May 2019

• curprev 14:1714:17, 1 May 2019‎ Paphol talk contribs‎ 11,843 bytes −151‎ →‎Dektak III-V Profiler

26 June 2017

• curprev 12:1912:19, 26 June 2017‎ Pevo talk contribs‎ 11,994 bytes +8‎ →‎Dektak 8 stylus profiler
• curprev 12:1812:18, 26 June 2017‎ Pevo talk contribs‎ 11,986 bytes +90‎ →‎Dektak 8 stylus profiler
• curprev 12:1712:17, 26 June 2017‎ Pevo talk contribs‎ 11,896 bytes +90‎ →‎Dektak XTA stylus profiler
• curprev 12:1612:16, 26 June 2017‎ Pevo talk contribs‎ 11,806 bytes +9‎ →‎Dektak 8 stylus profiler