Specific Process Knowledge/Thin film deposition/Lesker: Revision history

23 August 2016

• curprev 10:4710:47, 23 August 2016‎ Paphol talk contribs‎ 19,119 bytes +291‎ →‎List of available targets for the Sputter-System(Lesker) (03 June 2013)
• curprev 10:4010:40, 23 August 2016‎ Paphol talk contribs‎ 18,828 bytes +379‎ →‎List of available targets for the Sputter-System(Lesker) (03 June 2013)

15 August 2016

• curprev 13:4213:42, 15 August 2016‎ Mdyma talk contribs‎ 18,449 bytes +155‎ →‎List of available targets for the Sputter-System(Lesker) (03 June 2013)

4 December 2015

• curprev 11:5911:59, 4 December 2015‎ Jehan talk contribs‎ 18,294 bytes +48‎ →‎List of available targets for the Sputter-System(Lesker) (03 June 2013)

18 November 2015

• curprev 14:1014:10, 18 November 2015‎ Jehan talk contribs‎ 18,246 bytes +136‎ →‎Thickness uniformity

3 November 2015

• curprev 14:4814:48, 3 November 2015‎ Jehan talk contribs‎ 18,110 bytes +116‎ →‎Thickness uniformity
• curprev 14:4514:45, 3 November 2015‎ Jehan talk contribs‎ 17,994 bytes +60‎ →‎Thickness uniformity
• curprev 13:3713:37, 3 November 2015‎ Jehan talk contribs‎ 17,934 bytes +66‎ →‎Thickness uniformity
• curprev 13:3113:31, 3 November 2015‎ Jehan talk contribs‎ 17,868 bytes −112‎ →‎Thickness uniformity
• curprev 13:3013:30, 3 November 2015‎ Jehan talk contribs‎ 17,980 bytes +991‎ →‎Thickness uniformity
• curprev 13:2313:23, 3 November 2015‎ Jehan talk contribs‎ 16,989 bytes +264‎ →‎Sputter rate

1 October 2015

• curprev 17:4317:43, 1 October 2015‎ Jehan talk contribs‎ 16,725 bytes +37‎ →‎Overview of the performance of Sputter-System(Lesker) and some process related parameters
• curprev 17:4117:41, 1 October 2015‎ Jehan talk contribs‎ 16,688 bytes +51‎ →‎Overview of the performance of Sputter-System(Lesker) and some process related parameters
• curprev 17:4017:40, 1 October 2015‎ Jehan talk contribs‎ 16,637 bytes +51‎ →‎Overview of the performance of Sputter-System(Lesker) and some process related parameters

26 May 2015

• curprev 09:2109:21, 26 May 2015‎ Jehan talk contribs‎ 16,586 bytes +49‎ →‎LESKER Sputter Tool

25 August 2014

• curprev 15:1615:16, 25 August 2014‎ Bghe talk contribs‎ 16,537 bytes +10‎ No edit summary
• curprev 14:2214:22, 25 August 2014‎ Bghe talk contribs‎ 16,527 bytes +52‎ No edit summary
• curprev 14:0114:01, 25 August 2014‎ Bghe talk contribs‎ 16,475 bytes −16‎ No edit summary
• curprev 14:0114:01, 25 August 2014‎ Bghe talk contribs‎ 16,491 bytes +76‎ No edit summary

27 June 2014

• curprev 08:5308:53, 27 June 2014‎ Jehan talk contribs‎ m 16,415 bytes +1‎ →‎LESKER Sputter Tool
• curprev 08:5308:53, 27 June 2014‎ Jehan talk contribs‎ m 16,414 bytes +37‎ →‎LESKER Sputter Tool

25 June 2014

• curprev 16:5616:56, 25 June 2014‎ Jehan talk contribs‎ 16,377 bytes +3‎ →‎Relative Sputter rates
• curprev 16:5416:54, 25 June 2014‎ Jehan talk contribs‎ 16,374 bytes +806‎ →‎Relative Sputter rates
• curprev 16:5316:53, 25 June 2014‎ Jehan talk contribs‎ m 15,568 bytes +31‎ →‎Sputter rate
• curprev 16:5116:51, 25 June 2014‎ Jehan talk contribs‎ m 15,537 bytes +6‎ →‎Sputtering rates
• curprev 16:5116:51, 25 June 2014‎ Jehan talk contribs‎ m 15,531 bytes +23‎ →‎Sputter rate
• curprev 16:5016:50, 25 June 2014‎ Jehan talk contribs‎ m 15,508 bytes +11‎ →‎rates
• curprev 16:4916:49, 25 June 2014‎ Jehan talk contribs‎ 15,497 bytes +749‎ →‎rates
• curprev 16:4116:41, 25 June 2014‎ Jehan talk contribs‎ m 14,748 bytes +5‎ →‎rates
• curprev 16:4016:40, 25 June 2014‎ Jehan talk contribs‎ 14,743 bytes +1,034‎ →‎List of available targets for the Sputter-System(Lesker) (03 June 2013)
• curprev 16:3016:30, 25 June 2014‎ Jehan talk contribs‎ 13,709 bytes +657‎ →‎Sputter rate
• curprev 16:1616:16, 25 June 2014‎ Jehan talk contribs‎ 13,052 bytes +21‎ →‎Materials for sputtering

11 March 2014

• curprev 09:5809:58, 11 March 2014‎ Knil talk contribs‎ 13,031 bytes −10‎ →‎Overview of the performance of Sputter-System(Lesker) and some process related parameters

28 January 2014

• curprev 15:1715:17, 28 January 2014‎ Knil talk contribs‎ 13,041 bytes +343‎ →‎LESKER Sputter Tool

4 October 2013

• curprev 15:1815:18, 4 October 2013‎ Jehan talk contribs‎ m 12,698 bytes +226‎ No edit summary

3 June 2013

• curprev 12:4412:44, 3 June 2013‎ Jehan talk contribs‎ 12,472 bytes −2‎ No edit summary
• curprev 12:4312:43, 3 June 2013‎ Jehan talk contribs‎ 12,474 bytes +78‎ No edit summary
• curprev 12:3512:35, 3 June 2013‎ Jehan talk contribs‎ 12,396 bytes +18‎ No edit summary
• curprev 12:3412:34, 3 June 2013‎ Jehan talk contribs‎ 12,378 bytes +1,684‎ No edit summary

28 August 2012

• curprev 17:5917:59, 28 August 2012‎ Jehan talk contribs‎ 10,694 bytes +34‎ No edit summary

28 October 2010

• curprev 12:4012:40, 28 October 2010‎ Tg talk contribs‎ 10,660 bytes +2,725‎ No edit summary

9 November 2009

• curprev 15:3015:30, 9 November 2009‎ BGE talk contribs‎ 7,935 bytes +46‎ →‎Oxide insulation analysis
• curprev 15:2915:29, 9 November 2009‎ BGE talk contribs‎ 7,889 bytes +1‎ →‎Oxide insulation analysis
• curprev 15:2815:28, 9 November 2009‎ BGE talk contribs‎ 7,888 bytes −3‎ →‎Oxide insulation analysis
• curprev 15:2815:28, 9 November 2009‎ BGE talk contribs‎ 7,891 bytes +43‎ No edit summary
• curprev 15:2815:28, 9 November 2009‎ BGE talk contribs‎ 7,848 bytes +464‎ →‎Oxide insulation analysis
• curprev 15:2315:23, 9 November 2009‎ BGE talk contribs‎ 7,384 bytes +55‎ →‎Oxide insulation analysis
• curprev 15:1815:18, 9 November 2009‎ BGE talk contribs‎ 7,329 bytes +20‎ No edit summary
• curprev 15:1715:17, 9 November 2009‎ BGE talk contribs‎ 7,309 bytes +5‎ →‎Surface roughness optimization

• curprev 15:1615:16, 9 November 2009‎ BGE talk contribs‎ 7,304 bytes −4‎ →‎Surface roughness optimization