Specific Process Knowledge/Lithography/EBeamLithography/JBX9500Manual: Revision history

13 July 2016

• curprev 10:5010:50, 13 July 2016‎ Tigre talk contribs‎ 59,288 bytes −27‎ →‎Calibration of condition file
• curprev 10:5010:50, 13 July 2016‎ Tigre talk contribs‎ 59,315 bytes +23‎ →‎Transfer of cassettes between autoloader and e-beam writer
• curprev 10:4910:49, 13 July 2016‎ Tigre talk contribs‎ 59,292 bytes 0‎ →‎Open EBX Menu (if not already open)
• curprev 10:4910:49, 13 July 2016‎ Tigre talk contribs‎ 59,292 bytes −27‎ →‎Open EBX Menu (if not already open)
• curprev 10:4910:49, 13 July 2016‎ Tigre talk contribs‎ 59,319 bytes +27‎ →‎Open EBX Menu (if not already open)
• curprev 10:3910:39, 13 July 2016‎ Tigre talk contribs‎ 59,292 bytes +45‎ →‎Open EBX Menu (if not already open)
• curprev 10:3910:39, 13 July 2016‎ Tigre talk contribs‎ 59,247 bytes −26‎ →‎Transfer of cassettes between autoloader and e-beam writer
• curprev 10:3810:38, 13 July 2016‎ Tigre talk contribs‎ 59,273 bytes +5‎ →‎Open EBX Menu (if not already open)
• curprev 10:3810:38, 13 July 2016‎ Tigre talk contribs‎ 59,268 bytes +149‎ →‎Transfer of cassettes between autoloader and e-beam writer
• curprev 10:3510:35, 13 July 2016‎ Tigre talk contribs‎ 59,119 bytes +18‎ →‎Load and unload of cassettes into/from autoloader
• curprev 10:3510:35, 13 July 2016‎ Tigre talk contribs‎ 59,101 bytes 0‎ →‎Optical pre-alignment of wafers
• curprev 10:3410:34, 13 July 2016‎ Tigre talk contribs‎ 59,101 bytes +18‎ →‎Optical pre-alignment of wafers
• curprev 10:2910:29, 13 July 2016‎ Tigre talk contribs‎ 59,083 bytes +4‎ →‎Techical Specification
• curprev 10:2810:28, 13 July 2016‎ Tigre talk contribs‎ 59,079 bytes −5‎ →‎Original JEOL Manual
• curprev 10:2810:28, 13 July 2016‎ Tigre talk contribs‎ 59,084 bytes +10‎ →‎Authorization
• curprev 10:2810:28, 13 July 2016‎ Tigre talk contribs‎ 59,074 bytes +6‎ →‎Authorization
• curprev 10:2810:28, 13 July 2016‎ Tigre talk contribs‎ 59,068 bytes +16‎ →‎Original JEOL Manual
• curprev 10:2810:28, 13 July 2016‎ Tigre talk contribs‎ 59,052 bytes −5‎ →‎Authorization
• curprev 10:2710:27, 13 July 2016‎ Tigre talk contribs‎ 59,057 bytes −25‎ →‎Original JEOL Manual
• curprev 10:2610:26, 13 July 2016‎ Tigre talk contribs‎ 59,082 bytes −219‎ →‎Manuals
• curprev 10:2610:26, 13 July 2016‎ Tigre talk contribs‎ 59,301 bytes +124‎ →‎Purpose, location and technical specifications

1 June 2016

• curprev 14:1914:19, 1 June 2016‎ Tigre talk contribs‎ 59,177 bytes +1‎ →‎HEIMAP
• curprev 14:1814:18, 1 June 2016‎ Tigre talk contribs‎ 59,176 bytes +1‎ →‎HEIMAP
• curprev 14:1814:18, 1 June 2016‎ Tigre talk contribs‎ 59,175 bytes +497‎ →‎HEIMAP

20 January 2016

• curprev 13:2213:22, 20 January 2016‎ Tigre talk contribs‎ 58,678 bytes −1‎ →‎Design of global marks and chip marks
• curprev 13:2113:21, 20 January 2016‎ Tigre talk contribs‎ 58,679 bytes +3‎ →‎Design of global marks and chip marks
• curprev 13:2013:20, 20 January 2016‎ Tigre talk contribs‎ 58,676 bytes +59‎ →‎Design of global marks and chip marks

8 January 2016

• curprev 11:2911:29, 8 January 2016‎ Tigre talk contribs‎ 58,617 bytes −20‎ →‎Table of subprograms to execute during calibration

27 October 2015

• curprev 14:2614:26, 27 October 2015‎ Tigre talk contribs‎ 58,637 bytes −8‎ →‎Alignment of exposure to existing pattern on wafer
• curprev 14:2614:26, 27 October 2015‎ Tigre talk contribs‎ 58,645 bytes +1‎ →‎Alignment of exposure to existing pattern on wafer
• curprev 14:2514:25, 27 October 2015‎ Tigre talk contribs‎ 58,644 bytes −89‎ →‎Alignment of exposure to existing pattern on wafer
• curprev 14:2114:21, 27 October 2015‎ Tigre talk contribs‎ 58,733 bytes +35‎ →‎Alignment of exposure to existing pattern on wafer
• curprev 14:1714:17, 27 October 2015‎ Tigre talk contribs‎ 58,698 bytes +2,796‎ →‎Alignment of wafers or chips

18 September 2015

• curprev 13:1413:14, 18 September 2015‎ Tigre talk contribs‎ 55,902 bytes +172‎ →‎Execute DRIFT

28 August 2015

• curprev 13:1113:11, 28 August 2015‎ Tigre talk contribs‎ 55,730 bytes −1‎ No edit summary
• curprev 13:1013:10, 28 August 2015‎ Tigre talk contribs‎ 55,731 bytes +202‎ No edit summary

26 August 2015

• curprev 20:4520:45, 26 August 2015‎ Tigre talk contribs‎ 55,529 bytes −7,850‎ →‎SETWFR
• curprev 20:4320:43, 26 August 2015‎ Tigre talk contribs‎ 63,379 bytes +81‎ →‎Calibration of condition file
• curprev 20:3820:38, 26 August 2015‎ Tigre talk contribs‎ 63,298 bytes +6,793‎ →‎SETWFR
• curprev 20:2820:28, 26 August 2015‎ Tigre talk contribs‎ 56,505 bytes −18‎ →‎Detailed descriptions of subprograms
• curprev 20:2720:27, 26 August 2015‎ Tigre talk contribs‎ 56,523 bytes +1‎ No edit summary
• curprev 09:3909:39, 26 August 2015‎ Tigre talk contribs‎ 56,522 bytes +38‎ →‎SETWFR
• curprev 09:3809:38, 26 August 2015‎ Tigre talk contribs‎ 56,484 bytes 0‎ →‎SETWFR
• curprev 09:3709:37, 26 August 2015‎ Tigre talk contribs‎ 56,484 bytes +2‎ →‎HEIMAP
• curprev 09:2909:29, 26 August 2015‎ Tigre talk contribs‎ 56,482 bytes +293‎ →‎SUBDEFBE
• curprev 09:2709:27, 26 August 2015‎ Tigre talk contribs‎ 56,189 bytes +406‎ →‎Calibration of condition file
• curprev 09:2509:25, 26 August 2015‎ Tigre talk contribs‎ 55,783 bytes +186‎ →‎Calibration of condition file
• curprev 09:2409:24, 26 August 2015‎ Tigre talk contribs‎ 55,597 bytes +81‎ →‎Calibration of condition file
• curprev 09:2309:23, 26 August 2015‎ Tigre talk contribs‎ 55,516 bytes +65‎ →‎PDEFBE
• curprev 09:2109:21, 26 August 2015‎ Tigre talk contribs‎ 55,451 bytes +328‎ →‎SFOCUS