Specific Process Knowledge/Lithography/EBeamLithography/JBX9500Manual: Revision history

26 August 2015

• curprev 09:1309:13, 26 August 2015‎ Tigre talk contribs‎ 55,123 bytes +41‎ →‎SFOCUS
• curprev 09:1209:12, 26 August 2015‎ Tigre talk contribs‎ 55,082 bytes +81‎ →‎Calibration of condition file

25 August 2015

• curprev 21:1321:13, 25 August 2015‎ Tigre talk contribs‎ 55,001 bytes +1,858‎ →‎Calibration of condition file
• curprev 20:5420:54, 25 August 2015‎ Tigre talk contribs‎ 53,143 bytes +1‎ →‎Calibration of condition file
• curprev 20:5320:53, 25 August 2015‎ Tigre talk contribs‎ 53,142 bytes 0‎ →‎Transfer of cassettes between autoloader and e-beam writer
• curprev 20:5320:53, 25 August 2015‎ Tigre talk contribs‎ 53,142 bytes +28‎ →‎Transfer of cassettes between autoloader and e-beam writer
• curprev 20:4720:47, 25 August 2015‎ Tigre talk contribs‎ 53,114 bytes +51‎ →‎Load and unload of cassettes into/from autoloader
• curprev 20:4520:45, 25 August 2015‎ Tigre talk contribs‎ 53,063 bytes −44‎ →‎Optical pre-alignment of wafers
• curprev 20:4120:41, 25 August 2015‎ Tigre talk contribs‎ 53,107 bytes +137‎ →‎Mounting of chips or wafers into cassette
• curprev 20:3720:37, 25 August 2015‎ Tigre talk contribs‎ 52,970 bytes −19‎ →‎Rough estimation of exposure time
• curprev 20:3420:34, 25 August 2015‎ Tigre talk contribs‎ 52,989 bytes −2‎ →‎Rough estimation of exposure time
• curprev 20:3320:33, 25 August 2015‎ Tigre talk contribs‎ 52,991 bytes +164‎ →‎Rough estimation of exposure time
• curprev 20:2920:29, 25 August 2015‎ Tigre talk contribs‎ 52,827 bytes +29‎ →‎Purpose, location and technical specifications
• curprev 20:2820:28, 25 August 2015‎ Tigre talk contribs‎ 52,798 bytes +18‎ No edit summary
• curprev 20:2420:24, 25 August 2015‎ Tigre talk contribs‎ 52,780 bytes −282‎ →‎Purpose, location and technical specifications
• curprev 08:5808:58, 25 August 2015‎ Tigre talk contribs‎ 53,062 bytes 0‎ →‎DRIFT
• curprev 08:5708:57, 25 August 2015‎ Tigre talk contribs‎ 53,062 bytes +57‎ →‎DRIFT

11 August 2015

• curprev 09:0509:05, 11 August 2015‎ Tigre talk contribs‎ 53,005 bytes 0‎ →‎Calibration of condition file
• curprev 08:3208:32, 11 August 2015‎ Tigre talk contribs‎ 53,005 bytes 0‎ →‎Calibration of condition file

10 August 2015

• curprev 20:3020:30, 10 August 2015‎ Tigre talk contribs‎ 53,005 bytes −229‎ →‎DISTMEM and DISTBE
• curprev 20:2820:28, 10 August 2015‎ Tigre talk contribs‎ 53,234 bytes +230‎ →‎Calibration of condition file
• curprev 20:1620:16, 10 August 2015‎ Tigre talk contribs‎ 53,004 bytes +594‎ →‎DISTMEM and DISTBE

6 August 2015

• curprev 09:3309:33, 6 August 2015‎ Tigre talk contribs‎ 52,410 bytes −33‎ →‎SETWFR
• curprev 09:3209:32, 6 August 2015‎ Tigre talk contribs‎ 52,443 bytes −144‎ →‎SETWFR
• curprev 09:3009:30, 6 August 2015‎ Tigre talk contribs‎ 52,587 bytes +123‎ →‎SETWFR
• curprev 09:2809:28, 6 August 2015‎ Tigre talk contribs‎ 52,464 bytes +1,591‎ →‎SETWFR
• curprev 09:0509:05, 6 August 2015‎ Tigre talk contribs‎ 50,873 bytes +6,278‎ →‎HEIMAP

2 July 2015

• curprev 11:1511:15, 2 July 2015‎ Tigre talk contribs‎ 44,595 bytes +134‎ →‎Alignment of wafers or chips
• curprev 11:1111:11, 2 July 2015‎ Tigre talk contribs‎ 44,461 bytes −10‎ →‎Mounting of chips or wafers into cassette
• curprev 11:1111:11, 2 July 2015‎ Tigre talk contribs‎ 44,471 bytes +48‎ →‎Mounting of chips or wafers into cassette
• curprev 11:1011:10, 2 July 2015‎ Tigre talk contribs‎ 44,423 bytes +34‎ →‎Mounting of chips or wafers into cassette
• curprev 11:0711:07, 2 July 2015‎ Tigre talk contribs‎ 44,389 bytes +27‎ →‎Mounting of chips or wafers into cassette
• curprev 07:5307:53, 2 July 2015‎ Tigre talk contribs‎ 44,362 bytes +27‎ →‎HEIMAP

29 June 2015

• curprev 20:2720:27, 29 June 2015‎ Tigre talk contribs‎ 44,335 bytes +3,554‎ No edit summary
• curprev 20:2320:23, 29 June 2015‎ Tigre talk contribs‎ 40,781 bytes +157‎ No edit summary
• curprev 20:2120:21, 29 June 2015‎ Tigre talk contribs‎ 40,624 bytes −137‎ →‎HEIMAP
• curprev 20:2020:20, 29 June 2015‎ Tigre talk contribs‎ 40,761 bytes +322‎ →‎HEIMAP
• curprev 20:1220:12, 29 June 2015‎ Tigre talk contribs‎ 40,439 bytes −1,051‎ →‎HEIMAP
• curprev 19:5719:57, 29 June 2015‎ Tigre talk contribs‎ 41,490 bytes +311‎ →‎HEIMAP
• curprev 14:3614:36, 29 June 2015‎ Tigre talk contribs‎ 41,179 bytes +1‎ →‎DRIFT
• curprev 14:3614:36, 29 June 2015‎ Tigre talk contribs‎ 41,178 bytes −9‎ →‎DRIFT
• curprev 14:3314:33, 29 June 2015‎ Tigre talk contribs‎ 41,187 bytes +245‎ →‎DRIFT
• curprev 14:2914:29, 29 June 2015‎ Tigre talk contribs‎ 40,942 bytes +34‎ →‎DRIFT

26 June 2015

• curprev 13:0913:09, 26 June 2015‎ Tigre talk contribs‎ 40,908 bytes +2‎ →‎HEIMAP
• curprev 13:0813:08, 26 June 2015‎ Tigre talk contribs‎ 40,906 bytes +204‎ →‎DRIFT
• curprev 13:0613:06, 26 June 2015‎ Tigre talk contribs‎ 40,702 bytes +43‎ →‎DRIFT
• curprev 13:0313:03, 26 June 2015‎ Tigre talk contribs‎ 40,659 bytes +583‎ →‎DRIFT
• curprev 13:0213:02, 26 June 2015‎ Tigre talk contribs‎ 40,076 bytes −308‎ →‎DRIFT
• curprev 12:5612:56, 26 June 2015‎ Tigre talk contribs‎ 40,384 bytes +21‎ →‎DISTMEM and DISTBE
• curprev 12:5612:56, 26 June 2015‎ Tigre talk contribs‎ 40,363 bytes +878‎ →‎DISTMEM and DISTBE