Specific Process Knowledge/Etch/DRIE-Pegasus: Revision history

31 August 2011

• curprev 11:0411:04, 31 August 2011‎ Jml talk contribs‎ 8,243 bytes +2‎ →‎Important: New rules (as of August 2011) for using the Pegasus
• curprev 11:0411:04, 31 August 2011‎ Jml talk contribs‎ 8,241 bytes +97‎ →‎Important: New rules for using the Pegasus
• curprev 10:5410:54, 31 August 2011‎ Jml talk contribs‎ 8,144 bytes +565‎ No edit summary

23 August 2011

• curprev 08:0408:04, 23 August 2011‎ Jml talk contribs‎ 7,579 bytes −21‎ →‎Nanoetching

6 July 2011

• curprev 12:1512:15, 6 July 2011‎ Jml talk contribs‎ 7,600 bytes +201‎ →‎How to read the SPTS notation on process recipes
• curprev 12:1312:13, 6 July 2011‎ Jml talk contribs‎ 7,399 bytes +118‎ →‎How to read the SPTS notation on process recipes
• curprev 12:0712:07, 6 July 2011‎ Jml talk contribs‎ 7,281 bytes −160‎ →‎Process applications
• curprev 12:0712:07, 6 July 2011‎ Jml talk contribs‎ 7,441 bytes +53‎ →‎Other processes
• curprev 12:0612:06, 6 July 2011‎ Jml talk contribs‎ 7,388 bytes +107‎ →‎Nanoetching

5 July 2011

• curprev 13:4513:45, 5 July 2011‎ Jml talk contribs‎ 7,281 bytes −1,067‎ →‎SOI etch
• curprev 13:4513:45, 5 July 2011‎ Jml talk contribs‎ 8,348 bytes +1,333‎ →‎The standard processes: Processes A, B, C, D and SOI
• curprev 10:3910:39, 5 July 2011‎ Jml talk contribs‎ 7,015 bytes +4‎ →‎How to read the SPTS notation on process recipes
• curprev 10:3810:38, 5 July 2011‎ Jml talk contribs‎ 7,011 bytes +120‎ →‎The standard processes: Process A, B, C, D and SOI
• curprev 10:3310:33, 5 July 2011‎ Jml talk contribs‎ 6,891 bytes +5‎ →‎The standard processes: Process A, B, C and D
• curprev 10:3010:30, 5 July 2011‎ Jml talk contribs‎ 6,886 bytes +106‎ →‎Process C
• curprev 10:1010:10, 5 July 2011‎ Jml talk contribs‎ 6,780 bytes +822‎ →‎The standard processes: Process A, B, C and D
• curprev 10:0410:04, 5 July 2011‎ Jml talk contribs‎ 5,958 bytes −1,293‎ →‎Process A
• curprev 10:0010:00, 5 July 2011‎ Jml talk contribs‎ 7,251 bytes +735‎ →‎The standard processes: Process A, B, C and D
• curprev 09:3209:32, 5 July 2011‎ Jml talk contribs‎ 6,516 bytes −22‎ No edit summary

4 July 2011

• curprev 12:4712:47, 4 July 2011‎ Jml talk contribs‎ 6,538 bytes +25‎ →‎How to read the SPTS notation on process recipes
• curprev 12:4612:46, 4 July 2011‎ Jml talk contribs‎ 6,513 bytes +29‎ →‎How to read the SPTS notation on process recipes
• curprev 12:4412:44, 4 July 2011‎ Jml talk contribs‎ 6,484 bytes +1‎ →‎How to read the SPTS notation on process recipes
• curprev 12:4312:43, 4 July 2011‎ Jml talk contribs‎ 6,483 bytes +250‎ →‎How to read the SPTS notation on process recipes
• curprev 12:3212:32, 4 July 2011‎ Jml talk contribs‎ 6,233 bytes +186‎ →‎How to read the SPTS notation on process recipes
• curprev 12:2612:26, 4 July 2011‎ Jml talk contribs‎ 6,047 bytes +24‎ →‎How to read the SPTS notation on process recipes
• curprev 12:2312:23, 4 July 2011‎ Jml talk contribs‎ 6,023 bytes −26‎ →‎How to read the SPTS notation on process recipes
• curprev 12:1912:19, 4 July 2011‎ Jml talk contribs‎ 6,049 bytes +75‎ →‎How to read the SPTS notation on process recipes
• curprev 12:1812:18, 4 July 2011‎ Jml talk contribs‎ 5,974 bytes +5‎ →‎How to read the SPTS notation on process recipes
• curprev 12:1712:17, 4 July 2011‎ Jml talk contribs‎ 5,969 bytes −14‎ →‎How to read the SPTS notation on process recipes
• curprev 12:1712:17, 4 July 2011‎ Jml talk contribs‎ 5,983 bytes 0‎ →‎How to read the SPTS notation on process recipes
• curprev 12:1712:17, 4 July 2011‎ Jml talk contribs‎ 5,983 bytes +13‎ →‎How to read the SPTS notation on process recipes
• curprev 12:1612:16, 4 July 2011‎ Jml talk contribs‎ 5,970 bytes +4‎ →‎How to read the SPTS notation on process recipes
• curprev 12:1512:15, 4 July 2011‎ Jml talk contribs‎ 5,966 bytes +48‎ →‎How to read the SPTS notation on process recipes
• curprev 12:1312:13, 4 July 2011‎ Jml talk contribs‎ 5,918 bytes +14‎ →‎How to read the SPTS notation on process recipes
• curprev 12:1112:11, 4 July 2011‎ Jml talk contribs‎ 5,904 bytes +76‎ →‎How to read the SPTS notation on process recipes
• curprev 11:5611:56, 4 July 2011‎ Jml talk contribs‎ 5,828 bytes −1‎ →‎How to read the SPTS notation on process recipes
• curprev 11:5511:55, 4 July 2011‎ Jml talk contribs‎ 5,829 bytes +43‎ →‎The standard processes: Process A, B, C and D
• curprev 11:5511:55, 4 July 2011‎ Jml talk contribs‎ 5,786 bytes −2‎ →‎Process applications
• curprev 11:5511:55, 4 July 2011‎ Jml talk contribs‎ 5,788 bytes −2‎ →‎Hardware information
• curprev 11:5211:52, 4 July 2011‎ Jml talk contribs‎ 5,790 bytes −23‎ →‎The standard processes: Process A, B, C and D
• curprev 11:5111:51, 4 July 2011‎ Jml talk contribs‎ 5,813 bytes −10‎ →‎The standard processes: Process A, B, C and D
• curprev 11:5011:50, 4 July 2011‎ Jml talk contribs‎ 5,823 bytes +386‎ →‎Processing options on the Pegasus
• curprev 11:3811:38, 4 July 2011‎ Jml talk contribs‎ 5,437 bytes +610‎ →‎The standard processes: Process A, B, C and D
• curprev 11:3511:35, 4 July 2011‎ Jml talk contribs‎ 4,827 bytes −1‎ →‎The Bosch process in the DRIE-Pegasus
• curprev 11:3411:34, 4 July 2011‎ Jml talk contribs‎ 4,828 bytes +1‎ →‎The Bosch process in the DRIE-Pegasus
• curprev 10:5110:51, 4 July 2011‎ Jml talk contribs‎ 4,827 bytes +1,033‎ No edit summary
• curprev 10:5010:50, 4 July 2011‎ Jml talk contribs‎ 3,794 bytes −1,031‎ No edit summary
• curprev 10:5010:50, 4 July 2011‎ Jml talk contribs‎ 4,825 bytes +28‎ →‎Processing options on the Pegasus

24 June 2011

• curprev 13:3013:30, 24 June 2011‎ Jml talk contribs‎ 4,797 bytes +118‎ No edit summary
• curprev 13:2513:25, 24 June 2011‎ Jml talk contribs‎ 4,679 bytes −72‎ →‎Details on DRIE-Pegasus