Specific Process Knowledge/Thermal Process/Dope with Boron: Revision history

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7 February 2008

  • curprev 13:5513:55, 7 February 2008‎ Yg talk contribs‎ 394 bytes +394‎ New page: ==Dope with boron== The furnace A2 boron predep can be used to predeposit silicon wafers with boron. The silicon wafers are positioned in a siliconcarbide boat just next to wafers of boron...
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