Specific Process Knowledge/Characterization/Thickness Measurer: Revision history

Diff selection: Mark the radio buttons of the revisions to compare and hit enter or the button at the bottom.
Legend: (cur) = difference with latest revision, (prev) = difference with preceding revision, m = minor edit.

(newest | oldest) View ( | older 50) (20 | 50 | 100 | 250 | 500)

9 January 2008

7 January 2008

  • curprev 15:4115:41, 7 January 2008192.38.87.69 talk 228 bytes +228 New page: This is a micrometer-screw. It measures with an accurracy within a few µm. Measure the wafer in the box next to the meter.If ok other wafers can be measured. There is a calibration by the...
(newest | oldest) View ( | older 50) (20 | 50 | 100 | 250 | 500)