Specific Process Knowledge/Etch/RIE (Reactive Ion Etch): Revision history

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  • curprev 13:1113:11, 18 September 2007‎ BGE talk contribs‎ 424 bytes +424‎ New page: == Etching using the dry etch technique RIE (Reactive Ion Etch) == Here at Danchip we have three RIE's. One (III-V RIE) for etching III-V materials and two (RIE1 and RIE2) for etching sil...
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