Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using AOE/Standard recipe with resist mask/Striation: Revision history

20 April 2016

• curprev 09:5909:59, 20 April 2016‎ Bghe talk contribs‎ 6,536 bytes +230‎ →‎Striation: Side wall roughness
• curprev 09:5809:58, 20 April 2016‎ Bghe talk contribs‎ 6,306 bytes +302‎ →‎Striation: Side wall roughness
• curprev 09:5609:56, 20 April 2016‎ Bghe talk contribs‎ 6,004 bytes +1‎ →‎Striation: Side wall roughness
• curprev 09:5609:56, 20 April 2016‎ Bghe talk contribs‎ 6,003 bytes +247‎ →‎Striation: Side wall roughness
• curprev 09:5509:55, 20 April 2016‎ Bghe talk contribs‎ 5,756 bytes +255‎ →‎Striation: Side wall roughness
• curprev 09:4809:48, 20 April 2016‎ Bghe talk contribs‎ 5,501 bytes 0‎ →‎Striation: Side wall roughness
• curprev 09:4709:47, 20 April 2016‎ Bghe talk contribs‎ 5,501 bytes +191‎ →‎Striation: Side wall roughness
• curprev 09:4109:41, 20 April 2016‎ Bghe talk contribs‎ 5,310 bytes +119‎ →‎Striation: Side wall roughness
• curprev 09:3709:37, 20 April 2016‎ Bghe talk contribs‎ 5,191 bytes +456‎ →‎Striation: Side wall roughness
• curprev 09:2709:27, 20 April 2016‎ Bghe talk contribs‎ 4,735 bytes +149‎ →‎Striation: Side wall roughness
• curprev 09:2309:23, 20 April 2016‎ Bghe talk contribs‎ 4,586 bytes +208‎ →‎Striation: Side wall roughness
• curprev 09:1109:11, 20 April 2016‎ Bghe talk contribs‎ 4,378 bytes +333‎ →‎Striation: Side wall roughness
• curprev 09:0209:02, 20 April 2016‎ Bghe talk contribs‎ 4,045 bytes +19‎ →‎Striation: Side wall roughness
• curprev 09:0109:01, 20 April 2016‎ Bghe talk contribs‎ 4,026 bytes −1‎ →‎Striation: Side wall roughness
• curprev 09:0009:00, 20 April 2016‎ Bghe talk contribs‎ 4,027 bytes +3‎ →‎Striation: Side wall roughness
• curprev 09:0009:00, 20 April 2016‎ Bghe talk contribs‎ 4,024 bytes +1‎ →‎Striation: Side wall roughness
• curprev 08:5908:59, 20 April 2016‎ Bghe talk contribs‎ 4,023 bytes 0‎ →‎Striation: Side wall roughness
• curprev 08:5808:58, 20 April 2016‎ Bghe talk contribs‎ 4,023 bytes +29‎ →‎Striation: Side wall roughness
• curprev 08:4608:46, 20 April 2016‎ Bghe talk contribs‎ 3,994 bytes +2‎ →‎Striation: Side wall roughness
• curprev 08:4508:45, 20 April 2016‎ Bghe talk contribs‎ 3,992 bytes +798‎ →‎Striation: Side wall roughness

18 April 2016

• curprev 12:4312:43, 18 April 2016‎ Bghe talk contribs‎ 3,194 bytes +25‎ →‎Sidewall roughness effected by UV curing and heat treatment of AZ5214E resist 70px
• curprev 12:4212:42, 18 April 2016‎ Bghe talk contribs‎ 3,169 bytes +25‎ →‎Sidewall roughness effected by UV curing and heat treatment of nLof resist 70px
• curprev 12:4112:41, 18 April 2016‎ Bghe talk contribs‎ 3,144 bytes +72‎ No edit summary
• curprev 12:3712:37, 18 April 2016‎ Bghe talk contribs‎ 3,072 bytes 0‎ →‎Sidewall roughness effected by UV curing and heat treatment of AZ5214E resist 70px
• curprev 10:4210:42, 18 April 2016‎ Bghe talk contribs‎ 3,072 bytes −57‎ →‎Sidewall roughness effected by UV curing and heat treatment of AZ5214E resist 70px
• curprev 10:3910:39, 18 April 2016‎ Bghe talk contribs‎ 3,129 bytes +4‎ →‎Sidewall roughness effected by UV curing and heat treatment of AZ5214E resist 70px
• curprev 10:3710:37, 18 April 2016‎ Bghe talk contribs‎ 3,125 bytes −4‎ →‎Sidewall roughness effected by UV curing and heat treatment of AZ5214E resist 70px
• curprev 10:3710:37, 18 April 2016‎ Bghe talk contribs‎ 3,129 bytes +821‎ →‎Sidewall roughness effected by UV curing and heat treatment of AZ5214E resist 70px
• curprev 10:2910:29, 18 April 2016‎ Bghe talk contribs‎ 2,308 bytes 0‎ →‎Sidewall roughness effected by UV curing and heat treatment of nLof resist 70px
• curprev 10:2410:24, 18 April 2016‎ Bghe talk contribs‎ 2,308 bytes +250‎ →‎Sidewall roughness effected by UV curing and heat treatment of nLof resist 70px
• curprev 10:2110:21, 18 April 2016‎ Bghe talk contribs‎ 2,058 bytes +1‎ →‎Sidewall roughness effected by UV curing and heat treatment of nLof resist 70px
• curprev 10:2010:20, 18 April 2016‎ Bghe talk contribs‎ 2,057 bytes 0‎ →‎Sidewall roughness effected by UV curing and heat treatment of nLof resist 70px
• curprev 10:2010:20, 18 April 2016‎ Bghe talk contribs‎ 2,057 bytes +129‎ →‎Sidewall roughness effected by UV curing and heat treatment of nLof resist 70px
• curprev 10:0610:06, 18 April 2016‎ Bghe talk contribs‎ 1,928 bytes +25‎ →‎Sidewall roughness effected by UV curing and heat treatment of nLof resist 70px
• curprev 10:0510:05, 18 April 2016‎ Bghe talk contribs‎ 1,903 bytes +64‎ →‎Sidewall roughness effected by UV curing and heat treatment of nLof resist 70px
• curprev 10:0310:03, 18 April 2016‎ Bghe talk contribs‎ 1,839 bytes +14‎ →‎Sidewall roughness effected by UV curing and heat treatment of nLof resist 70px
• curprev 10:0010:00, 18 April 2016‎ Bghe talk contribs‎ 1,825 bytes +432‎ →‎Sidewall roughness effected by UV curing and heat treatment of nLof resist 70px
• curprev 09:5609:56, 18 April 2016‎ Bghe talk contribs‎ 1,393 bytes 0‎ →‎Sidewall roughness effected by UV curing and heat treatnent of AZ5214E resist 70px
• curprev 09:5609:56, 18 April 2016‎ Bghe talk contribs‎ 1,393 bytes 0‎ →‎Sidewall roughness effected by UV curing and heat treatnent of nLof resist 70px
• curprev 09:5509:55, 18 April 2016‎ Bghe talk contribs‎ 1,393 bytes +46‎ →‎Sidewall roughness effected by UV curing and heat treatnent of AZ5214E resist
• curprev 09:5509:55, 18 April 2016‎ Bghe talk contribs‎ 1,347 bytes +46‎ →‎Sidewall roughness effected by UV curing and heat treatnent of nLof resist
• curprev 09:5509:55, 18 April 2016‎ Bghe talk contribs‎ 1,301 bytes +162‎ No edit summary

11 December 2015

• curprev 11:1411:14, 11 December 2015‎ Bghe talk contribs‎ 1,139 bytes +2‎ →‎Roughness of the resist after etch measured with the AFM
• curprev 11:1311:13, 11 December 2015‎ Bghe talk contribs‎ 1,137 bytes +68‎ →‎Roughness of the resist after etch measured with the AFM
• curprev 11:1111:11, 11 December 2015‎ Bghe talk contribs‎ 1,069 bytes +73‎ →‎Roughness of the resist after etch measured with the AFM
• curprev 11:0711:07, 11 December 2015‎ Bghe talk contribs‎ 996 bytes +1‎ No edit summary

25 November 2015

• curprev 12:0012:00, 25 November 2015‎ Bghe talk contribs‎ 995 bytes +91‎ →‎Roughness of the resist after etch measured with the AFM
• curprev 11:5711:57, 25 November 2015‎ Bghe talk contribs‎ 904 bytes +56‎ →‎Striation: Side wall roughness

24 November 2015

• curprev 11:2411:24, 24 November 2015‎ Bghe talk contribs‎ 848 bytes +283‎ No edit summary

• curprev 11:2311:23, 24 November 2015‎ Bghe talk contribs‎ 565 bytes +565‎ Created page with " =====Striation: Side wall roughness===== <gallery caption="Striation with different resists used" widths="300px" heights="250px" perrow="4"> Image:Az1_1_06.jpg|Az resist Ima..."