Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/Slow etch: Revision history

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curprev 14:3714:37, 28 June 2024‎ Bghe talk contribs‎ 2,660 bytes +223‎ No edit summary

curprev 12:1212:12, 16 March 2023‎ Bghe talk contribs‎ 2,437 bytes +18‎ →‎Etch Profile SEM images

curprev 17:1817:18, 31 January 2023‎ Bghe talk contribs‎ 2,058 bytes 0‎ →‎The slow etch
curprev 17:1717:17, 31 January 2023‎ Bghe talk contribs‎ 2,058 bytes +6‎ →‎The slow etch

curprev 12:3212:32, 15 December 2022‎ Bghe talk contribs‎ 1,115 bytes 0‎ No edit summary
curprev 12:3012:30, 15 December 2022‎ Bghe talk contribs‎ 1,115 bytes +1‎ →‎The slow etch

curprev 15:2815:28, 6 December 2022‎ Bghe talk contribs‎ 172 bytes +172‎ Created page with "=The slow etch= The slow etch is designed to etch slow at low powers to etch thin films and to avoid overheating of samples mounted on a carrier with Capton/polyimide tape"

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