Specific Process Knowledge/Etch/DRIE-Pegasus/processA: Revision history

17 December 2013

• curprev 12:5512:55, 17 December 2013‎ Jmli talk contribs‎ 6,971 bytes −3‎ No edit summary
• curprev 12:5512:55, 17 December 2013‎ Jmli talk contribs‎ 6,974 bytes +2‎ →‎Process A
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• curprev 11:1711:17, 17 December 2013‎ Jmli talk contribs‎ 7,907 bytes +2‎ →‎Process A guidelines
• curprev 11:1111:11, 17 December 2013‎ Jmli talk contribs‎ 7,905 bytes +11‎ →‎Quality control procedure
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• curprev 11:0111:01, 17 December 2013‎ Jmli talk contribs‎ 7,901 bytes −112‎ →‎Quality control procedure
• curprev 10:5810:58, 17 December 2013‎ Jmli talk contribs‎ 8,013 bytes −1‎ →‎Quality control procedure
• curprev 10:5610:56, 17 December 2013‎ Jmli talk contribs‎ 8,014 bytes −57‎ →‎QC template - try to make you QC recipe + limits look as much as possible like this
• curprev 10:5510:55, 17 December 2013‎ Jmli talk contribs‎ 8,071 bytes −26‎ →‎QC template - try to make you QC recipe + limits look as much as possible like this
• curprev 10:5410:54, 17 December 2013‎ Jmli talk contribs‎ 8,097 bytes +3‎ →‎QC template - try to make you QC recipe + limits look as much as possible like this
• curprev 10:5410:54, 17 December 2013‎ Jmli talk contribs‎ 8,094 bytes +13‎ →‎QC template - try to make you QC recipe + limits look as much as possible like this
• curprev 10:5310:53, 17 December 2013‎ Jmli talk contribs‎ 8,081 bytes −7‎ →‎QC template - try to make you QC recipe + limits look as much as possible like this
• curprev 10:5010:50, 17 December 2013‎ Jmli talk contribs‎ 8,088 bytes +617‎ No edit summary
• curprev 10:4710:47, 17 December 2013‎ Jmli talk contribs‎ 7,471 bytes +1,048‎ →‎Process A

3 October 2013

• curprev 16:2816:28, 3 October 2013‎ Jmli talk contribs‎ 6,423 bytes +216‎ No edit summary

16 May 2013

• curprev 13:3013:30, 16 May 2013‎ Jmli talk contribs‎ 6,207 bytes +224‎ →‎Process A guidelines
• curprev 13:1913:19, 16 May 2013‎ Jmli talk contribs‎ 5,983 bytes +325‎ →‎Process A guidelines
• curprev 13:0813:08, 16 May 2013‎ Jmli talk contribs‎ 5,658 bytes +231‎ →‎Process A guidelines
• curprev 13:0313:03, 16 May 2013‎ Jmli talk contribs‎ 5,427 bytes +208‎ →‎Process A guidelines
• curprev 12:0712:07, 16 May 2013‎ Jmli talk contribs‎ 5,219 bytes +88‎ →‎Process A guidelines
• curprev 11:5411:54, 16 May 2013‎ Jmli talk contribs‎ 5,131 bytes −64‎ →‎Process A guidelines
• curprev 11:4411:44, 16 May 2013‎ Jmli talk contribs‎ 5,195 bytes +177‎ →‎Process A performance

8 March 2013

• curprev 14:3114:31, 8 March 2013‎ Jml talk contribs‎ 5,018 bytes 0‎ →‎Results: Etched depths in trenches of different widths

20 February 2013

• curprev 15:0115:01, 20 February 2013‎ Jml talk contribs‎ 5,018 bytes 0‎ →‎Results: Etched depths in trenches of different widths
• curprev 15:0115:01, 20 February 2013‎ Jml talk contribs‎ 5,018 bytes 0‎ →‎Results: Etched depths in trenches of different widths
• curprev 15:0015:00, 20 February 2013‎ Jml talk contribs‎ 5,018 bytes +244‎ →‎Results: Optical images

4 February 2013

• curprev 20:5420:54, 4 February 2013‎ Jml talk contribs‎ 4,774 bytes +29‎ →‎Results: Optical images
• curprev 15:1515:15, 4 February 2013‎ Jml talk contribs‎ 4,745 bytes +32‎ →‎Results: Optical images
• curprev 15:1315:13, 4 February 2013‎ Jml talk contribs‎ 4,713 bytes −5‎ →‎Results: Optical images
• curprev 15:1215:12, 4 February 2013‎ Jml talk contribs‎ 4,718 bytes +185‎ →‎Results: Optical images
• curprev 15:0915:09, 4 February 2013‎ Jml talk contribs‎ 4,533 bytes +33‎ →‎Results: Optical images
• curprev 14:5714:57, 4 February 2013‎ Jml talk contribs‎ 4,500 bytes +221‎ →‎Results: Optical images
• curprev 13:3113:31, 4 February 2013‎ Jml talk contribs‎ 4,279 bytes +272‎ →‎Results: Optical images
• curprev 13:0613:06, 4 February 2013‎ Jml talk contribs‎ 4,007 bytes +33‎ →‎Results
• curprev 13:0113:01, 4 February 2013‎ Jml talk contribs‎ 3,974 bytes 0‎ →‎Results
• curprev 13:0013:00, 4 February 2013‎ Jml talk contribs‎ 3,974 bytes +429‎ →‎Results
• curprev 12:5812:58, 4 February 2013‎ Jml talk contribs‎ 3,545 bytes 0‎ →‎Results
• curprev 12:5712:57, 4 February 2013‎ Jml talk contribs‎ 3,545 bytes +154‎ →‎Results
• curprev 12:5312:53, 4 February 2013‎ Jml talk contribs‎ 3,391 bytes +437‎ →‎Process A performance
• curprev 12:2212:22, 4 February 2013‎ Jml talk contribs‎ 2,954 bytes +52‎ →‎Experiment
• curprev 11:5511:55, 4 February 2013‎ Jml talk contribs‎ 2,902 bytes +28‎ →‎Experiment
• curprev 11:5411:54, 4 February 2013‎ Jml talk contribs‎ 2,874 bytes +173‎ →‎Experiment
• curprev 11:5211:52, 4 February 2013‎ Jml talk contribs‎ 2,701 bytes +1,002‎ →‎Process A performance
• curprev 11:4611:46, 4 February 2013‎ Jml talk contribs‎ 1,699 bytes +127‎ →‎Process A
• curprev 11:3911:39, 4 February 2013‎ Jml talk contribs‎ 1,572 bytes +89‎ →‎Process A

26 November 2012

• curprev 12:5912:59, 26 November 2012‎ Jml talk contribs‎ 1,483 bytes +170‎ No edit summary

5 July 2011

• curprev 11:0411:04, 5 July 2011‎ Jml talk contribs‎ 1,313 bytes +1,313‎ New page: {| border="2" cellpadding="2" cellspacing="1" style="text-align:center;" |+ '''Process A specifications''' |- ! Parameter ! Specification ! Average result |- ! Etch rate (µm/min) | > 1...