Specific Process Knowledge/Characterization/Probe station: Difference between revisions

Revision as of 12:14, 21 September 2017

Probe station

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The Probe station is a - EPS150Triax - Cascade. The purpose is to measure I/V measurement, ohmic measurements etc, it has 4 individually adjustable triax connected probes, but can be fitted with additional coax connected.

It has several source meters, multi meters and a computer attached.

Equipment performance and process related parameters

Purpose	Electrical measurements	I/V Resistance Heigth of larger mesas
Performance	Pad size	100x100µm or more
Substrates	Batch size	One sample
Substrates	Substrate materials allowed	No restrictions

The user manual, technical information and contact information can be found in LabManager:

Probe station

@@ Line 16: / Line 16: @@
 Purpose
 |style="background:LightGrey; color:black"|
-Thickness measurer
+Electrical measurements
 |style="background:WhiteSmoke; color:black"|
-*Wafer thickness
+*I/V
-*Depths of larger grooves
+*Resistance
 *Heigth of larger mesas
 |-
@@ Line 25: / Line 25: @@
 Performance
 |style="background:LightGrey; color:black"|
-Thickness resolution
+Pad size
 |style="background:WhiteSmoke; color:black"|
-*< 5 µm
+*100x100µm or more
 |-
 !style="background:silver; color:black" align="center" valign="center" rowspan="2"|