Specific Process Knowledge/Characterization/Probe station: Difference between revisions

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Purpose  
Purpose  
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Thickness measurer
Electrical measurements
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*Wafer thickness
*I/V
*Depths of larger grooves
*Resistance
*Heigth of larger mesas
*Heigth of larger mesas
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Performance
Performance
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Thickness resolution
Pad size
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*< 5 µm
*100x100µm or more
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Revision as of 13:14, 21 September 2017

Probe station

Probe station. Positioned in serviceroom CX1

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The Probe station is a - EPS150Triax - Cascade. The purpose is to measure I/V measurement, ohmic measurements etc, it has 4 individually adjustable triax connected probes, but can be fitted with additional coax connected.

It has several source meters, multi meters and a computer attached.

Equipment performance and process related parameters

Purpose

Electrical measurements

  • I/V
  • Resistance
  • Heigth of larger mesas

Performance

Pad size

  • 100x100µm or more

Substrates

Batch size

  • One sample
Substrate materials allowed
  • No restrictions



The user manual, technical information and contact information can be found in LabManager:

Probe station

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