LabAdviser: Difference between revisions
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==DTU CEN Facility and Phone Numbers== | ==DTU CEN Facility and Phone Numbers== | ||
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Revision as of 10:14, 19 April 2016
LabAdviser is a process handbook for equipment and processes at the DTU Danchip cleanroom facilities and DTU CEN. The function and capacity of each piece of equipment is described and general process steps, eg photolithography procedures, are clarified. LabAdviser is meant to advise you to a good starting point for your cleanroom process for further optimization to meet your needs. To enter LabAdviser you need to log in with your DTU login. LabAdviser is only editable for Danchip and CEN employees. If you need further information about certain machinery or processes, please contact the Danchip or CEN personnel. Any feedback you might have on LabAdviser is welcome and can be given by mail to the LabAdviser mailbox: labadviser@danchip.dtu.dk
News in LabAdviser:
The latest monthly LabAdviser update: LabAdviser update send out 2016-04-11
Slides from the customer meeting December 2015: 2015 Customer meeting
Contents
- Danchip contact information
- Introduction to LabAdviser and Processing
- Introduction to LabManager
- Process flow approval
- Specific Process Knowledge
- New equipment in the pipeline and old equipment for decommissioning
- Surveys, statistics, monthly LabAdviser updates and other info.
- How to add information to LabAdviser
- CEN overview
Overview of processing steps - a guide to where you can find process information in LabAdviser:
Danchip Contact Info
In order to get the quickest response to training requests, process approvals, questions etc. please use the following mailboxes to DTU Nanolab - Fabrication (formerly known as Danchip).
Mailbox | link | Concerning |
LabAdviser Mailbox | labadviser@nanolab.dtu.dk | Any questions or feedback to LabAdviser. |
Process flow review | process-flow@nanolab.dtu.dk (should work again) | More about process flow review here |
Training on equipment | training@nanolab.dtu.dk | It is our goal to answer your request regarding process flow reviews and training within 2 workdays. |
E-beam training | e-beam@nanolab.dtu.dk | To request training on JEOL JBX-9500FSZ or Raith Eline e-beam systems. Please study the material on the EBL Labadviser pages. |
E-beam load | e-beamload@nanolab.dtu.dk | To request cassette loading on JEOL JBX-9500FSZ. |
Mask order: | Photomasks has to be ordered at Compugraphics in Procure. You can read more about the procedure for mask ordering here. It requires a specification file like this: (example spec file) and a design file (gds or cif format). | |
Mask Review |
mask@nanolab.dtu.dk (Subject: Mask Review) | Note: You have to order masks at Compugraphics via Procure.
Nanolab can offer a check of the mask design and specifications. You can read more about mask design here. |
Metal wishes | . | . |
Lesker: |
metal@nanolab.dtu.dk (Subject: Lesker Metal Wishes). | - See current and future materials here: Lesker status log |
Temescal/Wordentec: |
metal@nanolab.dtu.dk (Subject:PVD Metal Wishes) | See current and future materials here:
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Tool change | toolchange@nanolab.dtu.dk | Laser: change of optics and Polymer Injection Molding machine: change mold-tool |
Commercial offers etc. | sales@nanolab.dtu.dk | mostly companies nanolabexternal customers |
Gas-related questions | DCH-Gas@nanolab.dtu.dk | issues (information regarding ordering, delivery, changing etc. Mostly for internal Nanolab use |
All other inquiries | nanolabsupport@nanolab.dtu.dk | ... or if you are in doubt |
DTU Danchip Cleanroom Naming and Phone Numbers
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