Specific Process Knowledge/Thermal Process/Resist Pyrolysis Furnace: Revision history

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curprev 14:0814:08, 6 February 2023‎ Pevo talk contribs‎ 3,963 bytes +50‎ No edit summary

curprev 10:1610:16, 5 October 2021‎ Pevo talk contribs‎ 3,913 bytes −3‎ →‎EXPIRED!!! The Resist Pyrolysis furnace has been removed from the cleanroom August 2019. Use the Multipurpose Anneal furnace instead.

curprev 09:2209:22, 8 August 2019‎ Pevo talk contribs‎ 3,916 bytes +175‎ No edit summary

curprev 13:1913:19, 11 May 2015‎ Pevo talk contribs‎ 3,589 bytes +118‎ →‎Equipment performance and process related parameters
curprev 13:1713:17, 11 May 2015‎ Pevo talk contribs‎ 3,471 bytes +148‎ No edit summary

curprev 15:5215:52, 25 August 2014‎ Bghe talk contribs‎ 3,323 bytes +26‎ No edit summary
curprev 14:3614:36, 25 August 2014‎ Bghe talk contribs‎ 3,297 bytes +112‎ No edit summary

curprev 14:4314:43, 17 February 2014‎ Bghe talk contribs‎ 3,185 bytes +1‎ →‎Resist Pyrolysis Furnace
curprev 14:4314:43, 17 February 2014‎ Bghe talk contribs‎ 3,184 bytes −2‎ →‎Resist Pyrolysis Furnace
curprev 14:4314:43, 17 February 2014‎ Bghe talk contribs‎ 3,186 bytes 0‎ No edit summary

curprev 16:1916:19, 13 February 2014‎ Pevo talk contribs‎ 3,186 bytes +2‎ →‎Equipment performance and process related parameters
curprev 16:1616:16, 13 February 2014‎ Pevo talk contribs‎ 3,184 bytes −19‎ No edit summary
curprev 16:1316:13, 13 February 2014‎ Pevo talk contribs‎ 3,203 bytes 0‎ No edit summary
curprev 16:1316:13, 13 February 2014‎ Pevo talk contribs‎ 3,203 bytes −47‎ →‎Process information

curprev 13:5013:50, 11 October 2013‎ Pevo talk contribs‎ 3,250 bytes +227‎ No edit summary

curprev 09:2709:27, 7 May 2013‎ Pvl talk contribs‎ 3,023 bytes +46‎ →‎Process information

curprev 11:2011:20, 3 December 2012‎ Mdyma talk contribs‎ 2,977 bytes +13‎ →‎Equipment performance and process related parameters
curprev 11:1811:18, 3 December 2012‎ Mdyma talk contribs‎ 2,964 bytes +1‎ →‎Resist Pyrolysis Furnace
curprev 10:4710:47, 3 December 2012‎ Pvl talk contribs‎ 2,963 bytes +4‎ →‎Equipment performance and process related parameters

curprev 14:5114:51, 30 November 2012‎ Pvl talk contribs‎ 3,576 bytes +3,576‎ Created page with " ==This page is under constrution== == Resist Pyrolysis Furnace == The Resist Pyrolysis Furnace is used for resist pyrolysis, where samples with different resist layers are..."

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