Specific Process Knowledge/Thermal Process/Dope with Phosphorus

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Revision as of 11:53, 26 January 2009 by Yg (talk | contribs) (New page: The furnace A4 phosphorus predep can be used to predeposit silicon wafers with phosphor. The silicon wafers are positioned in a quarts boat. Phosphor is predeposited in the silicon wafers.)
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The furnace A4 phosphorus predep can be used to predeposit silicon wafers with phosphor. The silicon wafers are positioned in a quarts boat. Phosphor is predeposited in the silicon wafers.

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