Specific Process Knowledge/Thermal Process/Dope with Phosphorus: Revision history

31 January 2023

• curprev 16:1216:12, 31 January 2023‎ Paphol talk contribs‎ 10,979 bytes +50‎ →‎Phosphorous doping test after hardware and software upgrades
• curprev 16:1116:11, 31 January 2023‎ Paphol talk contribs‎ 10,929 bytes +51‎ →‎Test of the Phosphorus Predep furnace
• curprev 16:1016:10, 31 January 2023‎ Paphol talk contribs‎ 10,878 bytes +51‎ →‎Test of the Phosphorus Predep furnace

14 December 2022

• curprev 16:3416:34, 14 December 2022‎ Pevo talk contribs‎ 10,827 bytes +2‎ No edit summary
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• curprev 16:3316:33, 14 December 2022‎ Pevo talk contribs‎ 10,840 bytes +2‎ →‎Phosphorous doping test after hardware and software upgrades

21 November 2022

• curprev 15:5615:56, 21 November 2022‎ Pevo talk contribs‎ 10,838 bytes +1‎ No edit summary

26 August 2022

• curprev 11:3211:32, 26 August 2022‎ Pevo talk contribs‎ 10,837 bytes +1,825‎ →‎Phosphorous doping test after change of hardware
• curprev 10:3010:30, 26 August 2022‎ Pevo talk contribs‎ 9,012 bytes −1‎ No edit summary
• curprev 10:1410:14, 26 August 2022‎ Pevo talk contribs‎ 9,013 bytes +167‎ →‎Phosphorous doping test after change of hardware
• curprev 09:5409:54, 26 August 2022‎ Pevo talk contribs‎ 8,846 bytes +885‎ No edit summary
• curprev 09:4809:48, 26 August 2022‎ Pevo talk contribs‎ 7,961 bytes +1‎ No edit summary

25 November 2019

• curprev 16:4316:43, 25 November 2019‎ Jmli talk contribs‎ 7,960 bytes 0‎ →‎Results
• curprev 16:4216:42, 25 November 2019‎ Jmli talk contribs‎ 7,960 bytes 0‎ →‎Purpose
• curprev 16:4116:41, 25 November 2019‎ Jmli talk contribs‎ 7,960 bytes −1‎ No edit summary

29 January 2018

• curprev 15:5115:51, 29 January 2018‎ Pevo talk contribs‎ 7,961 bytes +1‎ No edit summary

11 January 2016

• curprev 15:4715:47, 11 January 2016‎ Kabi talk contribs‎ 7,960 bytes 0‎ →‎Experimental setup

30 November 2015

• curprev 15:3415:34, 30 November 2015‎ Kabi talk contribs‎ 7,960 bytes +33‎ No edit summary
• curprev 15:3315:33, 30 November 2015‎ Kabi talk contribs‎ 7,927 bytes +22‎ →‎Experimental setup
• curprev 15:3215:32, 30 November 2015‎ Kabi talk contribs‎ 7,905 bytes +609‎ No edit summary
• curprev 15:1615:16, 30 November 2015‎ Kabi talk contribs‎ 7,296 bytes −1‎ →‎Test of the Phosphorus Predep furnace
• curprev 15:1415:14, 30 November 2015‎ Kabi talk contribs‎ 7,297 bytes −6‎ →‎Doping profile results after phosphorous predeposition process
• curprev 15:1315:13, 30 November 2015‎ Kabi talk contribs‎ 7,303 bytes +72‎ →‎Doping profile results after phosphorous predeposition process
• curprev 15:1115:11, 30 November 2015‎ Kabi talk contribs‎ 7,231 bytes +11‎ →‎1. Process parameters
• curprev 15:1115:11, 30 November 2015‎ Kabi talk contribs‎ 7,220 bytes +56‎ →‎1. Process parameters

25 November 2015

• curprev 14:4014:40, 25 November 2015‎ Kabi talk contribs‎ 7,164 bytes 0‎ →‎Doping profile results after phosphorous predeposition process
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• curprev 13:3213:32, 25 November 2015‎ Kabi talk contribs‎ 7,185 bytes +22‎ →‎Doping profile after Phosphorus Predep process
• curprev 13:3113:31, 25 November 2015‎ Kabi talk contribs‎ 7,163 bytes +43‎ →‎Doping profile after Phosphorus Predep process
• curprev 13:3113:31, 25 November 2015‎ Kabi talk contribs‎ 7,120 bytes +4‎ →‎Process parameters
• curprev 13:3013:30, 25 November 2015‎ Kabi talk contribs‎ 7,116 bytes −90‎ No edit summary
• curprev 13:2513:25, 25 November 2015‎ Kabi talk contribs‎ 7,206 bytes +594‎ →‎Process parameters
• curprev 13:0713:07, 25 November 2015‎ Kabi talk contribs‎ 6,612 bytes +95‎ →‎Process parameters
• curprev 12:4512:45, 25 November 2015‎ Kabi talk contribs‎ 6,517 bytes +10‎ →‎Process parameters
• curprev 12:4512:45, 25 November 2015‎ Kabi talk contribs‎ 6,507 bytes −4‎ →‎Process parameters
• curprev 12:4412:44, 25 November 2015‎ Kabi talk contribs‎ 6,511 bytes +20‎ →‎Process parameters
• curprev 12:4312:43, 25 November 2015‎ Kabi talk contribs‎ 6,491 bytes −4‎ →‎Process parameters
• curprev 12:4312:43, 25 November 2015‎ Kabi talk contribs‎ 6,495 bytes +132‎ →‎Doping profile after Phosphorus Predep process
• curprev 12:3512:35, 25 November 2015‎ Kabi talk contribs‎ 6,363 bytes +4‎ →‎Process parameters
• curprev 12:3312:33, 25 November 2015‎ Kabi talk contribs‎ 6,359 bytes +1,095‎ No edit summary
• curprev 11:5111:51, 25 November 2015‎ Kabi talk contribs‎ 5,264 bytes +53‎ No edit summary

19 May 2014

• curprev 09:5309:53, 19 May 2014‎ Mdyma talk contribs‎ 5,211 bytes +157‎ →‎Results

21 October 2013

• curprev 12:4412:44, 21 October 2013‎ Mdyma talk contribs‎ 5,054 bytes −3‎ →‎Results
• curprev 12:4312:43, 21 October 2013‎ Mdyma talk contribs‎ 5,057 bytes −6‎ →‎Results
• curprev 12:4212:42, 21 October 2013‎ Mdyma talk contribs‎ 5,063 bytes +21‎ →‎Results
• curprev 12:4012:40, 21 October 2013‎ Mdyma talk contribs‎ 5,042 bytes +130‎ →‎Results
• curprev 12:3512:35, 21 October 2013‎ Mdyma talk contribs‎ 4,912 bytes −1‎ →‎Results
• curprev 12:3412:34, 21 October 2013‎ Mdyma talk contribs‎ 4,913 bytes +11‎ No edit summary
• curprev 11:3211:32, 21 October 2013‎ Pevo talk contribs‎ 4,902 bytes +153‎ No edit summary

• curprev 11:0711:07, 21 October 2013‎ Pevo talk contribs‎ 4,749 bytes +100‎ No edit summary