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The A-line field
Definition of the measures used in the table below
The A-line fields have trenches of different widths across the entire 1 cm height of the field. The pitch of the trenches is matched to the exposed area of each mask. The list of trench widths in each field is the same on all masks (due to the high exposed area the widths 2 and 3 µm are missing on the travka 65 mask, on the 80 mask the lines 2, 3, 4 and 6 are missing).
The A-line fields are located along a cleavage line on the wafer with T-ridge fields. Cleaving across these two types of fields provide the possibility of inspecting trench depths and widths as a function of exposed area.
Travka 05 A-line field
Travka 05: A-line 2 µm to 25 µm fields
Trench width (µm)
|
Ridge width (µm)
|
Period width (µm)
|
Total periods
|
Width of array (µm)
|
2 |
38 |
40 |
2 |
80
|
3 |
57 |
60 |
3 |
180
|
4 |
76 |
80 |
2 |
160
|
6 |
114 |
120 |
1 |
120
|
8 |
152 |
160 |
1 |
160
|
10 |
190 |
200 |
1 |
200
|
15 |
285 |
300 |
1 |
300
|
25 |
475 |
500 |
1 |
500
|
|
Travka 05: A-line 40 µm to 300 µm fields
Trench width (µm)
|
Ridge width (µm)
|
Period width (µm)
|
Total periods
|
Width of array (µm)
|
40 |
760 |
800 |
1 |
800
|
50 |
950 |
1000 |
1 |
1000
|
75 |
1425 |
1500 |
1 |
1500
|
100 |
1900 |
2000 |
1 |
2000
|
150 |
2850 |
3000 |
1 |
3000
|
200 |
3800 |
4000 |
1 |
4000
|
300 |
5700 |
6000 |
1 |
6000
|
|
Travka 10 A-line field
Travka 10: A-line 2 µm to 25 µm fields
Trench width (µm)
|
Ridge width (µm)
|
Period width (µm)
|
Total periods
|
Width of array (µm)
|
2 |
18 |
20 |
25 |
500
|
3 |
27 |
30 |
30 |
900
|
4 |
36 |
40 |
30 |
1200
|
6 |
54 |
60 |
10 |
600
|
8 |
72 |
80 |
10 |
800
|
10 |
90 |
100 |
10 |
1000
|
15 |
135 |
150 |
5 |
750
|
25 |
225 |
250 |
5 |
1250
|
|
Travka 10: A-line 40 µm to 300 µm fields
Trench width (µm)
|
Ridge width (µm)
|
Period width (µm)
|
Total periods
|
Width of array (µm)
|
40 |
360 |
400 |
5 |
2000
|
50 |
450 |
500 |
2 |
1000
|
75 |
675 |
750 |
2 |
1500
|
100 |
900 |
1000 |
2 |
2000
|
150 |
1350 |
1500 |
1 |
1500
|
200 |
1800 |
2000 |
1 |
2000
|
300 |
2700 |
3000 |
1 |
3000
|
|
Travka 20 A-line field
Travka 20: A-line 2 µm to 25 µm fields
Trench width (µm)
|
Ridge width (µm)
|
Period width (µm)
|
Total periods
|
Width of array (µm)
|
2 |
8 |
10 |
50 |
500
|
3 |
12 |
15 |
60 |
900
|
4 |
16 |
20 |
60 |
1200
|
6 |
24 |
30 |
20 |
600
|
8 |
32 |
40 |
20 |
800
|
10 |
40 |
50 |
20 |
1000
|
15 |
60 |
75 |
10 |
750
|
25 |
100 |
125 |
10 |
1250
|
|
Travka 20: A-line 40 µm to 300 µm fields
Trench width (µm)
|
Ridge width (µm)
|
Period width (µm)
|
Total periods
|
Width of array (µm)
|
40 |
160 |
200 |
10 |
2000
|
50 |
200 |
250 |
4 |
1000
|
75 |
300 |
375 |
4 |
1500
|
100 |
400 |
500 |
4 |
2000
|
150 |
600 |
750 |
2 |
1500
|
200 |
800 |
1000 |
2 |
2000
|
300 |
1200 |
1500 |
2 |
3000
|
|
Travka 35 A-line field
Travka 35: A-line 2 µm to 25 µm fields
Trench width (µm)
|
Ridge width (µm)
|
Period width (µm)
|
Total periods
|
Width of array (µm)
|
2 |
3,7 |
5,7 |
80 |
457,1
|
3 |
5,6 |
8,6 |
80 |
685,7
|
4 |
7,4 |
11,4 |
61 |
697,1
|
6 |
11,1 |
17,1 |
51 |
874,3
|
8 |
14,9 |
22,9 |
50 |
1142,9
|
10 |
18,6 |
28,6 |
50 |
1428,6
|
15 |
27,9 |
42,9 |
20 |
857,1
|
25 |
46,4 |
71,4 |
20 |
1428,6
|
|
Travka 35: A-line 40 µm to 300 µm fields
Trench width (µm)
|
Ridge width (µm)
|
Period width (µm)
|
Total periods
|
Width of array (µm)
|
40 |
74,3 |
114,3 |
20 |
2285,7
|
50 |
92,9 |
142,9 |
10 |
1428,6
|
75 |
139,3 |
214,3 |
10 |
2142,9
|
100 |
185,7 |
285,7 |
10 |
2857,1
|
150 |
278,6 |
428,6 |
2 |
857,1
|
200 |
371,4 |
571,4 |
2 |
1142,9
|
300 |
557,1 |
857,1 |
2 |
1714,3
|
|
Travka 50 A-line field
Travka 50: A-line 2 µm to 25 µm fields
Trench width (µm)
|
Ridge width (µm)
|
Period width (µm)
|
Total periods
|
Width of array (µm)
|
2 |
2 |
4 |
145 |
580
|
3 |
3 |
6 |
150 |
900
|
4 |
4 |
8 |
140 |
1120
|
6 |
6 |
12 |
50 |
600
|
8 |
8 |
16 |
50 |
800
|
10 |
10 |
20 |
50 |
1000
|
15 |
15 |
30 |
25 |
750
|
25 |
25 |
50 |
25 |
1250
|
|
Travka 50: A-line 40 µm to 300 µm fields
Trench width (µm)
|
Ridge width (µm)
|
Period width (µm)
|
Total periods
|
Width of array (µm)
|
40 |
40 |
80 |
25 |
2000
|
50 |
50 |
100 |
10 |
1000
|
75 |
75 |
150 |
10 |
1500
|
100 |
100 |
200 |
10 |
2000
|
150 |
150 |
300 |
5 |
1500
|
200 |
200 |
400 |
5 |
2000
|
300 |
300 |
600 |
5 |
3000
|
|
Travka 65 A-line field
Travka 65: A-line 2 µm to 25 µm fields
Trench width (µm)
|
Ridge width (µm)
|
Period width (µm)
|
Total periods
|
Width of array (µm)
|
2 |
1,1 |
3,1 |
0 |
0
|
3 |
1,6 |
4,6 |
0 |
0
|
4 |
2,2 |
6,2 |
144 |
892,8
|
6 |
3,2 |
9,2 |
120 |
1104
|
8 |
4,3 |
12,3 |
100 |
1230
|
10 |
5,4 |
15,4 |
100 |
1540
|
15 |
8,1 |
23,1 |
25 |
577,5
|
25 |
13,5 |
38,5 |
25 |
962,5
|
|
Travka 65: A-line 40 µm to 300 µm fields
Trench width (µm)
|
Ridge width (µm)
|
Period width (µm)
|
Total periods
|
Width of array (µm)
|
40 |
21,5 |
61,5 |
25 |
1537,5
|
50 |
26,9 |
76,9 |
12 |
922,8
|
75 |
40,4 |
115,4 |
12 |
1384,8
|
100 |
53,8 |
153,8 |
12 |
1845,6
|
150 |
80,8 |
230,8 |
8 |
1846,4
|
200 |
107,7 |
307,7 |
8 |
2461,6
|
300 |
161,5 |
461,5 |
8 |
3692
|
|
Travka 80 A-line field
Travka 80: A-line 2 µm to 25 µm fields
Trench width (µm)
|
Ridge width (µm)
|
Period width (µm)
|
Total periods
|
Width of array (µm)
|
2 |
0,5 |
2,5 |
0 |
0
|
3 |
0,8 |
3,8 |
0 |
0
|
4 |
1,0 |
5 |
0 |
0
|
6 |
1,5 |
7,5 |
0 |
0
|
8 |
2,0 |
10 |
96 |
960
|
10 |
2,5 |
12,5 |
90 |
1125
|
15 |
3,8 |
18,8 |
80 |
1504
|
25 |
6,3 |
31,3 |
50 |
1565
|
|
Travka 80: A-line 40 µm to 300 µm fields
Trench width (µm)
|
Ridge width (µm)
|
Period width (µm)
|
Total periods
|
Width of array (µm)
|
40 |
10,0 |
50 |
50 |
2500
|
50 |
12,5 |
62,5 |
15 |
937,5
|
75 |
18,8 |
93,8 |
15 |
1407
|
100 |
25,0 |
125 |
15 |
1875
|
150 |
37,5 |
187,5 |
10 |
1875
|
200 |
50,0 |
250 |
10 |
2500
|
300 |
75,0 |
375 |
10 |
3750
|
|