Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation/Pathlist

Path list

This is the full path list as available on the JEOL 9500 system. Please contact the EBL staff if you need a custom path defined on the tool.

Users are NOT allowed to change the path definition file on the system.

INITIAL signifies subprograms carried out prior to pattern writing. CYCLIC determines subprograms carried out at the set interval during pattern writing. The first cycle is carried out right after INITIAL and hence before pattern writing. CYCLE defines the time between cyclic calibration, unit is minutes. The is two different behaviours toggled with the field F switch. Without the F switch cyclic calibration is only performed after pattern writing of the current chip is completed. If the pattern is a full wafer, i.e. defined as a (1,1) array in the JDF, no cyclic calibration will be done during pattern writing. With the F switch cyclic calibration will start at the end of the current writing field after the designated interval has passed.

;;*** Mask Exposure Peformance Test ***
 MASK00: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE 
        CYCLIC  CURRNT,DRIFT
        CYCLE   5M

 MASK01: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE 
        CYCLIC  CURRNT,DRIFT
        CYCLE   5M

;;*** Direct Exposure Peformance Test ***
 DIRE00: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT
        CYCLE   5M

 DIRE01: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT
        CYCLE   5M

;;*** Minimum Line Exposure Peformance Test ***
 MINI01: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT,DRIFT
        CYCLE   5M

;;*** Test Exposure ***
 TEST00: INITIAL HEIMAP
 TEST01: INITIAL CURRNT
 TEST02: INITIAL HEIMAP,CURRNT
 TEST03: INITIAL CURRNT,INITBE
 TEST04: INITIAL HEIMAP,CURRNT,INITBE
 TEST05: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
 TEST06: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE
 TEST07: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
 TEST08:	INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE

 TEST09: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT,DRIFT
        CYCLE   1

 TEST10: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT,DRIFT
        CYCLE   1

 TEST11: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
        CYCLIC  CURRNT,DRIFT
        CYCLE   5M, F

 TEST12: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
        CYCLIC  CURRNT,DRIFT
        CYCLE   5M, F

 TEST13:	INITIAL INITAE,INITBE,CURRNT,PDEFBE
	CYCLIC	DRIFT
	CYCLE	1M, F

 TEST14: INITIAL CURRNT
        CYCLIC  DRIFT
        CYCLE   99

 DRIFT0:	INITIAL INITAE, INITBE
	CYCLIC  INITAE, INITBE, DRIFT, CURRNT
	CYCLE   1

 DRIFT1:	INITIAL INITAE, INITBE
	CYCLIC  INITAE, INITBE, DRIFT, CURRNT
	CYCLE   1M,F

 LONG01: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
        CYCLIC  CURRNT,DRIFT
        CYCLE   5M   
         
 LONG02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT,DRIFT,INITBE,PDEFBE,SUBDEFBE
        CYCLE   5M

 MINI02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT,INITBE
        CYCLE   20M

 HEIGH1: INITIAL HEIMAP,CURRNT
        CYCLIC  CURRNT,DRIFT
        CYCLE   10M

 MASK02:	INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
	CYCLIC  DRIFT,CURRNT
	CYCLE   4

 MASK03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT,DRIFT
        CYCLE   5M

 MASK04: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT,DRIFT
        CYCLE   5M

 MASK05: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
        CYCLIC  CURRNT,DRIFT
        CYCLE   5M

 MASK06: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
        CYCLIC  INITBE,PDEFBE,SUBDEFBE,CURRNT,DRIFT
        CYCLE   5M

 AUTO00:	INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE

 DIRE02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE   
  
 DIRE03: INITIAL CURRNT,INITBE
        CYCLIC  CURRNT,DRIFT
        CYCLE   20M  
    
 DIRE04: INITIAL CURRNT,INITBE,PDEFBE
        CYCLIC  CURRNT
        CYCLE   20M

 DIRE05: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT
        CYCLE   20M  
      
 DIRE06: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
        CYCLIC  CURRNT
        CYCLE   20M

 DIRE07: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT
        CYCLE   20M

 DRFT01: INITIAL CURRNT
        CYCLIC  DRIFT
        CYCLE   1

 SBG01: 	INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE

 SBG02: 	INITIAL HEIMAP

 SBG03: 	INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT,DRIFT
        CYCLE   5M

 SBG04: 	INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT,DRIFT
        CYCLE   5M

 SBG05: 	INITIAL CURRNT
        CYCLIC  CURRNT,DRIFT
        CYCLE   5M

 SBG06: 	INITIAL HEIMAP
        CYCLIC  CURRNT,DRIFT
        CYCLE   5M

 SBG07: 	INITIAL CURRNT
        CYCLIC  CURRNT,DRIFT
        CYCLE   34

 TOK01: 	INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT,DRIFT
        CYCLE   20M

 G5MHA: 	INITIAL HEIMAP
        CYCLIC  CURRNT,DRIFT
        CYCLE   5M

 G5MHB: 	INITIAL HEIMAP
        CYCLIC  DRIFT
        CYCLE   5M

 G5MA: 	INITIAL CURRNT
	CYCLIC  CURRNT,DRIFT
        CYCLE   5M

 G5MB: 	INITIAL CURRNT
	CYCLIC  DRIFT
        CYCLE   5M

 G34HA: 	INITIAL HEIMAP
        CYCLIC  CURRNT,DRIFT
        CYCLE   34

 G34HB: 	INITIAL HEIMAP
        CYCLIC  DRIFT
        CYCLE   34

 G34A: 	INITIAL CURRNT
	CYCLIC  CURRNT,DRIFT
        CYCLE   34

 G34B: 	INITIAL CURRNT
	CYCLIC  DRIFT
        CYCLE   34

 G1HA: 	INITIAL HEIMAP
        CYCLIC  CURRNT,DRIFT
        CYCLE   1

 G1HB: 	INITIAL HEIMAP
        CYCLIC  DRIFT
        CYCLE   1

 G1A: 	INITIAL CURRNT
	CYCLIC  CURRNT,DRIFT
        CYCLE   1

 G1B: 	INITIAL CURRNT
	CYCLIC  DRIFT
        CYCLE   1

 HEICU: 	INITIAL HEIMAP,CURRNT

 HCD: 	INITIAL HEIMAP
	CYCLIC  CURRNT,DRIFT
	CYCLE   30M

 CD: 	INITIAL CURRNT
	CYCLIC  DRIFT
	CYCLE   30M

 FT01: 	INITIAL CURRNT
	CYCLIC  CURRNT,DRIFT
	CYCLE   5M,F

 LONG03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
        CYCLIC  CURRNT,DRIFT,INITBE,PDEFBE,SUBDEFBE
        CYCLE   5M,F

 HEI: INITIAL HEIMAP
        CYCLIC  CURRNT
        CYCLE   10M

 DRF5M: 	INITIAL CURRNT,HEIMAP
 CYCLIC  CURRNT,DRIFT
 CYCLE   5M,F

 DTU5M:  INITIAL  HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE
 	CYCLIC  CURRNT,DRIFT
        CYCLE   5M,F

 CUR:    INITIAL CURRNT	
        CYCLIC  CURRNT
        CYCLE   30M