Specific Process Knowledge/Etch/Etching of Silicon
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Comparing silicon etch methods
There are a broad variety of silicon etch methods at DTU Nanolab The methods are compared here to make it easier for you to compare and choose the one that suits your needs.
Wet etches:
Dry etches:
- Si etch using ASE (Advanced Silicon Etch)
- Si etch using DRIE-Pegasus (Silicon Etch)
- Si etch using IBE/IBSD Ionfab 300
Compare the methods for Si etching
Si Etch | Wet PolySilicon etch | DRIE-Pegasus (Deep Reactive Ion Etch) | ASE (Advanced Silicon Etch) | ICP Metal Etch | IBE/IBSD Ionfab 300 | |
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Generel description |
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Possible masking materials |
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Etch rate range |
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Substrate size |
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Allowed materials |
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