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Etch processes designed for stepper resists
The stepper produces features down to 200 nm. Here, etch processes especially designed for stepper patterns and resists are described. We intend to develop them continuously so keep an eye on this page. The best ones so far are:
Process parameters
| Recipe
|
Step
|
Temp.
|
Deposition step
|
Etch step
|
Process
|
| Time
|
Pressure
|
C4F8
|
SF6
|
O2
|
Coil
|
Time
|
Pressure
|
C4F8
|
SF6
|
O2
|
Coil
|
Platen
|
HW
|
Runs
|
Keywords
|
| B
|
M
|
B
|
M
|
B
|
M
|
B
|
M
|
B
|
M
|
B
|
M
|
B
|
M
|
| NBoost04
|
A
|
20
|
2.8
|
5
|
60
|
0
|
0
|
500
|
1.5
|
3.5
|
30%
|
5
|
0
|
20
|
100
|
100
|
0
|
0
|
500
|
500
|
50
|
10
|
LF+B100
|
2
|
VERY nice: scallops, straight sidewalls
|
Process parameters
| Recipe
|
Step
|
Temp.
|
Deposition step
|
Etch step
|
Process observations
|
| Time
|
Pressure
|
C4F8
|
SF6
|
O2
|
Coil
|
Time
|
Pressure
|
C4F8
|
SF6
|
O2
|
Coil
|
Platen
|
HW
|
Runs
|
Key words
|
| polySOI-10
|
etch
|
20
|
2.5
|
10
|
50
|
0
|
0
|
600
|
5
|
10
|
20
|
60
|
5
|
400
|
40
|
-
|
5
|
very nice, blurred scallops
|
| polySOI-10a
|
etch
|
20
|
2.5
|
10
|
50
|
0
|
0
|
600
|
5
|
10
|
10
|
70
|
5
|
400
|
40
|
-
|
200+
|
Works only with limited open area - probably less than 20 %, very stable, excellent and extensive track record
|
With units
Process parameters
| Recipe
|
Step
|
Temp.
|
Deposition step
|
Etch step
|
Process
|
| Time
|
Pressure
|
C4F8
|
SF6
|
O2
|
Coil
|
Time
|
Pressure
|
C4F8
|
SF6
|
O2
|
Coil
|
Platen
|
HW
|
Runs
|
Keywords
|
| B
|
M
|
B
|
M
|
B
|
M
|
B
|
M
|
B
|
M
|
B
|
M
|
B
|
M
|
| degs
|
s
|
mt
|
sccm
|
sccm
|
sccm
|
W
|
s
|
s
|
%
|
mt
|
sccm
|
sccm
|
sccm
|
sccm
|
sccm
|
sccm
|
W
|
W
|
W
|
W
|
| NBoost04
|
A
|
20
|
2.8
|
5
|
60
|
0
|
0
|
500
|
1.5
|
3.5
|
30%
|
5
|
0
|
20
|
100
|
100
|
0
|
0
|
500
|
500
|
50
|
10
|
LF+B100
|
2
|
VERY nice: scallops, straight sidewalls
|
Process parameters
| Recipe
|
Step
|
Temp.
|
Deposition step
|
Etch step
|
Process observations
|
| Time
|
Pressure
|
C4F8
|
SF6
|
O2
|
Coil
|
Time
|
Pressure
|
C4F8
|
SF6
|
O2
|
Coil
|
Platen
|
HW
|
Runs
|
Key words
|
| degs
|
s
|
mt
|
sccm
|
sccm
|
sccm
|
W
|
s
|
mt
|
sccm
|
sccm
|
sccm
|
W
|
W
|
| polySOI-10
|
etch
|
20
|
2.5
|
10
|
50
|
0
|
0
|
600
|
5
|
10
|
20
|
60
|
5
|
400
|
40
|
-
|
5
|
very nice, blurred scallops
|
| polySOI-10a
|
etch
|
20
|
2.5
|
10
|
50
|
0
|
0
|
600
|
5
|
10
|
10
|
70
|
5
|
400
|
40
|
-
|
200+
|
Works only with limited open area - probably less than 20 %, very stable, excellent and extensive track record
|