Specific Process Knowledge/Etch/DRIE-Pegasus/DREM
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The DREM processes
DREM 2kW micro
| Recipe | General | Pressure | Gases | Generators | Matching | Tem- pera- ture | Results | |||||||||||||||||||||||||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| C4F8 | SF6 | O2 | Ar | Coil | Platen | Coil | Platen | |||||||||||||||||||||||||||||||||||||||
| Platen | Stb | S/E | Dp | Et | Cyc | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Runs | Keywords | |||||||||||||||||||||
| U/D | H/L | D | B | M | D | B | M | D | B | M | D | B | M | D | B | M | D | B | M | D | B | M | L | T | L | T | L | T | L | T | ||||||||||||||||
| DREM 2kW micro | Pump to base, Clamp Substrate, home platen matching unit, stabilisation | 8 | ||||||||||||||||||||||||||||||||||||||||||||
| U | HF | D/E | 1.2 | 3 | 100% | 100% | 0.3@5 | 0.5@50 | 200 | 0.5@100 | 5 | 0.3@200 | 0.5@200 | 15 | 2@15 | 0.3@100 | 200 | 150 | 150 | 2 | 2 | 1 | 1@1 | 1@100 | 1 | 40 | 50 | 40 | 50 | 32.5 | 51.9 | 32.5 | 51.9 | 0 | ||||||||||||
| DREM 2kW micro | Pump to base, Clamp Substrate, home platen matching unit, stabilisation | 1 | ||||||||||||||||||||||||||||||||||||||||||||
| U | HF | D/E | 1.2 | 3 | 100% | 100% | 0.3@5 | 0.5@50 | 200 | 0.5@100 | 5 | 0.3@200 | 0.5@200 | 15 | 2@15 | 0.3@100 | 200 | 150 | 150 | 2 | 2 | 1 | 1@1 | 1@100 | 1 | 40 | 50 | 40 | 50 | 32.5 | 51.9 | 32.5 | 51.9 | -19 | ||||||||||||