Specific Process Knowledge/Back-end processing/FlipScribe

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Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.

The Cleaver: FlipScribe

The Cleaver: FlipScribe is a scriber designed for cleaving/scribing wafers into smaller pieces without leaving any particles on the frontside of the sample. It works be scribing from the backside. The equipment is placed in the left drawer underneath fumehood 5: Special purposes. When operated the the Cleaver: Flip Scribe should always be placed inside Fume hood 5.

Flipscribe.JPG

Approved Materials:

  • Si
  • Quartz
  • Pyrex (Borofloat 33)
  • GaAs
  • InP
  • Sapphire

The Flip Scribe can cleave samples from 100mm down to ~10mm, please contact wetchemistry group for more information.

DTU-Nanolab has 3 different types of Cleavers see the Labadviser pages for the FlexScribe and the LatticeAxe for more information.

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