Recent changes
Jump to navigation
Jump to search
Track the most recent changes to the wiki on this page.
List of abbreviations:
- N
- This edit created a new page (also see list of new pages)
- m
- This is a minor edit
- b
- This edit was performed by a bot
- (±123)
- The page size changed by this number of bytes
31 May 2024
|
13:14 | Template:Author-jmli1 2 changes history −1 [Jmli (2×)] | |||
|
13:14 (cur | prev) −11 Jmli talk contribs | ||||
|
13:13 (cur | prev) +10 Jmli talk contribs |
|
11:49 | Specific Process Knowledge/Lithography/EBeamLithography/EBLsubstratePrep 4 changes history −203 [Thope (4×)] | |||
|
11:49 (cur | prev) −316 Thope talk contribs (→DTU Nanolab supplied EBL resists) | ||||
|
11:48 (cur | prev) +32 Thope talk contribs (→DTU Nanolab supplied EBL resists) | ||||
|
11:47 (cur | prev) +11 Thope talk contribs (→DTU Nanolab supplied EBL resists) | ||||
|
11:46 (cur | prev) +70 Thope talk contribs (→DTU Nanolab supplied EBL resists) |
N 11:45 | Specific Process Knowledge/Lithography/EBeamLithography/ma-N 2400 diffhist +680 Thope talk contribs (Created page with "=Spin coating= ma-N 2400 can be spin coated on LabSpin 2 and 3 using the CSAR/PMMA bowlset. A spin curve for ma-N 2400.05 is provided below. Process parameters are: *Date: May 31st 2024 *Coater: LabSpin 2 *Substrate: 2" Si *Acceleration: 1000 RPM/s *Time: 60 s *Baking temperature: 90C (setpoint at 100C) *Baking time: 60 s {| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" |- | 800px |- | colspan="1" style="t...") |
11:42 | Upload log Thope talk contribs uploaded File:MaN2400spincurve.png (File uploaded with MsUpload) |
10:48 | Specific Process Knowledge/Etch/Etching of Aluminium diffhist −1 Taran talk contribs (→Comparison of Aluminium Etch Methods) |