Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/Spot size and optics

Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.

Spot sizes and optics

Wavelength [nm]	Objective [mm]	Scanfield [mm2]	Telescope Magnification	Rayleigh- length [mm]	Theoretical min Spotdiameter (1/e2) [um]	Working distance [mm]
TB 355	103	45 x 45	3X	0,972	21	135
TB 355	103	45 x 45	6X	0,25	10,5	135
TB 355	255	145 x 145	3X	5,96	51,9	313
TB 355	255	145 x 145	6X	1,49	26	313
TB 532	100	54 x 54	3X	0,823	23	126
TB 532	100	54 x 54	4X	0,46	18	126
TB 532	255	165 x 165	3X	5,35	60,2	293
TB 532	255	165 x 165	4X	3,01	45,2	293
TB 1064	100	54 x 54	3X	0,76	32,2	126
TB 1064	100	54 x 54	6X	0,29	19,8	126
TB 1064	255	165 x 165	3X	4,97	82	292
TB 1064	255	165 x 165	6X	1,87	50,4	292
IPG 1064	100	54 x54	1X	0,61	29	126
IPG 1064	255	165 x 165	1X	3,99	73,5	292

Bold lines are the current optics mounted.