Specific Process Knowledge/Lithography/EBeamLithography/EBLsubstratePrep: Revision history

5 February 2024

• curprev 14:0414:04, 5 February 2024‎ Thope talk contribs‎ 11,442 bytes +7‎ →‎DTU Nanolab supplied EBL resists
• curprev 14:0314:03, 5 February 2024‎ Thope talk contribs‎ 11,435 bytes +1‎ →‎DTU Nanolab supplied EBL resists
• curprev 14:0314:03, 5 February 2024‎ Thope talk contribs‎ 11,434 bytes −52‎ →‎DTU Nanolab supplied EBL resists
• curprev 14:0214:02, 5 February 2024‎ Thope talk contribs‎ 11,486 bytes −2‎ →‎DTU Nanolab supplied EBL resists
• curprev 13:5713:57, 5 February 2024‎ Thope talk contribs‎ 11,488 bytes +4‎ →‎DTU Nanolab supplied EBL resists
• curprev 13:5713:57, 5 February 2024‎ Thope talk contribs‎ 11,484 bytes −1‎ →‎DTU Nanolab supplied EBL resists
• curprev 13:5713:57, 5 February 2024‎ Thope talk contribs‎ 11,485 bytes −37‎ →‎DTU Nanolab supplied EBL resists
• curprev 13:4213:42, 5 February 2024‎ Thope talk contribs‎ 11,522 bytes −1‎ →‎User supplied resists
• curprev 13:4113:41, 5 February 2024‎ Thope talk contribs‎ 11,523 bytes −75‎ →‎DTU Nanolab supplied EBL resists
• curprev 13:4113:41, 5 February 2024‎ Thope talk contribs‎ 11,598 bytes +1‎ →‎DTU Nanolab supplied EBL resists
• curprev 13:4013:40, 5 February 2024‎ Thope talk contribs‎ 11,597 bytes −496‎ →‎DTU Nanolab supplied EBL resists
• curprev 13:4013:40, 5 February 2024‎ Thope talk contribs‎ 12,093 bytes +76‎ →‎User supplied resists
• curprev 13:3913:39, 5 February 2024‎ Thope talk contribs‎ 12,017 bytes +421‎ →‎DTU Nanolab supplied EBL resists
• curprev 13:3413:34, 5 February 2024‎ Thope talk contribs‎ 11,596 bytes +2‎ →‎DTU Nanolab supplied EBL resists
• curprev 13:3313:33, 5 February 2024‎ Thope talk contribs‎ 11,594 bytes −2‎ →‎Discharge layer application
• curprev 13:3313:33, 5 February 2024‎ Thope talk contribs‎ 11,596 bytes −2‎ →‎Discharge layer application
• curprev 13:3313:33, 5 February 2024‎ Thope talk contribs‎ 11,598 bytes −2‎ →‎Current EBL resist stock
• curprev 13:3313:33, 5 February 2024‎ Thope talk contribs‎ 11,600 bytes +63‎ No edit summary

26 September 2023

• curprev 20:0620:06, 26 September 2023‎ Thope talk contribs‎ 11,537 bytes −382‎ →‎Discharge layer application

5 September 2023

• curprev 08:4808:48, 5 September 2023‎ Thope talk contribs‎ 11,919 bytes +79‎ →‎Current EBL resist stock

4 September 2023

• curprev 12:5312:53, 4 September 2023‎ Thope talk contribs‎ 11,840 bytes 0‎ →‎Current EBL resist stock
• curprev 12:5212:52, 4 September 2023‎ Thope talk contribs‎ 11,840 bytes +2‎ →‎Current EBL resist stock
• curprev 12:4012:40, 4 September 2023‎ Thope talk contribs‎ 11,838 bytes +20‎ →‎Current EBL resist stock
• curprev 12:3912:39, 4 September 2023‎ Thope talk contribs‎ 11,818 bytes +106‎ →‎Current EBL resist stock
• curprev 12:3712:37, 4 September 2023‎ Thope talk contribs‎ 11,712 bytes 0‎ →‎Current EBL resist stock
• curprev 12:3712:37, 4 September 2023‎ Thope talk contribs‎ 11,712 bytes +169‎ →‎Current EBL resist stock
• curprev 12:3512:35, 4 September 2023‎ Thope talk contribs‎ 11,543 bytes −85‎ →‎Current EBL resist stock
• curprev 12:3412:34, 4 September 2023‎ Thope talk contribs‎ 11,628 bytes −85‎ →‎Current EBL resist stock
• curprev 12:3412:34, 4 September 2023‎ Thope talk contribs‎ 11,713 bytes +349‎ →‎Current EBL resist stock
• curprev 12:3212:32, 4 September 2023‎ Thope talk contribs‎ 11,364 bytes +84‎ →‎Current EBL resist stock
• curprev 12:2812:28, 4 September 2023‎ Thope talk contribs‎ 11,280 bytes +85‎ →‎Current EBL resist stock
• curprev 12:2712:27, 4 September 2023‎ Thope talk contribs‎ 11,195 bytes +91‎ →‎Current EBL resist stock
• curprev 12:2612:26, 4 September 2023‎ Thope talk contribs‎ 11,104 bytes −1‎ →‎Current EBL resist stock
• curprev 12:2612:26, 4 September 2023‎ Thope talk contribs‎ 11,105 bytes −3‎ →‎Current EBL resist stock
• curprev 12:2512:25, 4 September 2023‎ Thope talk contribs‎ 11,108 bytes +5‎ →‎Current EBL resist stock
• curprev 12:2412:24, 4 September 2023‎ Thope talk contribs‎ 11,103 bytes +1‎ →‎Resist coating
• curprev 12:2312:23, 4 September 2023‎ Thope talk contribs‎ 11,102 bytes −7‎ →‎Current EBL resist stock
• curprev 12:2312:23, 4 September 2023‎ Thope talk contribs‎ 11,109 bytes +45‎ →‎Resist coating
• curprev 12:2212:22, 4 September 2023‎ Thope talk contribs‎ 11,064 bytes +35‎ →‎Current EBL resist stock
• curprev 12:2112:21, 4 September 2023‎ Thope talk contribs‎ 11,029 bytes 0‎ →‎Current EBL resist stock
• curprev 12:2112:21, 4 September 2023‎ Thope talk contribs‎ 11,029 bytes +5‎ →‎Current EBL resist stock
• curprev 12:2012:20, 4 September 2023‎ Thope talk contribs‎ 11,024 bytes −1,652‎ →‎Resist coating
• curprev 12:1712:17, 4 September 2023‎ Thope talk contribs‎ 12,676 bytes +2,128‎ →‎Resist coating

15 August 2023

• curprev 12:4212:42, 15 August 2023‎ Thope talk contribs‎ 10,548 bytes −4‎ No edit summary
• curprev 12:3812:38, 15 August 2023‎ Thope talk contribs‎ 10,552 bytes −174‎ →‎Inspection
• curprev 12:3712:37, 15 August 2023‎ Thope talk contribs‎ 10,726 bytes +317‎ No edit summary

17 April 2023

• curprev 16:2816:28, 17 April 2023‎ Thope talk contribs‎ 10,409 bytes +1‎ →‎Resist coating
• curprev 16:2716:27, 17 April 2023‎ Thope talk contribs‎ 10,408 bytes −239‎ →‎Resist coating
• curprev 16:2716:27, 17 April 2023‎ Thope talk contribs‎ 10,647 bytes +3‎ →‎Resist coating

8 April 2023

• curprev 14:1414:14, 8 April 2023‎ Thope talk contribs‎ 10,644 bytes +10,644‎ Created page with "=== Resist coating === An appropriate EBL resist must naturally be applied to the substrate. DTU Nanolab supplies a number of standard resists, please consult the table below. The default positive EBL resist is AR-P 6200.09 (CSAR). CSAR installed on Spin Coater: Gamma E-beam and UV for spin coating of 2", 4" and 6" substrates. For other substrate sizes (i.e. chips) or other resists Spec..."