DTU Nanolab offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom.
The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
| Lithography Tool Package Training
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| Schedule
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Theoretical part
- Lecture videos that can be viewed at one's leisure.
- A 1 hour "questions and exercises" session 2 times a month (typically Fridays 09:30-10:30).
- Sign up via Q&E session Doodle
Practical part
- A 3-4 hour training session 2 times a month, max. 4 persons per session (typically Wednesdays 09:00 - 12:30 or 10:00 - 13:30).
- Sign up via Training session Doodle
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| Location
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Theoretical part
- The location of the "questions and exercises" session is room 121A in building 345C.
Practical part
- The training session takes place inside the cleanroom. The meeting point will be in front of the first equipment.
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| Qualified Prerequisites
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- Cleanroom safety course at DTU Danchip
- Admission to the cleanroom must be obtained before the training session
- Theoretical part must be completed before the training session.
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| Preparations
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Before the "questions and exercises" session
Before training session
- Complete the theoretical part (Q&E)
- Watch the training videos of spin coating (automatic), exposure (operation + alignment), and development (automatic).
- Study the equipment manuals. The manuals are available in LabManager.
- Study the TPT process flows (first print + alignment).
Links to literature, lecture videos, training videos, equipment manuals, and process flows can be found in the section below.
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| Course Responsible
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The Lithography Group at DTU Danchip lithography@danchip.dtu.dk.
Sign up for the course using Doodle (links under schedule).
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| Learning Objectives
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- Describe fundamental parts of lithographic processing in a cleanroom, design of process flows
- Authorization to use spin coater, mask aligner, and developer at DTU Danchip
- Calculate relevant process parameters
- Analyze and apply your results of lithographic processing
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Material for preparations and further information
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Literature
Lecture videos
7 videos, 2:41 hours in total
Lecture slides
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Training videos
On YouTube:
On DTU Podcasts:
Manuals
Process Flows
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