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| ===Material for preparations and further information=== | | ===Extra material for preparations and further information=== |
| {| style="color: black;" width="90%" | | {| style="color: black;" width="90%" |
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| '''<big>Literature</big>''' | | '''<big>Extra literature</big>''' |
| *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch9/pdf Franssila, 2010, Chapter 9: Optical Lithography]
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| *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch10/pdf Franssila, 2010, Chapter 10: Advanced Lithography] | | *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch10/pdf Franssila, 2010, Chapter 10: Advanced Lithography] |
| *[http://www.microchemicals.com/support/troubleshooter.html Lithography Troubleshooter from MicroChemicals] | | *[http://www.microchemicals.com/support/troubleshooter.html Lithography Troubleshooter from MicroChemicals] |
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| '''<big>Lecture videos</big>''' | | '''<big>Lecture videos</big>''' |
| <br/>7 videos, 2:41 hours in total
| | *No extra videos |
| *[https://www.youtube.com/watch?v=hMgpRSOokxE&list=PLjWVU97LayHCHDueZ8qdT1LXJLGr4wLOa Playlist On YouTube]
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| <!--*[http://podcast.llab.dtu.dk/index.php?id=302 On DTU Podcasts]-->
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| '''<big>Lecture slides</big>''' | | '''<big>Lecture slides</big>''' |
| *[[:Media:Litho_Tool_Package_-_Introduction.pdf|TPT slides: Introduction]] | | *No extra slides |
| *[[:Media:Litho_Tool_Package_-_Spin_coating.pdf|TPT slides: Spin Coating]]
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| *[[:Media:Litho_Tool_Package_-_Exposure.pdf|TPT slides: UV Exposure]]
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| *[[:Media:Litho_Tool_Package_-_Development.pdf|TPT slides: Development]]
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| *[[:Media:Litho_Tool_Package_-_Post_processing.pdf|TPT slides: Post-processing]]
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| *[[:Media:Litho_Tool_Package_-_Process_effects_and_examples.pdf|TPT slides: Process Effects and Examples]]
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| '''<big>Training videos</big>'''
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| *[https://www.youtube.com/watch?v=3JhM3rmLVpA&list=PLjWVU97LayHCX4sz2AH_YiPbNRmkrBYe5 Lithography TPT training videos (Playlist)]
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| *[https://www.youtube.com/watch?v=3JhM3rmLVpA&list=PLjWVU97LayHAiCabstMfAUeeWyQoQI_cV Maskless aligner training videos (Playlist)]
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| *[https://www.youtube.com/watch?v=_neUkDsQhsM Spin Coater: Labspin (manual spin coater)]
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| *[https://www.youtube.com/watch?v=btinNzYnLnY Developer: TMAH Manual]
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| <!--
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| On DTU Podcasts:
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| *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.055_Spin_Coater_GAMMA_UV-720p.mp4 Training Video: Automatic Spin Coater]
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| *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part1_operation-720p.mp4 Training Video: UV Mask Aligner Part I (Operation)]
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| *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part2_aligning-720p.mp4 Training Video: UV Mask Aligner Part II (Alignment)]
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| *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.050_Developer_TMAH_UV-Lithography-720p.mp4 Training Video: Automatic Puddle Developer]
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| *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.049_Developer_Manual-720p.mp4 Training Video: Manual Puddle Developer]
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| -->
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| '''<big>Manuals</big>'''
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| *Automatic Spin Coater: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=359 Spin Coater: Gamma UV]
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| <!--*Manual Spin Coater: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=331 Spin Coater: Manual Standard Resists] -->
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| *UV Mask Aligner: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=339 Aligner: MA6 - 2]
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| *Maskless Aligner: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=440 Aligner: Maskless 02] or [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=464 Aligner: Maskless 03]
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| *Automatic Puddle Developer: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=329 Developer: TMAH UV-lithography]
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| <!--*Manual Puddle Developer: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=324 Developer: TMAH Manual] -->
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| '''<big>Process Flows</big>'''
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| *[[:Media:Process_Flow_TPT_first_print_v2.pdf|TPT first print process flow]]
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| *[[:Media:Process_Flow_TPT_alignment_v2.pdf|TPT alignment process flow]]
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Feedback to this page: click here
DTU Nanolab offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment. After the TPT has been successfully completed, you can begin training on the lithography equipment at DTU Nanolab.
You are required to pass this course, in order to get access to using the lithography equipment inside the DTU Nanolab fabrication facility (The Cleanroom).
| Lithography Tool Package Training
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| Signing up for the course
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The course is in DTU Learn. You sign up for the course by enroling yourself in the course "DTU Nanolab TPT: Lithography".
- Log into DTU Learn here: DTU Learn
- Select the menu "Discover"
- Search for "Nanolab"
Select the course "DTU Nanolab TPT: Lithography"
- Press "Enroll in Course"
- You have now signed up for the course.
- Go to the course page in DTU Learn and choose "Course Content" and "Content"
- Watch the lecture videos, read the learning material, and complete all the quizzes.
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| Learning Objectives
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Learn about the fundamentals of lithographic processing in a cleanroom:
- Coating
- Exposure
- Development
- Post-processing
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Extra material for preparations and further information
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Extra literature
Lecture videos
Lecture slides
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