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| '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Lithography click here]''' | | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Lithography click here]''' |
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| DTU Nanolab offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom. | | DTU Nanolab offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment. After the TPT has been successfully completed, you can begin training on the lithography equipment at DTU Nanolab. |
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| The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
| | You are required to pass this course, in order to get access to using the lithography equipment inside the DTU Nanolab fabrication facility (The Cleanroom). |
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| !Schedule | | !Signing up for the course |
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| <!--'''<span style="color: red;">OBS: The December Litho TPT has been cancelled due to sickness. Contact the Lithography Group for rescheduling if this poses a problem.</span>''' <span style="text-decoration: line-through;">'''NEXT LECTURE: Tuesday 29th of November 9:15 - 13:00 (B347, Seminar room)'''</span>-->
| | The course is in DTU Learn. You sign up for the course by enroling yourself in the course "DTU Nanolab TPT: Lithography". |
| '''Theoretical part'''
| | *Log into DTU Learn here: [https://learn.inside.dtu.dk DTU Learn] |
| * Lecture videos that can be viewed at one's leisure.
| | *Select the menu "Discover" |
| * A 1 hour "questions and exercises" session 2 times a month (typically Fridays 09:30-10:30). | | *Search for "Nanolab" |
| * '''Sign up via [https://doodle.com/poll/metywuzqziwps6w3 Q&E session Doodle]'''
| | Select the course "DTU Nanolab TPT: Lithography" |
| '''Practical part'''
| | *Press "Enroll in Course" |
| <!--* <span style="color: red;">OBS: Due to a major maintenance project inside the cleanroom (replacing the fan filter units, cf. https://sites.dtu.dk/ffunanolab#2), these training sessions have been suspended, at least until the end of October 2021. Please, request individual trainings using [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk]</span>-->
| | *You have now signed up for the course. |
| * A 3-4 hour training session 2 times a month, max. 4 persons per session (typically Wednesdays 09:00 - 12:30 or 10:00 - 13:30). | | *Go to the course page in DTU Learn and choose "Course Content" and "Content" |
| * '''Sign up via [https://doodle.com/poll/yd2q9tbzm86by2ct Training session Doodle]''' | | *Watch the lecture videos, read the learning material, and complete all the quizzes. |
| * This part is not mandatory, and may be replaced by individual trainings if relevant.
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| !Location
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| '''Theoretical part'''
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| * The location of the "questions and exercises" session is room 121A in building 345C.
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| '''Practical part'''
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| * The training session takes place inside the cleanroom. The meeting point will be in front of the first equipment.
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| !Qualified Prerequisites
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| * Cleanroom [http://www.nanolab.dtu.dk/english/education/courses/introduction-course Introduction course] at DTU Nanolab
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| * Admission to the cleanroom must be obtained before the training session | |
| * Theoretical part must be completed before the training session. | |
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| !Preparations
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| '''Before the "questions and exercises" session'''
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| * Read [http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch9/pdf Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography] (Available online from DTU campus).
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| * Watch the [https://www.youtube.com/watch?v=hMgpRSOokxE&list=PLjWVU97LayHCHDueZ8qdT1LXJLGr4wLOa lecture videos] (7 videos, 2:41 hours in total). Write down any questions that may arise during the videos. | |
| '''Before training session'''
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| * Complete the theoretical part (Q&E)
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| * Watch the [https://www.youtube.com/watch?v=3JhM3rmLVpA&list=PLjWVU97LayHCX4sz2AH_YiPbNRmkrBYe5 training videos] of spin coating (automatic), exposure (operation + alignment), and development (automatic).
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| * Study the equipment manuals. The manuals are available in [http://labmanager.danchip.dtu.dk LabManager].
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| * Study the [[LabAdviser/Courses/TPT_Lithography#Material_for_preparations_and_further_information|TPT process flows]] (first print + alignment).
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| '''Links to literature, lecture videos, training videos, equipment manuals, and process flows can be found in the section below.'''
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| !Course Responsible
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| The Lithography Group at DTU Nanolab [mailto:lithography@nanolab.dtu.dk lithography@nanolab.dtu.dk].
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| Sign up for the course using Doodle (links under schedule).
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| !Learning Objectives | | !Learning Objectives |
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| * Describe fundamental parts of lithographic processing in a cleanroom, design of process flows
| | Learn about the fundamentals of lithographic processing in a cleanroom: |
| * Authorization to use spin coater, mask aligner, and developer at DTU Nanolab | | * Coating |
| * Calculate relevant process parameters | | * Exposure |
| * Analyze and apply your results of lithographic processing | | * Development |
| | * Post-processing |
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Feedback to this page: click here
DTU Nanolab offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment. After the TPT has been successfully completed, you can begin training on the lithography equipment at DTU Nanolab.
You are required to pass this course, in order to get access to using the lithography equipment inside the DTU Nanolab fabrication facility (The Cleanroom).
| Lithography Tool Package Training
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| Signing up for the course
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The course is in DTU Learn. You sign up for the course by enroling yourself in the course "DTU Nanolab TPT: Lithography".
- Log into DTU Learn here: DTU Learn
- Select the menu "Discover"
- Search for "Nanolab"
Select the course "DTU Nanolab TPT: Lithography"
- Press "Enroll in Course"
- You have now signed up for the course.
- Go to the course page in DTU Learn and choose "Course Content" and "Content"
- Watch the lecture videos, read the learning material, and complete all the quizzes.
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| Learning Objectives
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Learn about the fundamentals of lithographic processing in a cleanroom:
- Coating
- Exposure
- Development
- Post-processing
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Material for preparations and further information
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Literature
Lecture videos
7 videos, 2:41 hours in total
Lecture slides
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Training videos
Manuals
Process Flows
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