LabAdviser/Courses/TPT Lithography

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DTU Nanolab offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom.

The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.

Lithography Tool Package Training
Schedule	Theoretical part Lecture videos that can be viewed at one's leisure. A 1 hour "questions and exercises" session 2 times a month (typically Fridays 09:30-10:30). Sign up via Q&E session Doodle Practical part A 3-4 hour training session 2 times a month, max. 4 persons per session (typically Wednesdays 09:00 - 12:30 or 10:00 - 13:30). Sign up via Training session Doodle
Location	Theoretical part The location of the "questions and exercises" session is room 121A in building 345C. Practical part The training session takes place inside the cleanroom. The meeting point will be in front of the first equipment.
Qualified Prerequisites	Cleanroom Introduction course at DTU Nanolab Admission to the cleanroom must be obtained before the training session Theoretical part must be completed before the training session.
Preparations	Before the "questions and exercises" session Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography (Available online from DTU campus). Watch the lecture videos (7 videos, 2:41 hours in total). Write down any questions that may arise during the videos. Before training session Complete the theoretical part (Q&E) Watch the training videos of spin coating (automatic), exposure (operation + alignment), and development (automatic). Study the equipment manuals. The manuals are available in LabManager. Study the TPT process flows (first print + alignment). Links to literature, lecture videos, training videos, equipment manuals, and process flows can be found in the section below.
Course Responsible	The Lithography Group at DTU Nanolab lithography@nanolab.dtu.dk. Sign up for the course using Doodle (links under schedule).
Learning Objectives	Describe fundamental parts of lithographic processing in a cleanroom, design of process flows Authorization to use spin coater, mask aligner, and developer at DTU Nanolab Calculate relevant process parameters Analyze and apply your results of lithographic processing

Material for preparations and further information

Literature Franssila, 2010, Chapter 9: Optical Lithography Franssila, 2010, Chapter 10: Advanced Lithography Lithography Troubleshooter from MicroChemicals Application Notes from MicroChemicals Lecture videos 7 videos, 2:41 hours in total Playlist On YouTube Lecture slides TPT slides: Introduction TPT slides: Spin Coating TPT slides: UV Exposure TPT slides: Development TPT slides: Post-processing TPT slides: Process Effects and Examples	Training videos Lithography TPT training videos (Playlist) Maskless aligner training videos (Playlist) Spin Coater: Labspin (manual spin coater) Developer: TMAH Manual Manuals Automatic Spin Coater: Spin Coater: Gamma UV UV Mask Aligner: Aligner: MA6 - 2 Maskless Aligner: Aligner: Maskless 02 or Aligner: Maskless 03 Automatic Puddle Developer: Developer: TMAH UV-lithography Process Flows TPT first print process flow TPT alignment process flow