https://labadviser.nanolab.dtu.dk//index.php?action=history&feed=atom&title=Template%3AProcessRunPeg1Head Template:ProcessRunPeg1Head - Revision history 2026-05-04T07:19:07Z Revision history for this page on the wiki MediaWiki 1.43.3 https://labadviser.nanolab.dtu.dk//index.php?title=Template:ProcessRunPeg1Head&diff=50169&oldid=prev Jmli: Created page with "{| {{{TableStyle}}} |+ '''{{{TableHeader}}}''' ! rowspan="2" {{{PaddingStyle}}} |<span title="The date of the run">Date</span> ! colspan="2" {{{PaddingStyle}}} |<span title="All necessary information about the substrate">Substrate information</span> ! colspan="5" {{{PaddingStyle}}} |<span title="All necessary information about the etch process">Process information</span> |- ! {{{PaddingStyle}}} |<span title="What pattern? Mask material and thickness ">Wafer info</span>..." 2024-11-11T08:05:55Z <p>Created page with &quot;{| {{{TableStyle}}} |+ &#039;&#039;&#039;{{{TableHeader}}}&#039;&#039;&#039; ! rowspan=&quot;2&quot; {{{PaddingStyle}}} |&lt;span title=&quot;The date of the run&quot;&gt;Date&lt;/span&gt; ! colspan=&quot;2&quot; {{{PaddingStyle}}} |&lt;span title=&quot;All necessary information about the substrate&quot;&gt;Substrate information&lt;/span&gt; ! colspan=&quot;5&quot; {{{PaddingStyle}}} |&lt;span title=&quot;All necessary information about the etch process&quot;&gt;Process information&lt;/span&gt; |- ! {{{PaddingStyle}}} |&lt;span title=&quot;What pattern? Mask material and thickness &quot;&gt;Wafer info&lt;/span&gt;...&quot;</p> <p><b>New page</b></p><div>{| {{{TableStyle}}}<br /> |+ &#039;&#039;&#039;{{{TableHeader}}}&#039;&#039;&#039; <br /> ! rowspan=&quot;2&quot; {{{PaddingStyle}}} |&lt;span title=&quot;The date of the run&quot;&gt;Date&lt;/span&gt;<br /> ! colspan=&quot;2&quot; {{{PaddingStyle}}} |&lt;span title=&quot;All necessary information about the substrate&quot;&gt;Substrate information&lt;/span&gt;<br /> ! colspan=&quot;5&quot; {{{PaddingStyle}}} |&lt;span title=&quot;All necessary information about the etch process&quot;&gt;Process information&lt;/span&gt;<br /> |-<br /> ! {{{PaddingStyle}}} |&lt;span title=&quot;What pattern? Mask material and thickness &quot;&gt;Wafer info&lt;/span&gt;<br /> ! {{{PaddingStyle}}} |&lt;span title=&quot;What material is etched? What etch load?&quot;&gt;Mask/exposed area&lt;/span&gt;<br /> ! {{{PaddingStyle}}} |&lt;span title=&quot;Which dry etch tool was used?&quot;&gt;Tool&lt;/span&gt;<br /> ! {{{PaddingStyle}}} |&lt;span title=&quot;What processes were run immediately before to condition the process chamber?&quot;&gt;Conditioning&lt;/span&gt;<br /> ! {{{PaddingStyle}}} |&lt;span title=&quot;What recipe and what duration?&quot;&gt;Recipe&lt;/span&gt;<br /> ! {{{PaddingStyle}}} |&lt;span title=&quot;What wafer ID?&quot;&gt;Wafer ID&lt;/span&gt;<br /> ! {{{PaddingStyle}}} |&lt;span title=&quot;Any comments?&quot;&gt;Comments&lt;/span&gt;<br /> |-</div> Jmli