https://labadviser.nanolab.dtu.dk//index.php?action=history&feed=atom&title=Template%3APeg2cont1 Template:Peg2cont1 - Revision history 2026-05-05T22:12:39Z Revision history for this page on the wiki MediaWiki 1.43.3 https://labadviser.nanolab.dtu.dk//index.php?title=Template:Peg2cont1&diff=41941&oldid=prev Jmli at 13:50, 15 December 2022 2022-12-15T13:50:32Z <p></p> <table style="background-color: #fff; color: #202122;" data-mw="interface"> <col class="diff-marker" /> <col class="diff-content" /> <col class="diff-marker" /> <col class="diff-content" /> <tr class="diff-title" lang="en"> <td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td> <td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 15:50, 15 December 2022</td> </tr><tr><td colspan="2" class="diff-lineno" id="mw-diff-left-l3">Line 3:</td> <td colspan="2" class="diff-lineno">Line 3:</td></tr> <tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|-</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|-</div></td></tr> <tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>! scope=&quot;col&quot; |</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>! scope=&quot;col&quot; |</div></td></tr> <tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>! scope="col" | General</div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>! scope="col" | <ins style="font-weight: bold; text-decoration: none;">&lt;span title="The General tab: Information on gas stabilisation, platen position and ramping" &gt;</ins>General<ins style="font-weight: bold; text-decoration: none;">&lt;/span&gt;</ins></div></td></tr> <tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>! scope="<del style="font-weight: bold; text-decoration: none;">row</del>" | Time</div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>! scope="<ins style="font-weight: bold; text-decoration: none;">col</ins>" | <ins style="font-weight: bold; text-decoration: none;">&lt;span title="Duration of the step in seconds or number of cycles" &gt;</ins>Time<ins style="font-weight: bold; text-decoration: none;">&lt;/span&gt;</ins></div></td></tr> <tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>! scope="<del style="font-weight: bold; text-decoration: none;">row</del>" | Pressure</div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>! scope="<ins style="font-weight: bold; text-decoration: none;">col</ins>" | <ins style="font-weight: bold; text-decoration: none;">&lt;span title="The pressure: Fixed pressure (mTorr) or fixed APC (%) " &gt;</ins>Pressure<ins style="font-weight: bold; text-decoration: none;">&lt;/span&gt;</ins></div></td></tr> <tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>! scope="<del style="font-weight: bold; text-decoration: none;">row</del>" | Gas</div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>! scope="<ins style="font-weight: bold; text-decoration: none;">col</ins>" | <ins style="font-weight: bold; text-decoration: none;">&lt;span title="The flow (sccm) of which gas" &gt;</ins>Gas<ins style="font-weight: bold; text-decoration: none;">&lt;/span&gt;</ins></div></td></tr> <tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>! scope="<del style="font-weight: bold; text-decoration: none;">row</del>" | <del style="font-weight: bold; text-decoration: none;">Pl. Generator</del></div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>! scope="<ins style="font-weight: bold; text-decoration: none;">col</ins>" | <ins style="font-weight: bold; text-decoration: none;">&lt;span title="Parameters of the RF platen generator: Power (W) and F=forward or L=Load mode&gt;  " &gt;Power &lt;/span&gt;</ins></div></td></tr> <tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>! scope="<del style="font-weight: bold; text-decoration: none;">row</del>" | Matching</div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>! scope="<ins style="font-weight: bold; text-decoration: none;">col</ins>" | <ins style="font-weight: bold; text-decoration: none;">&lt;span title="The setpoints for the RF </ins>Matching <ins style="font-weight: bold; text-decoration: none;">parameters: Load and Tune L/T in (%) " &gt;Matching &lt;/span&gt;</ins></div></td></tr> <tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>! scope="<del style="font-weight: bold; text-decoration: none;">row</del>" | Miscellaneous</div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>! scope="<ins style="font-weight: bold; text-decoration: none;">col</ins>" | <ins style="font-weight: bold; text-decoration: none;">&lt;span title="Backside Gas Cooling BGC enabled? ElectroMagnetic coil (EM) enabled? EndPoint Detection enabled?" &gt;</ins>Miscellaneous<ins style="font-weight: bold; text-decoration: none;">&lt;/span&gt;</ins></div></td></tr> <tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|-</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|-</div></td></tr> <tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>! scope=&quot;row&quot; | Setting</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>! scope=&quot;row&quot; | Setting</div></td></tr> </table> Jmli https://labadviser.nanolab.dtu.dk//index.php?title=Template:Peg2cont1&diff=41873&oldid=prev Jmli: Created page with "{| class="mw-collapsible mw-collapsed wikitable" ! scope="col" colspan="8"| {{{stepname}}} &nbsp; |- ! scope="col" | ! scope="col" | General ! scope="row" | Time ! scope="row" | Pressure ! scope="row" | Gas ! scope="row" | Pl. Generator ! scope="row" | Matching ! scope="row" | Miscellaneous |- ! scope="row" | Setting | {{{generalbox }}} | {{{timebox}}} | {{{presbox}}} | {{{gasbox}}} | {{{RFbox}}} | {{{matchbox}}} | {{{miscbox}}} |}" 2022-12-13T14:19:27Z <p>Created page with &quot;{| class=&quot;mw-collapsible mw-collapsed wikitable&quot; ! scope=&quot;col&quot; colspan=&quot;8&quot;| {{{stepname}}}   |- ! scope=&quot;col&quot; | ! scope=&quot;col&quot; | General ! scope=&quot;row&quot; | Time ! scope=&quot;row&quot; | Pressure ! scope=&quot;row&quot; | Gas ! scope=&quot;row&quot; | Pl. Generator ! scope=&quot;row&quot; | Matching ! scope=&quot;row&quot; | Miscellaneous |- ! scope=&quot;row&quot; | Setting | {{{generalbox }}} | {{{timebox}}} | {{{presbox}}} | {{{gasbox}}} | {{{RFbox}}} | {{{matchbox}}} | {{{miscbox}}} |}&quot;</p> <p><b>New page</b></p><div>{| class=&quot;mw-collapsible mw-collapsed wikitable&quot;<br /> ! scope=&quot;col&quot; colspan=&quot;8&quot;| {{{stepname}}} &amp;nbsp;<br /> |-<br /> ! scope=&quot;col&quot; |<br /> ! scope=&quot;col&quot; | General<br /> ! scope=&quot;row&quot; | Time<br /> ! scope=&quot;row&quot; | Pressure<br /> ! scope=&quot;row&quot; | Gas<br /> ! scope=&quot;row&quot; | Pl. Generator<br /> ! scope=&quot;row&quot; | Matching<br /> ! scope=&quot;row&quot; | Miscellaneous<br /> |-<br /> ! scope=&quot;row&quot; | Setting<br /> | {{{generalbox }}}<br /> | {{{timebox}}}<br /> | {{{presbox}}} <br /> | {{{gasbox}}}<br /> | {{{RFbox}}}<br /> | {{{matchbox}}}<br /> | {{{miscbox}}}<br /> |}</div> Jmli