Jmli: Created page with "! rowspan="2" | {{{RecipeName}}} | colspan="39" | {{{PriorProcessSteps}}} | rowspan="2" style="background:cornsilk; color:black;" |{{{BGC-EM-EPD}}} | rowspan="2" | {{{Link2RecipeRun}}} ! rowspan="2" | {{{Keywords}}} |- |style="background:gainsboro; color:black;" |{{{PlatenPositionFrequency}}} |style="background:lightgrey; color:black;" |{{{StabilisationTime}}} |style="background:silver; color:black;" |{{{StartCycleEndCycle}}} |style="background:darkgray; color:black;..."

2022-12-15T14:42:59Z

Created page with "! rowspan="2" | {{{RecipeName}}} | colspan="39" | {{{PriorProcessSteps}}} | rowspan="2" style="background:cornsilk; color:black;" |{{{BGC-EM-EPD}}} | rowspan="2" | {{{Link2RecipeRun}}} ! rowspan="2" | {{{Keywords}}} |- |style="background:gainsboro; color:black;" |{{{PlatenPositionFrequency}}} |style="background:lightgrey; color:black;" |{{{StabilisationTime}}} |style="background:silver; color:black;" |{{{StartCycleEndCycle}}} |style="background:darkgray; color:black;..."

New page

! rowspan="2" | {{{RecipeName}}}
| colspan="39" | {{{PriorProcessSteps}}}
| rowspan="2" style="background:cornsilk; color:black;" |{{{BGC-EM-EPD}}}
| rowspan="2" | {{{Link2RecipeRun}}}
! rowspan="2" | {{{Keywords}}}
|-
|style="background:gainsboro; color:black;" |{{{PlatenPositionFrequency}}}
|style="background:lightgrey; color:black;" |{{{StabilisationTime}}}
|style="background:silver; color:black;" |{{{StartCycleEndCycle}}}
|style="background:darkgray; color:black;" |{{{DepositionTime}}}
|style="background:gray; color:white;" |{{{EtchTime}}}
|style="background:dimgray; color:white;" |{{{NumberOfCycles}}}
|style="background:greenyellow; color:black;" |{{{PressureDepDelay}}}
|style="background:chartreuse; color:black;" |{{{PressureDepBoost}}}
|style="background:lawngreen; color:black;" |{{{PressureDepMain}}}
|style="background:mediumspringgreen; color:white;" |{{{PressureEtchDelay}}}
|style="background:seagreen; color:white;" |{{{PressureEtchBoost}}}
|style="background:forestgreen; color:white;" |{{{PressureEtchMain}}}
|style="background:red; color:black;" |{{{SF6-1Dep}}}
|style="background:red; color:white;" |{{{SF6-1Etch}}}
|style="background:blue; color:black;" |{{{SF6-2Dep}}}
|style="background:blue; color:white;" |{{{SF6-2Etch}}}
|style="background:rosybrown; color:black;" |{{{O2Dep}}}
|style="background:rosybrown; color:white;"|{{{O2Etch}}}
|style="background:moccasin; color:black;" |{{{ArDep}}}
|style="background:moccasin; color:white;"|{{{ArEtch}}}
|style="background:peachpuff; color:black;" |{{{N2Dep}}}
|style="background:peachpuff; color:white;"|{{{N2Etch}}}
|style="background:darkkhaki; color:black;" |{{{HeDep}}}
|style="background:darkkhaki; color:white;"|{{{HeEtch}}}
|style="background:cyan; color:black;" |{{{WCoilDep}}}
|style="background:darkturquoise; color:white;" |{{{WCoilEtch}}}
|style="background:lavender; color:black;" |{{{WPlatenDep}}}
|style="background:mediumorchid; color:white;"|{{{WPlatenEtchDelay}}}
|style="background:mediumpurple; color:white;"|{{{WPlatenEtchBoost}}}
|style="background:blueviolet; color:white;"|{{{WPlatenEtchMain}}}
|style="background:cyan; color:black;"|{{{%CoilDepLoad}}}
| {{{%CoilDepTune}}}
|style="background:darkturquoise; color:white;"|{{{%CoilEtchLoad}}}
| {{{%CoilEtchTune}}}
|style="background:lavender; color:black;"|{{{%PlatenDepLoad}}}
| {{{%PlatenDepTune}}}
|style="background:purple; color:white;"|{{{%PlatenEtchLoad}}}
| {{{%PlatenEtchTune}}}
|style="background:darkorange; color:white;" |{{{Temperature}}}
|-

Template:Peg2TableCAddrowColors - Revision history