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	<id>https://labadviser.nanolab.dtu.dk//index.php?action=history&amp;feed=atom&amp;title=Template%3APeg1Table9Row</id>
	<title>Template:Peg1Table9Row - Revision history</title>
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	<link rel="alternate" type="text/html" href="https://labadviser.nanolab.dtu.dk//index.php?title=Template:Peg1Table9Row&amp;action=history"/>
	<updated>2026-04-28T17:29:43Z</updated>
	<subtitle>Revision history for this page on the wiki</subtitle>
	<generator>MediaWiki 1.43.3</generator>
	<entry>
		<id>https://labadviser.nanolab.dtu.dk//index.php?title=Template:Peg1Table9Row&amp;diff=50174&amp;oldid=prev</id>
		<title>Jmli at 08:17, 11 November 2024</title>
		<link rel="alternate" type="text/html" href="https://labadviser.nanolab.dtu.dk//index.php?title=Template:Peg1Table9Row&amp;diff=50174&amp;oldid=prev"/>
		<updated>2024-11-11T08:17:26Z</updated>

		<summary type="html">&lt;p&gt;&lt;/p&gt;
&lt;table style=&quot;background-color: #fff; color: #202122;&quot; data-mw=&quot;interface&quot;&gt;
				&lt;col class=&quot;diff-marker&quot; /&gt;
				&lt;col class=&quot;diff-content&quot; /&gt;
				&lt;col class=&quot;diff-marker&quot; /&gt;
				&lt;col class=&quot;diff-content&quot; /&gt;
				&lt;tr class=&quot;diff-title&quot; lang=&quot;en&quot;&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;← Older revision&lt;/td&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;Revision as of 10:17, 11 November 2024&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot; id=&quot;mw-diff-left-l48&quot;&gt;Line 48:&lt;/td&gt;
&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 48:&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;br&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;br&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&amp;lt;!--&lt;/div&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&amp;lt;!--&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot; data-marker=&quot;−&quot;&gt;&lt;/td&gt;&lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt; &lt;/div&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot; data-marker=&quot;+&quot;&gt;&lt;/td&gt;&lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;This has been commented out!!!!!&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;|style=&amp;quot;background:gainsboro; color:black;&amp;quot; |&amp;lt;span title=&amp;quot;Platen Up or Down position&amp;quot;&amp;gt;{{{PlatenPosition}}}&amp;lt;/span&amp;gt;&lt;/div&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;|style=&amp;quot;background:gainsboro; color:black;&amp;quot; |&amp;lt;span title=&amp;quot;Platen Up or Down position&amp;quot;&amp;gt;{{{PlatenPosition}}}&amp;lt;/span&amp;gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;br&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;br&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>Jmli</name></author>
	</entry>
	<entry>
		<id>https://labadviser.nanolab.dtu.dk//index.php?title=Template:Peg1Table9Row&amp;diff=50173&amp;oldid=prev</id>
		<title>Jmli: Created page with &quot;! rowspan=&quot;3&quot; |  {{{RecipeName}}} | colspan=&quot;20&quot; style=&quot;text-align:left&quot;| &lt;span title=&quot;Information about prior process steps&quot; &gt; {{{PriorProcessSteps}}}&lt;/span&gt; ! &lt;span title=&quot;Actual pressures in the format (D;B;E) where D=dep, B=break and E=etch&quot;&gt;{{{ActualPressure}}}&lt;/span&gt; ! &lt;span title=&quot;Link to recipe&quot;&gt;{{{Link2RecipeRun}}}&lt;/span&gt; |-  |style=&quot;background:darkorange; color:black;&quot; |&lt;span title=&quot;Platen temperature (deg C)&quot;&gt;{{{Temperature}}}&lt;/span&gt; |style=&quot;background:silver;...&quot;</title>
		<link rel="alternate" type="text/html" href="https://labadviser.nanolab.dtu.dk//index.php?title=Template:Peg1Table9Row&amp;diff=50173&amp;oldid=prev"/>
		<updated>2024-11-11T08:15:41Z</updated>

		<summary type="html">&lt;p&gt;Created page with &amp;quot;! rowspan=&amp;quot;3&amp;quot; |  {{{RecipeName}}} | colspan=&amp;quot;20&amp;quot; style=&amp;quot;text-align:left&amp;quot;| &amp;lt;span title=&amp;quot;Information about prior process steps&amp;quot; &amp;gt; {{{PriorProcessSteps}}}&amp;lt;/span&amp;gt; ! &amp;lt;span title=&amp;quot;Actual pressures in the format (D;B;E) where D=dep, B=break and E=etch&amp;quot;&amp;gt;{{{ActualPressure}}}&amp;lt;/span&amp;gt; ! &amp;lt;span title=&amp;quot;Link to recipe&amp;quot;&amp;gt;{{{Link2RecipeRun}}}&amp;lt;/span&amp;gt; |-  |style=&amp;quot;background:darkorange; color:black;&amp;quot; |&amp;lt;span title=&amp;quot;Platen temperature (deg C)&amp;quot;&amp;gt;{{{Temperature}}}&amp;lt;/span&amp;gt; |style=&amp;quot;background:silver;...&amp;quot;&lt;/p&gt;
&lt;p&gt;&lt;b&gt;New page&lt;/b&gt;&lt;/p&gt;&lt;div&gt;! rowspan=&amp;quot;3&amp;quot; |  {{{RecipeName}}}&lt;br /&gt;
| colspan=&amp;quot;20&amp;quot; style=&amp;quot;text-align:left&amp;quot;| &amp;lt;span title=&amp;quot;Information about prior process steps&amp;quot; &amp;gt; {{{PriorProcessSteps}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
! &amp;lt;span title=&amp;quot;Actual pressures in the format (D;B;E) where D=dep, B=break and E=etch&amp;quot;&amp;gt;{{{ActualPressure}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
! &amp;lt;span title=&amp;quot;Link to recipe&amp;quot;&amp;gt;{{{Link2RecipeRun}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|-&lt;br /&gt;
&lt;br /&gt;
|style=&amp;quot;background:darkorange; color:black;&amp;quot; |&amp;lt;span title=&amp;quot;Platen temperature (deg C)&amp;quot;&amp;gt;{{{Temperature}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:silver; color:black;&amp;quot; |&amp;lt;span title=&amp;quot;Start and End at Etch or Dep cycle&amp;quot;&amp;gt;{{{StartCycleEndCycle}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:darkgray; color:black;&amp;quot; |&amp;lt;span title=&amp;quot;Dep time (s)&amp;quot;&amp;gt;{{{DepositionTime}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:greenyellow; color:black;&amp;quot; |&amp;lt;span title=&amp;quot;Dep Delay pressure (mTorr or APC percentage)&amp;quot;&amp;gt;{{{PressureDepDelay}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:chartreuse; color:black;&amp;quot; |&amp;lt;span title=&amp;quot;Dep Boost pressure (mTorr or APC percentage)&amp;quot;&amp;gt;{{{PressureDepBoost}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:lawngreen; color:black;&amp;quot; |&amp;lt;span title=&amp;quot;Dep Main pressure (mTorr or APC percentage)&amp;quot;&amp;gt;{{{PressureDepMain}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:lightcoral; color:black;&amp;quot; |&amp;lt;span title=&amp;quot;C4F8 Dep Delay flow (sccm)&amp;quot;&amp;gt;{{{C4F8DepDelay}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:salmon; color:black;&amp;quot; |&amp;lt;span title=&amp;quot;C4F8 Dep Dep Boost flow (sccm)&amp;quot;&amp;gt;{{{C4F8DepBoost}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:darksalmon; color:black;&amp;quot; |&amp;lt;span title=&amp;quot;C4F8 Dep Main flow (sccm)&amp;quot;&amp;gt;{{{C4F8DepMain}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:lightsteelblue; color:black;&amp;quot; |&amp;lt;span title=&amp;quot;SF6 Dep Delay flow (sccm)&amp;quot;&amp;gt;{{{SF6DepDelay}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:powderblue; color:black;&amp;quot; |&amp;lt;span title=&amp;quot;SF6 Dep Boostflow (sccm)&amp;quot;&amp;gt;{{{SF6DepBoost}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:skyblue; color:black;&amp;quot; |&amp;lt;span title=&amp;quot;SF6 Dep Main flow (sccm)&amp;quot;&amp;gt;{{{SF6DepMain}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:cyan; color:black;&amp;quot; |&amp;lt;span title=&amp;quot;Coil Dep power (W)&amp;quot;&amp;gt;{{{WCoilDep}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:lavender; color:black;&amp;quot; colspan=&amp;quot;3&amp;quot; align=&amp;quot;center&amp;quot;|&amp;lt;span title=&amp;quot;Platen generator Dep power (W)&amp;quot;&amp;gt;{{{WPlatenDep}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:cyan; color:black;&amp;quot;|&amp;lt;span title=&amp;quot;Coil matching unit Dep Load (%)&amp;quot;&amp;gt;{{{%CoilDepLoad}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:gainsboro; color:black;&amp;quot;    |&amp;lt;span title=&amp;quot;Coil matching unit Dep Tune (%)&amp;quot;&amp;gt;{{{%CoilDepTune}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:purple; color:black;&amp;quot;|&amp;lt;span title=&amp;quot;Platen matching unit Etch Load (%)&amp;quot;&amp;gt;{{{%PlatenEtchLoad}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:gainsboro; color:black;&amp;quot;|&amp;lt;span title=&amp;quot;Platen matching unit Etch Tune (%)&amp;quot;&amp;gt;{{{%PlatenEtchTune}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
! colspan=&amp;quot;2&amp;quot; rowspan=&amp;quot;2&amp;quot;|  &amp;lt;span title=&amp;quot;Keywords&amp;quot;&amp;gt;{{{Keywords}}}&amp;lt;/span&amp;gt;  &lt;br /&gt;
|-&lt;br /&gt;
|style=&amp;quot;background:gainsboro; color:white;&amp;quot; |&amp;lt;span title=&amp;quot;Platen generator high (13.56 MHz or HF) or low (380 kHz or LF) frequency&amp;quot;&amp;gt;{{{PlatenFrequency}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:dimgray; color:white;&amp;quot; |&amp;lt;span title=&amp;quot;Number of cycles&amp;quot;&amp;gt;{{{NumberOfCycles}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:gray; color:white;&amp;quot; |&amp;lt;span title=&amp;quot;Etch time (s)&amp;quot;&amp;gt;{{{EtchTime}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:mediumspringgreen; color:white;&amp;quot; |&amp;lt;span title=&amp;quot;Etch Delaypressure (mTorr or APC percentage)&amp;quot;&amp;gt;{{{PressureEtchDelay}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:seagreen; color:white;&amp;quot; |&amp;lt;span title=&amp;quot;Etch Boost pressure (mTorr or APC percentage)&amp;quot;&amp;gt;{{{PressureEtchBoost}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:forestgreen; color:white;&amp;quot; |&amp;lt;span title=&amp;quot;Etch Main pressure (mTorr or APC percentage)&amp;quot;&amp;gt;{{{PressureEtchMain}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:crimson; color:white;&amp;quot; |&amp;lt;span title=&amp;quot;C4F8 Etch Delay flow (sccm)&amp;quot;&amp;gt;{{{C4F8EtchDelay}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:firebrick; color:white;&amp;quot; |&amp;lt;span title=&amp;quot;C4F8 Etch Boost flow (sccm)&amp;quot;&amp;gt;{{{C4F8EtchBoost}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:darkred; color:white;&amp;quot; |&amp;lt;span title=&amp;quot;C4F Etch Main flow (sccm)&amp;quot;&amp;gt;{{{C4F8EtchMain}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:deepskyblue; color:white;&amp;quot;|&amp;lt;span title=&amp;quot;SF6 Etch Delay flow (sccm)&amp;quot;&amp;gt;{{{SF6EtchDelay}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:dodgerblue; color:white;&amp;quot; |&amp;lt;span title=&amp;quot;SF6 Etch Boostflow (sccm)&amp;quot;&amp;gt;{{{SF6EtchBoost}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:cornflowerblue; color:white;&amp;quot;|&amp;lt;span title=&amp;quot;SF6 Etch Main flow (sccm)&amp;quot;&amp;gt;{{{SF6EtchMain}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:darkturquoise; color:white;&amp;quot; |&amp;lt;span title=&amp;quot;Coil generator Etch power (W)&amp;quot;&amp;gt;{{{WCoilEtch}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:mediumorchid; color:white;&amp;quot;|&amp;lt;span title=&amp;quot;Platen generator Etch Delay power (W)&amp;quot;&amp;gt;{{{WPlatenEtchDelay}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:mediumpurple; color:white;&amp;quot;|&amp;lt;span title=&amp;quot;Platen generator Etch Boost power (W)&amp;quot;&amp;gt;{{{WPlatenEtchBoost}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:blueviolet; color:white;&amp;quot;|&amp;lt;span title=&amp;quot;Platen generator Etch Main power (W)&amp;quot;&amp;gt;{{{WPlatenEtchMain}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:darkturquoise; color:white;&amp;quot;|&amp;lt;span title=&amp;quot;Coil matching unit Etch Load (%)&amp;quot;&amp;gt;{{{%CoilEtchLoad}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
| style=&amp;quot;background:gainsboro; color:black;&amp;quot;|&amp;lt;span title=&amp;quot;Coil matching unit Etch Tune (%)&amp;quot;&amp;gt;{{{%CoilEtchTune}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:lavender; color:black;&amp;quot;|&amp;lt;span title=&amp;quot;Platen matching unit Dep Load (%)&amp;quot;&amp;gt;{{{%PlatenDepLoad}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:gainsboro; color:black;&amp;quot;|&amp;lt;span title=&amp;quot;Platen matching unit Dep Tune (%)&amp;quot;&amp;gt;{{{%PlatenDepTune}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|-&lt;br /&gt;
&lt;br /&gt;
&amp;lt;!--&lt;br /&gt;
&lt;br /&gt;
|style=&amp;quot;background:gainsboro; color:black;&amp;quot; |&amp;lt;span title=&amp;quot;Platen Up or Down position&amp;quot;&amp;gt;{{{PlatenPosition}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
&lt;br /&gt;
|-&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
|style=&amp;quot;background:chocolate; color:black;&amp;quot;|&amp;lt;span title=&amp;quot;Claritas generator Dep power (W)&amp;quot;&amp;gt;{{{WClaritasDep}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:chocolate; color:white;&amp;quot;|&amp;lt;span title=&amp;quot;Claritas generator Etch power (W)&amp;quot;&amp;gt;{{{WClaritasEtch}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
|style=&amp;quot;background:chocolate; color:black;&amp;quot;| &amp;lt;span title=&amp;quot;Claritas matching unit Load &amp;quot;&amp;gt;{{{%CLaritasLoad}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
|style=&amp;quot;background:chocolate; color:white;&amp;quot;| &amp;lt;span title=&amp;quot;Claritas matching unit Tune&amp;quot;&amp;gt;{{{%ClaritasTune}}}&amp;lt;/span&amp;gt;&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
|-&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
--&amp;gt;&lt;/div&gt;</summary>
		<author><name>Jmli</name></author>
	</entry>
</feed>