https://labadviser.nanolab.dtu.dk//index.php?action=history&feed=atom&title=Template%3APeg1Table9Head 2026-04-19T16:33:10Z Revision history for this page on the wiki MediaWiki 1.43.3 https://labadviser.nanolab.dtu.dk//index.php?title=Template:Peg1Table9Head&diff=50172&oldid=prev 2024-11-11T08:14:36Z

<p>Created page with &quot;{| {{{TableStyle}}} {{{PaddingStyle}}} |+&#039;&#039;&#039;{{{TableHeader}}}&#039;&#039;&#039; |- ! style=&quot;background:gainsboro; {{{PaddingStyle}}} color:black;&quot; rowspan=&quot;4&quot; | &lt;span title=&quot;Recipe name&quot; &gt;Recipe&lt;/span&gt; ! style=&quot;background:gainsboro; {{{PaddingStyle}}} color:black;&quot; colspan=&quot;3&quot; rowspan=&quot;2&quot; | &lt;span title=&quot;The General tab&quot; &gt;General&lt;/span&gt; ! style=&quot;background:lime; {{{PaddingStyle}}} color:black;&quot; colspan=&quot;3&quot; rowspan=&quot;2&quot;| &lt;span title=&quot;The Pressure tab. Either (%) - fixed APC or (mTorr) -...&quot;</p> <p><b>New page</b></p><div>{| {{{TableStyle}}} {{{PaddingStyle}}}<br /> |+&#039;&#039;&#039;{{{TableHeader}}}&#039;&#039;&#039;<br /> |- <br /> ! style=&quot;background:gainsboro; {{{PaddingStyle}}} color:black;&quot; rowspan=&quot;4&quot; | &lt;span title=&quot;Recipe name&quot; &gt;Recipe&lt;/span&gt;<br /> ! style=&quot;background:gainsboro; {{{PaddingStyle}}} color:black;&quot; colspan=&quot;3&quot; rowspan=&quot;2&quot; | &lt;span title=&quot;The General tab&quot; &gt;General&lt;/span&gt;<br /> ! style=&quot;background:lime; {{{PaddingStyle}}} color:black;&quot; colspan=&quot;3&quot; rowspan=&quot;2&quot;| &lt;span title=&quot;The Pressure tab. Either (%) - fixed APC or (mTorr) - fixed pressure&quot; &gt;Pressure&lt;/span&gt;<br /> ! style=&quot;background:hotpink; {{{PaddingStyle}}} color:black;&quot; colspan=&quot;6&quot; | &lt;span title=&quot;The Gases tab&quot; &gt;Gases&lt;/span&gt;<br /> ! style=&quot;background:midnightblue; {{{PaddingStyle}}} color:white;&quot; colspan=&quot;4&quot; | &lt;span title=&quot;The Generators tab&quot; &gt;Generators&lt;/span&gt;<br /> ! style=&quot;background:white; {{{PaddingStyle}}} color:midnightblue;&quot; colspan=&quot;4&quot; | &lt;span title=&quot;The Matching tab&quot; &gt;Matching&lt;/span&gt;<br /> ! style=&quot;background:gainsboro; {{{PaddingStyle}}} color:black;&quot; colspan=&quot;2&quot; rowspan=&quot;2&quot;| &lt;span title=&quot;The results of process runs using the recipe. Variations are duration of process, substrates, mask material, etch loads etc. &quot; &gt; Results&lt;/span&gt;<br /> |-<br /> ! style=&quot;background:red; {{{PaddingStyle}}} color:black;&quot; colspan=&quot;3&quot; | &lt;span title=&quot;The C4F8 flow (sccm)&quot;&gt;C&lt;sub&gt;4&lt;/sub&gt;F&lt;sub&gt;8&lt;/sub&gt;&lt;/span&gt;<br /> ! style=&quot;background:Blue; {{{PaddingStyle}}} color:white;&quot; colspan=&quot;3&quot; | &lt;span title=&quot;The SF6 flow (sccm) &quot;&gt; SF&lt;sub&gt;6&lt;/sub&gt; &lt;/span&gt;<br /> ! style=&quot;background:Cyan; {{{PaddingStyle}}} color:black;&quot; | &lt;span title=&quot;The power of the coil generator(kW) &quot;&gt; Coil &lt;/span&gt;<br /> ! style=&quot;background:purple; {{{PaddingStyle}}} color:white;&quot; colspan=&quot;3&quot; | &lt;span title=&quot;The power of the platen generator (W) &quot;&gt; Platen &lt;/span&gt;<br /> ! style=&quot;background:Cyan; {{{PaddingStyle}}} color:black;&quot; colspan=&quot;2&quot; | &lt;span title=&quot;The RF matching settings for the coil generator (%) &quot;&gt; Coil &lt;/span&gt;<br /> ! style=&quot;background:purple; {{{PaddingStyle}}} color:white;&quot; colspan=&quot;2&quot; | &lt;span title=&quot;The RF matching settings for the platen generator (%) &quot;&gt; Platen &lt;/span&gt;<br /> |-<br /> ! style=&quot;background:darkorange; {{{PaddingStyle}}} color:black;&quot; | &lt;span title=&quot;The temperature of the platen chiller&quot; &gt;T&lt;/span&gt;<br /> ! style=&quot;background:silver; {{{PaddingStyle}}} color:black;&quot; | &lt;span title=&quot;Start and End cycle&quot; &gt;S/E&lt;/span&gt;<br /> ! style=&quot;background:darkgray; {{{PaddingStyle}}} color:black;&quot; | &lt;span title=&quot;Duration of the deposition cycle (s)&quot; &gt;Dp&lt;/span&gt;<br /> ! style=&quot;background:greenyellow; {{{PaddingStyle}}} color:black;&quot; | &lt;span title=&quot;Dep Delay&quot;&gt;D&lt;/span&gt;<br /> ! style=&quot;background:chartreuse; {{{PaddingStyle}}} color:black;&quot; | &lt;span title=&quot;Dep Boost&quot;&gt;B&lt;/span&gt;<br /> ! style=&quot;background:lawngreen; {{{PaddingStyle}}} color:black;&quot; | &lt;span title=&quot;Dep Main&quot;&gt;M&lt;/span&gt;<br /> ! style=&quot;background:lightcoral; {{{PaddingStyle}}} color:black;&quot; | &lt;span title=&quot;Dep Delay&quot;&gt;D&lt;/span&gt;<br /> ! style=&quot;background:salmon; {{{PaddingStyle}}} color:black;&quot; | &lt;span title=&quot;Dep Boost&quot;&gt;B&lt;/span&gt;<br /> ! style=&quot;background:darksalmon; {{{PaddingStyle}}} color:black;&quot; | &lt;span title=&quot;Dep Main&quot;&gt;M&lt;/span&gt;<br /> ! style=&quot;background:lightsteelblue; {{{PaddingStyle}}} color:black;&quot; | &lt;span title=&quot;Dep Delay&quot;&gt;D&lt;/span&gt;<br /> ! style=&quot;background:powderblue; {{{PaddingStyle}}} color:black;&quot; | &lt;span title=&quot;Dep Boost&quot;&gt;B&lt;/span&gt;<br /> ! style=&quot;background:skyblue; {{{PaddingStyle}}} color:black;&quot; | &lt;span title=&quot;Dep Main&quot;&gt;M&lt;/span&gt;<br /> ! style=&quot;background:cyan; {{{PaddingStyle}}} color:black;&quot; | &lt;span title=&quot;Deposition cycle&quot;&gt;Dp&lt;/span&gt;<br /> ! style=&quot;background:lavender; {{{PaddingStyle}}} color:black;&quot; colspan=&quot;3&quot; | &lt;span title=&quot;Dep cycle&quot;&gt;Dep&lt;/span&gt;<br /> ! style=&quot;background:cyan; {{{PaddingStyle}}} color:black;&quot; |&lt;span title=&quot;Dep Load&quot;&gt;L&lt;/span&gt;<br /> ! style=&quot;background:gainsboro; {{{PaddingStyle}}} color:black; |&lt;span title=&quot;Dep Tune&quot;&gt;T&lt;/span&gt;<br /> ! style=&quot;background:purple; {{{PaddingStyle}}} color:black;&quot; |&lt;span title=&quot;Dep Load&quot;&gt;L&lt;/span&gt;<br /> ! style=&quot;background:gainsboro; {{{PaddingStyle}}} color:black; |&lt;span title=&quot;Dep Tune&quot;&gt;T&lt;/span&gt;<br /> ! style=&quot;background:gainsboro; {{{PaddingStyle}}} color:black;&quot; | &lt;span title=&quot;If fixed APC is used: Indicate the actual pressures here in the format (D;B;E) where D=dep, B=break and E=etch&quot;&gt;Pressure&lt;/span&gt;<br /> ! style=&quot;background:gainsboro; {{{PaddingStyle}}} color:black;&quot; | &lt;span title=&quot;Results of process runs&quot;&gt;Runs&lt;/span&gt;<br /> |-<br /> ! style=&quot;background:gainsboro; {{{PaddingStyle}}} color:black;&quot; |&lt;span title=&quot;Platen High frequency (13.56MHz) or Low Frequency (380 kHz) generator&quot;&gt;H/L&lt;/span&gt;<br /> ! style=&quot;background:dimgray; {{{PaddingStyle}}} color:black;&quot; | &lt;span title=&quot;The number of cycles. This is only relevant for recipes with ramped parameters.&quot; &gt;Cyc&lt;/span&gt;<br /> ! style=&quot;background:gray; {{{PaddingStyle}}} color:black;&quot; | &lt;span title=&quot;Duration of the etch cycle (s)&quot; &gt;Et&lt;/span&gt;<br /> ! style=&quot;background:mediumspringgreen; {{{PaddingStyle}}} color:white;&quot; | &lt;span title=&quot;Etch Delay&quot;&gt;D&lt;/span&gt;<br /> ! style=&quot;background:seagreen; {{{PaddingStyle}}} color:white;&quot; | &lt;span title=&quot;Etch Boost&quot;&gt;B&lt;/span&gt;<br /> ! style=&quot;background:forestgreen; {{{PaddingStyle}}} color:white;&quot; | &lt;span title=&quot;Etch Main&quot;&gt;M&lt;/span&gt;<br /> ! style=&quot;background:crimson; {{{PaddingStyle}}} color:white;&quot; | &lt;span title=&quot;Etch Delay&quot;&gt;D&lt;/span&gt;<br /> ! style=&quot;background:firebrick; {{{PaddingStyle}}} color:white;&quot; | &lt;span title=&quot;Etch Boost&quot;&gt;B&lt;/span&gt;<br /> ! style=&quot;background:darkred; {{{PaddingStyle}}} color:white;&quot; | &lt;span title=&quot;Etch Main&quot;&gt;M&lt;/span&gt;<br /> ! style=&quot;background:deepskyblue; {{{PaddingStyle}}} color:white;&quot; | &lt;span title=&quot;Etch Delay&quot;&gt;D&lt;/span&gt;<br /> ! style=&quot;background:dodgerblue; {{{PaddingStyle}}} color:white;&quot; | &lt;span title=&quot;Etch Boost&quot;&gt;B&lt;/span&gt;<br /> ! style=&quot;background:cornflowerblue; {{{PaddingStyle}}} color:white;&quot; | &lt;span title=&quot;Etch Main&quot;&gt;M&lt;/span&gt;<br /> ! style=&quot;background:darkturquoise; {{{PaddingStyle}}} color:white;&quot; | &lt;span title=&quot;Etch cycle&quot; &gt;Et&lt;/span&gt;<br /> ! style=&quot;background:mediumorchid; {{{PaddingStyle}}} color:white;&quot;| &lt;span title=&quot;Etch Delay&quot;&gt;D&lt;/span&gt;<br /> ! style=&quot;background:mediumpurple; {{{PaddingStyle}}} color:white;&quot;| &lt;span title=&quot;Etch Boost&quot;&gt;B&lt;/span&gt;<br /> ! style=&quot;background:blueviolet; {{{PaddingStyle}}} color:white;&quot;| &lt;span title=&quot;Etch Main&quot;&gt;M&lt;/span&gt;<br /> ! style=&quot;background:darkturquoise; {{{PaddingStyle}}} color:white;&quot; |&lt;span title=&quot;Etch Load&quot;&gt;L&lt;/span&gt;<br /> ! style=&quot;background:gainsboro; {{{PaddingStyle}}} color:black; | &lt;span title=&quot;Etch Tune&quot;&gt;T&lt;/span&gt;<br /> ! style=&quot;background:lavender; {{{PaddingStyle}}} color:black;&quot; |&lt;span title=&quot;Etch Load&quot;&gt;L&lt;/span&gt;<br /> ! style=&quot;background:gainsboro; {{{PaddingStyle}}} color:black; | &lt;span title=&quot;Etch Tune&quot;&gt;T&lt;/span&gt;<br /> ! style=&quot;background:gainsboro; {{{PaddingStyle}}} color:black;&quot; colspan=&quot;2&quot; | &lt;span title=&quot;Process keywords&quot;&gt;Keywords&lt;/span&gt;<br /> |-</div>

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