https://labadviser.nanolab.dtu.dk//index.php?action=history&feed=atom&title=Template%3APeg1RecipeTableVerCColors 2026-05-02T04:11:50Z Revision history for this page on the wiki MediaWiki 1.43.3 https://labadviser.nanolab.dtu.dk//index.php?title=Template:Peg1RecipeTableVerCColors&diff=37865&oldid=prev 2020-12-17T10:28:25Z

<p></p> <table style="background-color: #fff; color: #202122;" data-mw="interface"> <col class="diff-marker" /> <col class="diff-content" /> <col class="diff-marker" /> <col class="diff-content" /> <tr class="diff-title" lang="en"> <td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td> <td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 12:28, 17 December 2020</td> </tr><tr><td colspan="2" class="diff-lineno" id="mw-diff-left-l24">Line 24:</td> <td colspan="2" class="diff-lineno">Line 24:</td></tr> <tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>! style=&quot;background:darkgray; color:black;&quot; rowspan=&quot;2&quot; | &lt;span title=&quot;Duration of the deposition cycle (s)&quot; &gt;Dp&lt;/span&gt;</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>! style=&quot;background:darkgray; color:black;&quot; rowspan=&quot;2&quot; | &lt;span title=&quot;Duration of the deposition cycle (s)&quot; &gt;Dp&lt;/span&gt;</div></td></tr> <tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>! style=&quot;background:gray; color:white;&quot; rowspan=&quot;2&quot; | &lt;span title=&quot;Duration of the etch cycle (s)&quot; &gt;Et&lt;/span&gt;</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>! style=&quot;background:gray; color:white;&quot; rowspan=&quot;2&quot; | &lt;span title=&quot;Duration of the etch cycle (s)&quot; &gt;Et&lt;/span&gt;</div></td></tr> <tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>! style="background:dimgray; color:white;" rowspan="2" | &lt;span title="The number of cycles" &gt;Cyc&lt;/span&gt;</div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>! style="background:dimgray; color:white;" rowspan="2" | &lt;span title="The number of cycles<ins style="font-weight: bold; text-decoration: none;">. This is only relevant for recipes with ramped parameters.</ins>" &gt;Cyc&lt;/span&gt;</div></td></tr> <tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>! style=&quot;background:lime; color:black;&quot; colspan=&quot;3&quot; | &lt;span title=&quot;Deposition cycle&quot;&gt;Dp&lt;/span&gt;</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>! style=&quot;background:lime; color:black;&quot; colspan=&quot;3&quot; | &lt;span title=&quot;Deposition cycle&quot;&gt;Dp&lt;/span&gt;</div></td></tr> <tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>! style=&quot;background:lime; color:white;&quot; colspan=&quot;3&quot; | &lt;span title=&quot;Etch cycle&quot;&gt;Et&lt;/span&gt;</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>! style=&quot;background:lime; color:white;&quot; colspan=&quot;3&quot; | &lt;span title=&quot;Etch cycle&quot;&gt;Et&lt;/span&gt;</div></td></tr> </table>

Jmli https://labadviser.nanolab.dtu.dk//index.php?title=Template:Peg1RecipeTableVerCColors&diff=37596&oldid=prev 2020-10-20T14:03:58Z

<p>Created page with &quot;{| class=&quot;wikitable mw-collapsible autocollapse&quot; border=&quot;2&quot; style=&quot;text-align:center;&quot; |+&#039;&#039;&#039;{{{TableHeader}}}&#039;&#039;&#039; |- ! rowspan=&quot;4&quot; | &lt;span title=&quot;Recipe name&quot; &gt;Recipe&lt;/span&gt; !...&quot;</p> <p><b>New page</b></p><div>{| class=&quot;wikitable mw-collapsible autocollapse&quot; border=&quot;2&quot; style=&quot;text-align:center;&quot;<br /> |+&#039;&#039;&#039;{{{TableHeader}}}&#039;&#039;&#039;<br /> |-<br /> ! rowspan=&quot;4&quot; | &lt;span title=&quot;Recipe name&quot; &gt;Recipe&lt;/span&gt;<br /> ! style=&quot;background:gainsboro; color:black;&quot; colspan=&quot;7&quot; rowspan=&quot;2&quot; | &lt;span title=&quot;The General tab&quot; &gt;General&lt;/span&gt;<br /> ! style=&quot;background:lime; color:black;&quot; colspan=&quot;6&quot; rowspan=&quot;2&quot;| &lt;span title=&quot;The Pressure tab. Either (%) - fixed APC or (mTorr) - fixed pressure&quot; &gt;Pressure&lt;/span&gt;<br /> ! style=&quot;background:hotpink; color:black;&quot; colspan=&quot;14&quot; | &lt;span title=&quot;The Gases tab&quot; &gt;Gases&lt;/span&gt;<br /> ! style=&quot;background:midnightblue; color:white;&quot; colspan=&quot;6&quot; | &lt;span title=&quot;The Generators tab&quot; &gt;Generators&lt;/span&gt;<br /> ! style=&quot;background:white; color:midnightblue;&quot; colspan=&quot;8&quot; | &lt;span title=&quot;The Matching tab&quot; &gt;Matching&lt;/span&gt;<br /> ! style=&quot;background:darkorange; color:white;&quot; rowspan=&quot;4&quot; width=&quot;30&quot; | &lt;span title=&quot;The temperature of the platen chiller&quot; &gt;Tem- pera- ture &lt;/span&gt;<br /> ! rowspan=&quot;2&quot; colspan=&quot;2&quot; | &lt;span title=&quot;The results of process runs using the recipe. Variations are duration of process, substrates, mask material, etch loads etc. &quot; &gt; Results&lt;/span&gt;<br /> |-<br /> ! style=&quot;background:red; color:black;&quot; colspan=&quot;6&quot; | &lt;span title=&quot;The C4F8 flow (sccm)&quot;&gt;C&lt;sub&gt;4&lt;/sub&gt;F&lt;sub&gt;8&lt;/sub&gt;&lt;/span&gt;<br /> ! style=&quot;background:Blue; color:white;&quot; colspan=&quot;6&quot; | &lt;span title=&quot;The SF6 flow (sccm) &quot;&gt; SF&lt;sub&gt;6&lt;/sub&gt; &lt;/span&gt;<br /> ! style=&quot;background:rosybrown; color:black;&quot; colspan=&quot;2&quot; | &lt;span title=&quot;The Ar flow (sccm) &quot;&gt; Ar &lt;/span&gt;<br /> ! style=&quot;background:Cyan; color:black;&quot; colspan=&quot;2&quot; | &lt;span title=&quot;The power of the coil generator(kW) &quot;&gt; Coil &lt;/span&gt;<br /> ! style=&quot;background:purple; color:white;&quot; colspan=&quot;4&quot; | &lt;span title=&quot;The power of the platen generator (W) &quot;&gt; Platen &lt;/span&gt;<br /> ! style=&quot;background:Cyan; color:black;&quot; colspan=&quot;4&quot; | &lt;span title=&quot;The RF matching settings for the coil generator (%) &quot;&gt; Coil &lt;/span&gt;<br /> ! style=&quot;background:purple; color:white;&quot; colspan=&quot;4&quot; | &lt;span title=&quot;The RF matching settings for the platen generator (%) &quot;&gt; Platen &lt;/span&gt;<br /> |-<br /> ! style=&quot;background:gainsboro; color:black;&quot; colspan=&quot;2&quot; | &lt;span title=&quot;Settings for platen generator&quot; &gt;Platen&lt;/span&gt;<br /> ! style=&quot;background:lightgrey; color:black;&quot; rowspan=&quot;2&quot; | &lt;span title=&quot;Stabilisation time (s)&quot; &gt;Stb&lt;/span&gt;<br /> ! style=&quot;background:silver; color:black;&quot; rowspan=&quot;2&quot; | &lt;span title=&quot;Start and End cycle&quot; &gt;S/E&lt;/span&gt;<br /> ! style=&quot;background:darkgray; color:black;&quot; rowspan=&quot;2&quot; | &lt;span title=&quot;Duration of the deposition cycle (s)&quot; &gt;Dp&lt;/span&gt;<br /> ! style=&quot;background:gray; color:white;&quot; rowspan=&quot;2&quot; | &lt;span title=&quot;Duration of the etch cycle (s)&quot; &gt;Et&lt;/span&gt;<br /> ! style=&quot;background:dimgray; color:white;&quot; rowspan=&quot;2&quot; | &lt;span title=&quot;The number of cycles&quot; &gt;Cyc&lt;/span&gt;<br /> ! style=&quot;background:lime; color:black;&quot; colspan=&quot;3&quot; | &lt;span title=&quot;Deposition cycle&quot;&gt;Dp&lt;/span&gt;<br /> ! style=&quot;background:lime; color:white;&quot; colspan=&quot;3&quot; | &lt;span title=&quot;Etch cycle&quot;&gt;Et&lt;/span&gt;<br /> ! style=&quot;background:red; color:black;&quot; colspan=&quot;3&quot; | &lt;span title=&quot;Deposition cycle&quot;&gt;Dp&lt;/span&gt;<br /> ! style=&quot;background:red; color:white;&quot; colspan=&quot;3&quot; | &lt;span title=&quot;Etch cycle&quot;&gt;Et&lt;/span&gt;<br /> ! style=&quot;background:Blue; color:black;&quot; colspan=&quot;3&quot; | &lt;span title=&quot;Deposition cycle&quot;&gt; Dp&lt;/span&gt;<br /> ! style=&quot;background:Blue; color:white;&quot; colspan=&quot;3&quot; | &lt;span title=&quot;Etch cycle&quot;&gt;Et&lt;/span&gt;<br /> ! style=&quot;background:rosybrown; color:black;&quot; rowspan=&quot;2&quot; | &lt;span title=&quot;Deposition cycle&quot;&gt; Dp&lt;/span&gt;<br /> ! style=&quot;background:rosybrown; color:white;&quot; rowspan=&quot;2&quot; | &lt;span title=&quot;Etch cycle&quot;&gt;Et&lt;/span&gt;<br /> ! style=&quot;background:cyan; color:black;&quot; rowspan=&quot;2&quot; | &lt;span title=&quot;Deposition cycle&quot;&gt;Dp&lt;/span&gt;<br /> ! style=&quot;background:darkturquoise; color:white;&quot; rowspan=&quot;2&quot; | &lt;span title=&quot;Etch cycle&quot; &gt;Et&lt;/span&gt;<br /> ! style=&quot;background:lavender; color:black;&quot; rowspan=&quot;2&quot; | &lt;span title=&quot;Deposition cycle&quot;&gt;Dp&lt;/span&gt;<br /> ! style=&quot;background:purple; color:white;&quot; colspan=&quot;3&quot; | &lt;span title=&quot;Etch cycle&quot;&gt;Et&lt;/span&gt;<br /> ! style=&quot;background:cyan; color:black;&quot; colspan=&quot;2&quot; | &lt;span title=&quot;Deposition cycle&quot;&gt;Dp&lt;/span&gt;<br /> ! style=&quot;background:darkturquoise; color:white;&quot; colspan=&quot;2&quot; | &lt;span title=&quot;Etch cycle&quot; &gt;Et &lt;/span&gt;<br /> ! style=&quot;background:lavender; color:black;&quot; colspan=&quot;2&quot; | &lt;span title=&quot;Deposition cycle&quot;&gt;Dp&lt;/span&gt;<br /> ! style=&quot;background:purple; color:white;&quot; colspan=&quot;2&quot; | &lt;span title=&quot;Etch cycle&quot; &gt;Et&lt;/span&gt;<br /> ! rowspan=&quot;2&quot; | &lt;span title=&quot;Results of process runs&quot;&gt;Runs&lt;/span&gt;<br /> ! rowspan=&quot;2&quot; | &lt;span title=&quot;Process keywords&quot;&gt;Keywords&lt;/span&gt;<br /> |-<br /> ! style=&quot;background:gainsboro; color:black;&quot; |&lt;span title=&quot;Platen Up or Down position&quot;&gt;U/D&lt;/span&gt;<br /> ! style=&quot;background:gainsboro; color:white;&quot; |&lt;span title=&quot;Platen High frequency (13.56MHz) or Low Frequency (380 kHz) generator&quot;&gt;H/L&lt;/span&gt;<br /> ! style=&quot;background:greenyellow; color:black;&quot; | &lt;span title=&quot;Delay&quot;&gt;D&lt;/span&gt;<br /> ! style=&quot;background:chartreuse; color:black;&quot; | &lt;span title=&quot;Boost&quot;&gt;B&lt;/span&gt;<br /> ! style=&quot;background:lawngreen; color:black;&quot; | &lt;span title=&quot;Main&quot;&gt;M&lt;/span&gt;<br /> ! style=&quot;background:mediumspringgreen; color:white;&quot; | &lt;span title=&quot;Delay&quot;&gt;D&lt;/span&gt;<br /> ! style=&quot;background:seagreen; color:white;&quot; | &lt;span title=&quot;Boost&quot;&gt;B&lt;/span&gt;<br /> ! style=&quot;background:forestgreen; color:white;&quot; | &lt;span title=&quot;Main&quot;&gt;M&lt;/span&gt;<br /> ! style=&quot;background:lightcoral; color:black;&quot; | &lt;span title=&quot;Delay&quot;&gt;D&lt;/span&gt;<br /> ! style=&quot;background:salmon; color:black;&quot; | &lt;span title=&quot;Boost&quot;&gt;B&lt;/span&gt;<br /> ! style=&quot;background:darksalmon; color:black;&quot; | &lt;span title=&quot;Main&quot;&gt;M&lt;/span&gt;<br /> ! style=&quot;background:crimson; color:white;&quot; | &lt;span title=&quot;Delay&quot;&gt;D&lt;/span&gt;<br /> ! style=&quot;background:firebrick; color:white;&quot; | &lt;span title=&quot;Boost&quot;&gt;B&lt;/span&gt;<br /> ! style=&quot;background:darkred; color:white;&quot; | &lt;span title=&quot;Main&quot;&gt;M&lt;/span&gt;<br /> ! style=&quot;background:lightsteelblue; color:black;&quot; | &lt;span title=&quot;Delay&quot;&gt;D&lt;/span&gt;<br /> ! style=&quot;background:powderblue; color:black;&quot; | &lt;span title=&quot;Boost&quot;&gt;B&lt;/span&gt;<br /> ! style=&quot;background:skyblue; color:black;&quot; | &lt;span title=&quot;Main&quot;&gt;M&lt;/span&gt;<br /> ! style=&quot;background:deepskyblue; color:white;&quot; | &lt;span title=&quot;Delay&quot;&gt;D&lt;/span&gt;<br /> ! style=&quot;background:dodgerblue; color:white;&quot; | &lt;span title=&quot;Boost&quot;&gt;B&lt;/span&gt;<br /> ! style=&quot;background:cornflowerblue; color:white;&quot; | &lt;span title=&quot;Main&quot;&gt;M&lt;/span&gt;<br /> ! style=&quot;background:mediumorchid; color:white;&quot;| &lt;span title=&quot;Delay&quot;&gt;D&lt;/span&gt;<br /> ! style=&quot;background:mediumpurple; color:white;&quot;| &lt;span title=&quot;Boost&quot;&gt;B&lt;/span&gt;<br /> ! style=&quot;background:blueviolet; color:white;&quot;| &lt;span title=&quot;Main&quot;&gt;M&lt;/span&gt;<br /> ! style=&quot;background:cyan; color:black;&quot; |&lt;span title=&quot;Load&quot;&gt;L&lt;/span&gt;<br /> ! &lt;span title=&quot;Tune&quot;&gt;T&lt;/span&gt;<br /> ! style=&quot;background:darkturquoise; color:white;&quot; |&lt;span title=&quot;Load&quot;&gt;L&lt;/span&gt;<br /> ! &lt;span title=&quot;Tune&quot;&gt;T&lt;/span&gt;<br /> ! style=&quot;background:lavender; color:black;&quot; |&lt;span title=&quot;Load&quot;&gt;L&lt;/span&gt;<br /> ! &lt;span title=&quot;Tune&quot;&gt;T&lt;/span&gt;<br /> !style=&quot;background:purple; color:white;&quot; |&lt;span title=&quot;Load&quot;&gt;L&lt;/span&gt;<br /> ! &lt;span title=&quot;Tune&quot;&gt;T&lt;/span&gt;<br /> |-</div>

Jmli