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	<id>https://labadviser.nanolab.dtu.dk//index.php?action=history&amp;feed=atom&amp;title=Template%3APeg1RecipeTableVerCAddrowColors</id>
	<title>Template:Peg1RecipeTableVerCAddrowColors - Revision history</title>
	<link rel="self" type="application/atom+xml" href="https://labadviser.nanolab.dtu.dk//index.php?action=history&amp;feed=atom&amp;title=Template%3APeg1RecipeTableVerCAddrowColors"/>
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	<updated>2026-04-30T01:49:28Z</updated>
	<subtitle>Revision history for this page on the wiki</subtitle>
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	<entry>
		<id>https://labadviser.nanolab.dtu.dk//index.php?title=Template:Peg1RecipeTableVerCAddrowColors&amp;diff=37597&amp;oldid=prev</id>
		<title>Jmli: Created page with &quot;! rowspan=&quot;2&quot; |  {{{RecipeName}}} | colspan=&quot;42&quot; | {{{PriorProcessSteps}}} | rowspan=&quot;2&quot; | {{{Link2RecipeRun}}} ! rowspan=&quot;2&quot; |  {{{Keywords}}}   |- |style=&quot;background:gainsbo...&quot;</title>
		<link rel="alternate" type="text/html" href="https://labadviser.nanolab.dtu.dk//index.php?title=Template:Peg1RecipeTableVerCAddrowColors&amp;diff=37597&amp;oldid=prev"/>
		<updated>2020-10-20T14:04:35Z</updated>

		<summary type="html">&lt;p&gt;Created page with &amp;quot;! rowspan=&amp;quot;2&amp;quot; |  {{{RecipeName}}} | colspan=&amp;quot;42&amp;quot; | {{{PriorProcessSteps}}} | rowspan=&amp;quot;2&amp;quot; | {{{Link2RecipeRun}}} ! rowspan=&amp;quot;2&amp;quot; |  {{{Keywords}}}   |- |style=&amp;quot;background:gainsbo...&amp;quot;&lt;/p&gt;
&lt;p&gt;&lt;b&gt;New page&lt;/b&gt;&lt;/p&gt;&lt;div&gt;! rowspan=&amp;quot;2&amp;quot; |  {{{RecipeName}}}&lt;br /&gt;
| colspan=&amp;quot;42&amp;quot; | {{{PriorProcessSteps}}}&lt;br /&gt;
| rowspan=&amp;quot;2&amp;quot; | {{{Link2RecipeRun}}}&lt;br /&gt;
! rowspan=&amp;quot;2&amp;quot; |  {{{Keywords}}}  &lt;br /&gt;
|-&lt;br /&gt;
|style=&amp;quot;background:gainsboro; color:black;&amp;quot; |{{{PlatenPosition}}}&lt;br /&gt;
|style=&amp;quot;background:gainsboro; color:white;&amp;quot; |{{{PlatenFrequency}}}&lt;br /&gt;
|style=&amp;quot;background:lightgrey; color:black;&amp;quot; |{{{StabilisationTime}}}&lt;br /&gt;
|style=&amp;quot;background:silver; color:black;&amp;quot; |{{{StartCycleEndCycle}}}&lt;br /&gt;
|style=&amp;quot;background:darkgray; color:black;&amp;quot; |{{{DepositionTime}}}&lt;br /&gt;
|style=&amp;quot;background:gray; color:white;&amp;quot; |{{{EtchTime}}}&lt;br /&gt;
|style=&amp;quot;background:dimgray; color:white;&amp;quot; |{{{NumberOfCycles}}}&lt;br /&gt;
|style=&amp;quot;background:greenyellow; color:black;&amp;quot; |{{{PressureDepDelay}}}&lt;br /&gt;
|style=&amp;quot;background:chartreuse; color:black;&amp;quot; |{{{PressureDepBoost}}}&lt;br /&gt;
|style=&amp;quot;background:lawngreen; color:black;&amp;quot; |{{{PressureDepMain}}}&lt;br /&gt;
|style=&amp;quot;background:mediumspringgreen; color:white;&amp;quot; |{{{PressureEtchDelay}}}&lt;br /&gt;
|style=&amp;quot;background:seagreen; color:white;&amp;quot; |{{{PressureEtchBoost}}}&lt;br /&gt;
|style=&amp;quot;background:forestgreen; color:white;&amp;quot; |{{{PressureEtchMain}}}&lt;br /&gt;
|style=&amp;quot;background:lightcoral; color:black;&amp;quot; |{{{C4F8DepDelay}}}&lt;br /&gt;
|style=&amp;quot;background:salmon; color:black;&amp;quot; |{{{C4F8DepBoost}}}&lt;br /&gt;
|style=&amp;quot;background:darksalmon; color:black;&amp;quot; |{{{C4F8DepMain}}}&lt;br /&gt;
|style=&amp;quot;background:crimson; color:white;&amp;quot; |{{{C4F8EtchDelay}}}&lt;br /&gt;
|style=&amp;quot;background:firebrick; color:white;&amp;quot; |{{{C4F8EtchBoost}}}&lt;br /&gt;
|style=&amp;quot;background:darkred; color:white;&amp;quot; |{{{C4F8EtchMain}}}&lt;br /&gt;
|style=&amp;quot;background:lightsteelblue; color:black;&amp;quot; |{{{SF6DepDelay}}}&lt;br /&gt;
|style=&amp;quot;background:powderblue; color:black;&amp;quot; |{{{SF6DepBoost}}}&lt;br /&gt;
|style=&amp;quot;background:skyblue; color:black;&amp;quot; |{{{SF6DepMain}}}&lt;br /&gt;
|style=&amp;quot;background:deepskyblue; color:white;&amp;quot;|{{{SF6EtchDelay}}}&lt;br /&gt;
|style=&amp;quot;background:dodgerblue; color:white;&amp;quot; |{{{SF6EtchBoost}}}&lt;br /&gt;
|style=&amp;quot;background:cornflowerblue; color:white;&amp;quot;|{{{SF6EtchMain}}}&lt;br /&gt;
|style=&amp;quot;background:rosybrown; color:black;&amp;quot;|{{{ArDep}}}&lt;br /&gt;
|style=&amp;quot;background:rosybrown; color:white;&amp;quot;|{{{ArEtch}}}&lt;br /&gt;
|style=&amp;quot;background:cyan; color:black;&amp;quot; |{{{WCoilDep}}}&lt;br /&gt;
|style=&amp;quot;background:darkturquoise; color:white;&amp;quot; |{{{WCoilEtch}}}&lt;br /&gt;
|style=&amp;quot;background:lavender; color:black;&amp;quot; |{{{WPlatenDep}}}&lt;br /&gt;
|style=&amp;quot;background:mediumorchid; color:white;&amp;quot;|{{{WPlatenEtchDelay}}}&lt;br /&gt;
|style=&amp;quot;background:mediumpurple; color:white;&amp;quot;|{{{WPlatenEtchBoost}}}&lt;br /&gt;
|style=&amp;quot;background:blueviolet; color:white;&amp;quot;|{{{WPlatenEtchMain}}}&lt;br /&gt;
|style=&amp;quot;background:cyan; color:black;&amp;quot;|{{{%CoilDepLoad}}}&lt;br /&gt;
||{{{%CoilDepTune}}}&lt;br /&gt;
|style=&amp;quot;background:darkturquoise; color:white;&amp;quot;|{{{%CoilEtchLoad}}}&lt;br /&gt;
||{{{%CoilEtchTune}}}&lt;br /&gt;
|style=&amp;quot;background:lavender; color:black;&amp;quot;|{{{%PlatenDepLoad}}}&lt;br /&gt;
||{{{%PlatenDepTune}}}&lt;br /&gt;
|style=&amp;quot;background:purple; color:white;&amp;quot;|{{{%PlatenEtchLoad}}}&lt;br /&gt;
||{{{%PlatenEtchTune}}}&lt;br /&gt;
|style=&amp;quot;background:darkorange; color:white;&amp;quot; |{{{Temperature}}}&lt;br /&gt;
|-&lt;/div&gt;</summary>
		<author><name>Jmli</name></author>
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